JP4391731B2 - 高さ測定方法及び共焦点型光学測定装置 - Google Patents

高さ測定方法及び共焦点型光学測定装置 Download PDF

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JP4391731B2
JP4391731B2 JP2002272246A JP2002272246A JP4391731B2 JP 4391731 B2 JP4391731 B2 JP 4391731B2 JP 2002272246 A JP2002272246 A JP 2002272246A JP 2002272246 A JP2002272246 A JP 2002272246A JP 4391731 B2 JP4391731 B2 JP 4391731B2
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light intensity
value
information
height
sample
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Japanese (ja)
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JP2004108947A (ja
JP2004108947A5 (https=
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秀夫 渡部
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Olympus Corp
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Olympus Corp
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Priority to JP2002272246A priority Critical patent/JP4391731B2/ja
Priority to PCT/JP2003/007750 priority patent/WO2003107064A1/ja
Publication of JP2004108947A publication Critical patent/JP2004108947A/ja
Priority to US11/015,076 priority patent/US20050122577A1/en
Publication of JP2004108947A5 publication Critical patent/JP2004108947A5/ja
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  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
JP2002272246A 2002-06-01 2002-09-18 高さ測定方法及び共焦点型光学測定装置 Expired - Fee Related JP4391731B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2002272246A JP4391731B2 (ja) 2002-09-18 2002-09-18 高さ測定方法及び共焦点型光学測定装置
PCT/JP2003/007750 WO2003107064A1 (ja) 2002-06-01 2003-06-18 共焦点顕微鏡及び、この共焦点顕微鏡による測定方法
US11/015,076 US20050122577A1 (en) 2002-06-18 2004-12-16 Confocal microscope and measuring method by this confocal microscope

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JP2002272246A JP4391731B2 (ja) 2002-09-18 2002-09-18 高さ測定方法及び共焦点型光学測定装置

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JP2004108947A JP2004108947A (ja) 2004-04-08
JP2004108947A5 JP2004108947A5 (https=) 2005-10-20
JP4391731B2 true JP4391731B2 (ja) 2009-12-24

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202010010932U1 (de) * 2010-04-19 2011-10-07 Witec Wissenschaftliche Instrumente Und Technologie Gmbh Vorrichtung zur Abbildung einer Probenoberfläche
JP5537281B2 (ja) 2010-06-21 2014-07-02 オリンパス株式会社 顕微鏡装置および画像取得方法
US8928874B2 (en) * 2012-02-24 2015-01-06 Mitutoyo Corporation Method for identifying abnormal spectral profiles measured by a chromatic confocal range sensor
US8860931B2 (en) * 2012-02-24 2014-10-14 Mitutoyo Corporation Chromatic range sensor including measurement reliability characterization

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3789516B2 (ja) * 1994-12-02 2006-06-28 株式会社キーエンス レーザ顕微鏡
JPH0968413A (ja) * 1995-08-31 1997-03-11 Olympus Optical Co Ltd 高さ測定方法及び共焦点走査型光学顕微鏡
JPH11211439A (ja) * 1998-01-22 1999-08-06 Takaoka Electric Mfg Co Ltd 表面形状計測装置
JP2001091844A (ja) * 1999-09-22 2001-04-06 Olympus Optical Co Ltd 共焦点走査型顕微鏡

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