JP4415462B2 - ガス放電パネル - Google Patents

ガス放電パネル Download PDF

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Publication number
JP4415462B2
JP4415462B2 JP2000260394A JP2000260394A JP4415462B2 JP 4415462 B2 JP4415462 B2 JP 4415462B2 JP 2000260394 A JP2000260394 A JP 2000260394A JP 2000260394 A JP2000260394 A JP 2000260394A JP 4415462 B2 JP4415462 B2 JP 4415462B2
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Japan
Prior art keywords
substrate
gas
film
plasma
protective film
Prior art date
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Expired - Fee Related
Application number
JP2000260394A
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English (en)
Japanese (ja)
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JP2002075224A5 (enExample
JP2002075224A (ja
Inventor
塩川　　晃
宏一 小寺
加奈子 宮下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Priority to JP2000260394A priority Critical patent/JP4415462B2/ja
Publication of JP2002075224A publication Critical patent/JP2002075224A/ja
Publication of JP2002075224A5 publication Critical patent/JP2002075224A5/ja
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Publication of JP4415462B2 publication Critical patent/JP4415462B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000260394A 2000-08-30 2000-08-30 ガス放電パネル Expired - Fee Related JP4415462B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000260394A JP4415462B2 (ja) 2000-08-30 2000-08-30 ガス放電パネル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000260394A JP4415462B2 (ja) 2000-08-30 2000-08-30 ガス放電パネル

Publications (3)

Publication Number Publication Date
JP2002075224A JP2002075224A (ja) 2002-03-15
JP2002075224A5 JP2002075224A5 (enExample) 2007-09-13
JP4415462B2 true JP4415462B2 (ja) 2010-02-17

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ID=18748412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000260394A Expired - Fee Related JP4415462B2 (ja) 2000-08-30 2000-08-30 ガス放電パネル

Country Status (1)

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JP (1) JP4415462B2 (enExample)

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Publication number Publication date
JP2002075224A (ja) 2002-03-15

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