JP4374040B2 - 半導体製造装置 - Google Patents
半導体製造装置 Download PDFInfo
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- JP4374040B2 JP4374040B2 JP2007172530A JP2007172530A JP4374040B2 JP 4374040 B2 JP4374040 B2 JP 4374040B2 JP 2007172530 A JP2007172530 A JP 2007172530A JP 2007172530 A JP2007172530 A JP 2007172530A JP 4374040 B2 JP4374040 B2 JP 4374040B2
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- 239000004065 semiconductor Substances 0.000 title claims description 54
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 238000005304 joining Methods 0.000 claims description 17
- 230000002093 peripheral effect Effects 0.000 claims description 11
- 230000000644 propagated effect Effects 0.000 claims description 9
- 238000000034 method Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009916 joint effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L24/36—Structure, shape, material or disposition of the strap connectors prior to the connecting process
- H01L24/37—Structure, shape, material or disposition of the strap connectors prior to the connecting process of an individual strap connector
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L24/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L24/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/77—Apparatus for connecting with strap connectors
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/84—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/36—Structure, shape, material or disposition of the strap connectors prior to the connecting process
- H01L2224/37—Structure, shape, material or disposition of the strap connectors prior to the connecting process of an individual strap connector
- H01L2224/37001—Core members of the connector
- H01L2224/37099—Material
- H01L2224/371—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/37138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/37147—Copper [Cu] as principal constituent
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/4005—Shape
- H01L2224/4009—Loop shape
- H01L2224/40091—Arched
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- H—ELECTRICITY
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/401—Disposition
- H01L2224/40151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/40221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/40245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/83801—Soldering or alloying
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- H—ELECTRICITY
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- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/84—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
- H01L2224/842—Applying energy for connecting
- H01L2224/84201—Compression bonding
- H01L2224/84205—Ultrasonic bonding
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/01006—Carbon [C]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/01033—Arsenic [As]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01047—Silver [Ag]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
Description
半導体チップ1にはトランジスタ素子などが集積化された集積回路が形成され、半導体チップ1の表裏両面のそれぞれには集積回路と電気的に接続された電極パッドが形成されている。集積回路、電極パッド等は、チップにされる前のウェーハ状態でのウェーハ処理工程で形成され、その後のダイシング工程を経て半導体チップ1が得られる。以降、半導体チップ1を外部回路に接続させるためのボンディング工程や、パッケージング(樹脂封止)工程等が行われていく。
Claims (5)
- 異なる高さに位置する2箇所の接合箇所に同時に超音波振動を与えて前記2箇所の接合箇所の接合を同時に行う半導体製造装置であって、
円柱体と、前記円柱体の外周面に設けられ、前記円柱体を介して超音波振動が伝播される第1の突出部と、前記第1の突出部とは異なる突出量で前記円柱体の外周面に設けられ、前記円柱体を介して超音波振動が伝播される第2の突出部とを備え、
前記円柱体の軸心と前記第1の突出部の先端との距離と、前記円柱体の軸心と前記第2の突出部の先端との距離とが略同じであることを特徴とする半導体製造装置。 - 異なる高さに位置する2箇所の接合箇所に同時に超音波振動を与えて前記2箇所の接合箇所の接合を同時に行う半導体製造装置であって、
円柱体と、前記円柱体の外周面に設けられ、前記円柱体を介して超音波振動が伝播される第1の突出部と、前記第1の突出部とは異なる突出量で前記円柱体の外周面に設けられ、前記円柱体を介して超音波振動が伝播される第2の突出部とを備え、
