JP4390614B2 - 膜厚測定装置 - Google Patents

膜厚測定装置 Download PDF

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Publication number
JP4390614B2
JP4390614B2 JP2004129543A JP2004129543A JP4390614B2 JP 4390614 B2 JP4390614 B2 JP 4390614B2 JP 2004129543 A JP2004129543 A JP 2004129543A JP 2004129543 A JP2004129543 A JP 2004129543A JP 4390614 B2 JP4390614 B2 JP 4390614B2
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Japan
Prior art keywords
coil
measurement
film thickness
eddy current
thickness measuring
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Expired - Fee Related
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JP2004129543A
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English (en)
Japanese (ja)
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JP2005227256A5 (enExample
JP2005227256A (ja
Inventor
直樹 水谷
純平 湯山
凱 陳
顕二 南津
均 濱中
裕之 平野
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Ulvac Inc
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Ulvac Inc
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Priority to JP2004129543A priority Critical patent/JP4390614B2/ja
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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2004129543A 2004-01-16 2004-04-26 膜厚測定装置 Expired - Fee Related JP4390614B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004129543A JP4390614B2 (ja) 2004-01-16 2004-04-26 膜厚測定装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004009114 2004-01-16
JP2004129543A JP4390614B2 (ja) 2004-01-16 2004-04-26 膜厚測定装置

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JP2005227256A JP2005227256A (ja) 2005-08-25
JP2005227256A5 JP2005227256A5 (enExample) 2007-04-12
JP4390614B2 true JP4390614B2 (ja) 2009-12-24

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JP2004129543A Expired - Fee Related JP4390614B2 (ja) 2004-01-16 2004-04-26 膜厚測定装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106152927A (zh) * 2015-03-23 2016-11-23 佛山市顺德区美的电热电器制造有限公司 检测金属厚度的装置及方法

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4888765B2 (ja) * 2006-04-24 2012-02-29 株式会社アルバック 膜厚計及び膜厚の測定方法
JP2008087091A (ja) * 2006-09-29 2008-04-17 Tokyo Seimitsu Co Ltd 平面インダクタ搭載静電結合型センサ及びそれを用いた終点検出方法及び終点検出装置
EP1925905B1 (en) * 2006-11-23 2011-03-02 Abb Ab Signal processing method and unit for a dimension-gauging system
DE102007033751A1 (de) * 2007-07-19 2009-01-22 Cherry Gmbh Anordnung eines Spulenpaares in einem örtlichen Messbereich
JP5158680B2 (ja) * 2007-09-15 2013-03-06 株式会社東京精密 研磨終了時点の予測方法
JP5495493B2 (ja) 2008-02-07 2014-05-21 株式会社東京精密 膜厚測定装置、及び膜厚測定方法
JP5730747B2 (ja) * 2010-12-10 2015-06-10 株式会社荏原製作所 渦電流センサ並びに研磨方法および装置
US9605940B2 (en) 2011-05-25 2017-03-28 Helmut Fischer GbmH Institut für Elektronik und Messtechnik Measuring probe for measuring the thickness of thin layers, and method for the production of a sensor element for the measuring probe
CN105675657B (zh) * 2016-01-12 2020-07-28 中国地质大学（武汉） 一种基于趋肤效应的样品表面覆膜无损检测方法及系统
CN108369865B (zh) * 2016-02-12 2019-10-15 株式会社村田制作所 带引线的电子部件

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106152927A (zh) * 2015-03-23 2016-11-23 佛山市顺德区美的电热电器制造有限公司 检测金属厚度的装置及方法

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