JP2005227256A5 - - Google Patents

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Publication number
JP2005227256A5
JP2005227256A5 JP2004129543A JP2004129543A JP2005227256A5 JP 2005227256 A5 JP2005227256 A5 JP 2005227256A5 JP 2004129543 A JP2004129543 A JP 2004129543A JP 2004129543 A JP2004129543 A JP 2004129543A JP 2005227256 A5 JP2005227256 A5 JP 2005227256A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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JP2004129543A
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JP4390614B2 (ja
JP2005227256A (ja
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Priority to JP2004129543A priority Critical patent/JP4390614B2/ja
Priority claimed from JP2004129543A external-priority patent/JP4390614B2/ja
Publication of JP2005227256A publication Critical patent/JP2005227256A/ja
Publication of JP2005227256A5 publication Critical patent/JP2005227256A5/ja
Application granted granted Critical
Publication of JP4390614B2 publication Critical patent/JP4390614B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004129543A 2004-01-16 2004-04-26 膜厚測定装置 Expired - Fee Related JP4390614B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004129543A JP4390614B2 (ja) 2004-01-16 2004-04-26 膜厚測定装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004009114 2004-01-16
JP2004129543A JP4390614B2 (ja) 2004-01-16 2004-04-26 膜厚測定装置

Publications (3)

Publication Number Publication Date
JP2005227256A JP2005227256A (ja) 2005-08-25
JP2005227256A5 true JP2005227256A5 (ja) 2007-04-12
JP4390614B2 JP4390614B2 (ja) 2009-12-24

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ID=35002069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004129543A Expired - Fee Related JP4390614B2 (ja) 2004-01-16 2004-04-26 膜厚測定装置

Country Status (1)

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JP (1) JP4390614B2 (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4888765B2 (ja) * 2006-04-24 2012-02-29 株式会社アルバック 膜厚計及び膜厚の測定方法
JP2008087091A (ja) * 2006-09-29 2008-04-17 Tokyo Seimitsu Co Ltd 平面インダクタ搭載静電結合型センサ及びそれを用いた終点検出方法及び終点検出装置
ATE500487T1 (de) * 2006-11-23 2011-03-15 Abb Ab SIGNALVERARBEITUNGSVERFAHREN UND EINHEIT FÜR EIN GRÖßENMESSSYSTEM
DE102007033751A1 (de) * 2007-07-19 2009-01-22 Cherry Gmbh Anordnung eines Spulenpaares in einem örtlichen Messbereich
JP5158680B2 (ja) * 2007-09-15 2013-03-06 株式会社東京精密 研磨終了時点の予測方法
JP5495493B2 (ja) 2008-02-07 2014-05-21 株式会社東京精密 膜厚測定装置、及び膜厚測定方法
JP5730747B2 (ja) * 2010-12-10 2015-06-10 株式会社荏原製作所 渦電流センサ並びに研磨方法および装置
ES2763330T3 (es) * 2011-05-25 2020-05-28 Helmut Fischer Gmbh Inst Fuer Elektronik Und Messtechnik Sonda de medición para medir el grosor de capas delgadas así como un procedimiento para fabricar un elemento sensor para la sonda de medición
CN106152927A (zh) * 2015-03-23 2016-11-23 佛山市顺德区美的电热电器制造有限公司 检测金属厚度的装置及方法
CN105675657B (zh) * 2016-01-12 2020-07-28 中国地质大学（武汉） 一种基于趋肤效应的样品表面覆膜无损检测方法及系统
WO2017138555A1 (ja) * 2016-02-12 2017-08-17 株式会社村田製作所 リード線付き電子部品

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