JP2001251829A5 - - Google Patents

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Publication number
JP2001251829A5
JP2001251829A5 JP2000062456A JP2000062456A JP2001251829A5 JP 2001251829 A5 JP2001251829 A5 JP 2001251829A5 JP 2000062456 A JP2000062456 A JP 2000062456A JP 2000062456 A JP2000062456 A JP 2000062456A JP 2001251829 A5 JP2001251829 A5 JP 2001251829A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000062456A
Other languages
Japanese (ja)
Other versions
JP2001251829A (ja
JP4419258B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000062456A priority Critical patent/JP4419258B2/ja
Priority claimed from JP2000062456A external-priority patent/JP4419258B2/ja
Publication of JP2001251829A publication Critical patent/JP2001251829A/ja
Publication of JP2001251829A5 publication Critical patent/JP2001251829A5/ja
Application granted granted Critical
Publication of JP4419258B2 publication Critical patent/JP4419258B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2000062456A 2000-03-07 2000-03-07 ターボ分子ポンプ Expired - Lifetime JP4419258B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000062456A JP4419258B2 (ja) 2000-03-07 2000-03-07 ターボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000062456A JP4419258B2 (ja) 2000-03-07 2000-03-07 ターボ分子ポンプ

Publications (3)

Publication Number Publication Date
JP2001251829A JP2001251829A (ja) 2001-09-14
JP2001251829A5 true JP2001251829A5 (enExample) 2006-07-20
JP4419258B2 JP4419258B2 (ja) 2010-02-24

Family

ID=18582466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000062456A Expired - Lifetime JP4419258B2 (ja) 2000-03-07 2000-03-07 ターボ分子ポンプ

Country Status (1)

Country Link
JP (1) JP4419258B2 (enExample)

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