JP4379902B2 - 光導波路デバイスの製造方法 - Google Patents

光導波路デバイスの製造方法 Download PDF

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Publication number
JP4379902B2
JP4379902B2 JP2000208580A JP2000208580A JP4379902B2 JP 4379902 B2 JP4379902 B2 JP 4379902B2 JP 2000208580 A JP2000208580 A JP 2000208580A JP 2000208580 A JP2000208580 A JP 2000208580A JP 4379902 B2 JP4379902 B2 JP 4379902B2
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Japan
Prior art keywords
optical waveguide
substrate
cutting
waveguide device
dicing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2000208580A
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English (en)
Japanese (ja)
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JP2002022993A (ja
JP2002022993A5 (pt
Inventor
宏 増田
信生 宮寺
亨 高橋
正利 山口
敏裕 黒田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Showa Denko Materials Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Hitachi Chemical Co Ltd, Showa Denko Materials Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP2000208580A priority Critical patent/JP4379902B2/ja
Publication of JP2002022993A publication Critical patent/JP2002022993A/ja
Publication of JP2002022993A5 publication Critical patent/JP2002022993A5/ja
Application granted granted Critical
Publication of JP4379902B2 publication Critical patent/JP4379902B2/ja
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Expired - Lifetime legal-status Critical Current

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JP2000208580A 2000-07-10 2000-07-10 光導波路デバイスの製造方法 Expired - Lifetime JP4379902B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000208580A JP4379902B2 (ja) 2000-07-10 2000-07-10 光導波路デバイスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000208580A JP4379902B2 (ja) 2000-07-10 2000-07-10 光導波路デバイスの製造方法

Publications (3)

Publication Number Publication Date
JP2002022993A JP2002022993A (ja) 2002-01-23
JP2002022993A5 JP2002022993A5 (pt) 2007-04-26
JP4379902B2 true JP4379902B2 (ja) 2009-12-09

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ID=18705138

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JP2000208580A Expired - Lifetime JP4379902B2 (ja) 2000-07-10 2000-07-10 光導波路デバイスの製造方法

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JP (1) JP4379902B2 (pt)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2002367343A1 (en) * 2001-12-28 2003-07-24 Hitachi Chemical Co., Ltd. Polymer optical waveguide film
JP4440697B2 (ja) 2004-04-22 2010-03-24 浜松ホトニクス株式会社 光導波路基板及びその製造方法
JP2006145902A (ja) * 2004-11-19 2006-06-08 Fujitsu Ltd 光伝送用チップおよびその製造方法
TW200730906A (en) * 2005-11-18 2007-08-16 Hitachi Chemical Co Ltd Optical device
JP4905176B2 (ja) * 2007-02-22 2012-03-28 Ｊｓｒ株式会社 フィルム状光導波路の製造方法
CN110998386B (zh) * 2017-08-16 2022-10-28 Ａｇｃ株式会社 聚合物光波导

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Publication number Publication date
JP2002022993A (ja) 2002-01-23

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