前記円柱体の軸心と前記第1の突出部の先端との距離と、前記円柱体の軸心と前記第2の突出部の先端との距離とが略同じである状態を基準設定として、前記2箇所の接合箇所の接合条件に応じて、前記円柱体の軸心に対する前記第1の突出部の先端と前記第2の突出部の先端との距離比を前記基準設定から変動させたことを特徴とする半導体製造装置。 - 前記第1の突出部の先端及び前記第2の突出部の先端に複数の突起が設けられたことを特徴とする請求項1または2に記載の半導体製造装置。
- 前記第1の突出部の突出方向と前記第2の突出部の突出方向とが略平行であることを特徴とする請求項1〜3のいずれか1つに記載の半導体製造装置。
- 前記第1の突出部の先端面と前記第2の突出部の先端面とが略平行であり、前記先端面における前記超音波振動の縦振動方向は前記先端面に対して略平行であることを特徴とする請求項1〜4のいずれか1つに記載の半導体製造装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007172530A JP4374040B2 (ja) | 2007-06-29 | 2007-06-29 | 半導体製造装置 |
US12/163,158 US20090001135A1 (en) | 2007-06-29 | 2008-06-27 | Semiconductor manufacturing apparatus and semiconductor manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007172530A JP4374040B2 (ja) | 2007-06-29 | 2007-06-29 | 半導体製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009010294A JP2009010294A (ja) | 2009-01-15 |
JP4374040B2 true JP4374040B2 (ja) | 2009-12-02 |
Family
ID=40159165
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007172530A Expired - Fee Related JP4374040B2 (ja) | 2007-06-29 | 2007-06-29 | 半導体製造装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US20090001135A1 (ja) |
JP (1) | JP4374040B2 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5231792B2 (ja) * | 2007-12-07 | 2013-07-10 | ローム株式会社 | 電子装置の製造方法 |
JP5566258B2 (ja) * | 2009-11-26 | 2014-08-06 | 京セラ株式会社 | 太陽電池モジュール及びその製造装置 |
WO2017079085A1 (en) * | 2015-11-04 | 2017-05-11 | Orthodyne Electronics Corporation | Ribbon bonding tools, and methods of designing ribbon bonding tools |
JP2019013959A (ja) * | 2017-07-06 | 2019-01-31 | イーグル工業株式会社 | 超音波接合治具、接合構造及び接合方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3586555A (en) * | 1969-08-01 | 1971-06-22 | Ultrasonic Systems | Apparatus and method of continuously joining thermoplastic coated wires |
US3780926A (en) * | 1972-06-02 | 1973-12-25 | Dukane Corp | Ultrasonic rigid horn assembly |
US3813006A (en) * | 1973-02-02 | 1974-05-28 | Branson Instr | Replaceable welding tip for vibratory welding apparatus |
US4473432A (en) * | 1983-02-04 | 1984-09-25 | Harold Leader | Dot heat stapling |
DE3335254A1 (de) * | 1983-09-29 | 1985-04-18 | Schunk Ultraschalltechnik Gmbh, 8750 Aschaffenburg | Vorrichtung zum verbinden bzw. verdichten elektrischer leiter |
JPS6443830A (en) * | 1987-08-11 | 1989-02-16 | Mitsui Petrochemical Ind | Production of substrate for information recording |
US4817814A (en) * | 1987-08-28 | 1989-04-04 | American Technology, Inc. | Ultrasonically welding a conductor wire to an electrical terminal |
JP3455344B2 (ja) * | 1995-10-20 | 2003-10-14 | 株式会社オートネットワーク技術研究所 | 超音波溶接装置 |
JP3099942B2 (ja) * | 1996-08-08 | 2000-10-16 | 株式会社アルテクス | 超音波振動接合用共振器 |
DE29713448U1 (de) * | 1997-07-29 | 1997-10-23 | Spaichingen Gmbh Maschf | Vorrichtung zur Ultraschallbearbeitung von Werkstücken |
US5906694A (en) * | 1998-03-31 | 1999-05-25 | American Technology, Inc. | Ultrasonic tube welding and cutting apparatus and method |
DE10101236A1 (de) * | 2001-01-12 | 2002-07-25 | Schunk Ultraschalltechnik Gmbh | Verfahren und Vorrichtung zum Verbinden von Leitern |
US6574944B2 (en) * | 2001-06-19 | 2003-06-10 | Mars Incorporated | Method and system for ultrasonic sealing of food product packaging |
JP4013691B2 (ja) * | 2002-07-31 | 2007-11-28 | 住友電装株式会社 | フレキシブルフラットケーブルの接続方法および超音波溶接機 |
JP2006093636A (ja) * | 2004-08-27 | 2006-04-06 | Fujitsu Ltd | 半導体チップの接合方法および接合装置 |
-
2007
- 2007-06-29 JP JP2007172530A patent/JP4374040B2/ja not_active Expired - Fee Related
-
2008
- 2008-06-27 US US12/163,158 patent/US20090001135A1/en not_active Abandoned
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Publication number | Publication date |
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JP2009010294A (ja) | 2009-01-15 |
US20090001135A1 (en) | 2009-01-01 |
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