JP2001251829A5 - - Google Patents
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- Publication number
- JP2001251829A5 JP2001251829A5 JP2000062456A JP2000062456A JP2001251829A5 JP 2001251829 A5 JP2001251829 A5 JP 2001251829A5 JP 2000062456 A JP2000062456 A JP 2000062456A JP 2000062456 A JP2000062456 A JP 2000062456A JP 2001251829 A5 JP2001251829 A5 JP 2001251829A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000062456A JP4419258B2 (ja) | 2000-03-07 | 2000-03-07 | ターボ分子ポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000062456A JP4419258B2 (ja) | 2000-03-07 | 2000-03-07 | ターボ分子ポンプ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001251829A JP2001251829A (ja) | 2001-09-14 |
| JP2001251829A5 true JP2001251829A5 (ja) | 2006-07-20 |
| JP4419258B2 JP4419258B2 (ja) | 2010-02-24 |
Family
ID=18582466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000062456A Expired - Lifetime JP4419258B2 (ja) | 2000-03-07 | 2000-03-07 | ターボ分子ポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4419258B2 (ja) |
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2000
- 2000-03-07 JP JP2000062456A patent/JP4419258B2/ja not_active Expired - Lifetime