JP2005227256A5 - - Google Patents
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- JP2005227256A5 JP2005227256A5 JP2004129543A JP2004129543A JP2005227256A5 JP 2005227256 A5 JP2005227256 A5 JP 2005227256A5 JP 2004129543 A JP2004129543 A JP 2004129543A JP 2004129543 A JP2004129543 A JP 2004129543A JP 2005227256 A5 JP2005227256 A5 JP 2005227256A5
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- JP
- Japan
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004129543A JP4390614B2 (ja) | 2004-01-16 | 2004-04-26 | 膜厚測定装置 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004009114 | 2004-01-16 | ||
| JP2004129543A JP4390614B2 (ja) | 2004-01-16 | 2004-04-26 | 膜厚測定装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005227256A JP2005227256A (ja) | 2005-08-25 |
| JP2005227256A5 true JP2005227256A5 (enExample) | 2007-04-12 |
| JP4390614B2 JP4390614B2 (ja) | 2009-12-24 |
Family
ID=35002069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004129543A Expired - Fee Related JP4390614B2 (ja) | 2004-01-16 | 2004-04-26 | 膜厚測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4390614B2 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4888765B2 (ja) * | 2006-04-24 | 2012-02-29 | 株式会社アルバック | 膜厚計及び膜厚の測定方法 |
| JP2008087091A (ja) * | 2006-09-29 | 2008-04-17 | Tokyo Seimitsu Co Ltd | 平面インダクタ搭載静電結合型センサ及びそれを用いた終点検出方法及び終点検出装置 |
| EP1925905B1 (en) * | 2006-11-23 | 2011-03-02 | Abb Ab | Signal processing method and unit for a dimension-gauging system |
| DE102007033751A1 (de) * | 2007-07-19 | 2009-01-22 | Cherry Gmbh | Anordnung eines Spulenpaares in einem örtlichen Messbereich |
| JP5158680B2 (ja) * | 2007-09-15 | 2013-03-06 | 株式会社東京精密 | 研磨終了時点の予測方法 |
| JP5495493B2 (ja) | 2008-02-07 | 2014-05-21 | 株式会社東京精密 | 膜厚測定装置、及び膜厚測定方法 |
| JP5730747B2 (ja) * | 2010-12-10 | 2015-06-10 | 株式会社荏原製作所 | 渦電流センサ並びに研磨方法および装置 |
| US9605940B2 (en) | 2011-05-25 | 2017-03-28 | Helmut Fischer GbmH Institut für Elektronik und Messtechnik | Measuring probe for measuring the thickness of thin layers, and method for the production of a sensor element for the measuring probe |
| CN106152927A (zh) * | 2015-03-23 | 2016-11-23 | 佛山市顺德区美的电热电器制造有限公司 | 检测金属厚度的装置及方法 |
| CN105675657B (zh) * | 2016-01-12 | 2020-07-28 | 中国地质大学（武汉） | 一种基于趋肤效应的样品表面覆膜无损检测方法及系统 |
| CN108369865B (zh) * | 2016-02-12 | 2019-10-15 | 株式会社村田制作所 | 带引线的电子部件 |
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2004
- 2004-04-26 JP JP2004129543A patent/JP4390614B2/ja not_active Expired - Fee Related