JP4369216B2 - マルチチップパッケージおよびマルチチップパッケージの製造方法 - Google Patents
マルチチップパッケージおよびマルチチップパッケージの製造方法 Download PDFInfo
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- JP4369216B2 JP4369216B2 JP2003413767A JP2003413767A JP4369216B2 JP 4369216 B2 JP4369216 B2 JP 4369216B2 JP 2003413767 A JP2003413767 A JP 2003413767A JP 2003413767 A JP2003413767 A JP 2003413767A JP 4369216 B2 JP4369216 B2 JP 4369216B2
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- Prior art keywords
- lead frame
- chip
- frame pad
- pad
- bonding
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- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/85909—Post-treatment of the connector or wire bonding area
- H01L2224/8592—Applying permanent coating, e.g. protective coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/07802—Adhesive characteristics other than chemical not being an ohmic electrical conductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Description
11、13 半導体チップ
12、14 ボンディングパッド
21 リードフレームパッド
22 中央開口部
23 内部リード
25 外部リード
27 タイバー
31 接着手段
33 接着剤
41、43 ボンディングワイヤー
51 パッケージ本体
Claims (11)
- 上面、下面及び中央開口部を有するリードフレームパッドと、前記リードフレームパッドの周辺に配列された内部リードと、外部リードとを有するリードフレームと、
第1活性面に配列された複数の第1ボンディングパッドを有する第1チップと、
前記第1活性面の一部と前記リードフレームパッドの下面の一部との間に配列され、前記第1チップと前記リードフレームパッドとを貼付ける第1接着部材と、
前記リードフレームパッドの中央開口部を通って前記複数の第1ボンディングパッドと前記内部リードとの間を電気的に接続する複数の第1ボンディングワイヤーと、
第2活性面及び該第2活性面の反対面である裏面を有し、前記第2活性面上に複数の第2ボンディングパッドが形成されている第2チップと、
前記裏面の一部と前記リードフレームパッドの上面の一部との間に配列され、前記第2チップを前記リードフレームパッドに貼付ける第2接着部材と、
前記複数の第2ボンディングパッドと前記内部リードとの間を電気的に接続する複数の第2ボンディングワイヤーと、
前記第1、第2チップ、複数の第1、第2ボンディングワイヤー、内部リードを封止するパッケージ本体と、
前記パッケージ本体から延び、前記内部リードを外部と電気的に接続する外部リードと、
を備えることを特徴とするマルチチップパッケージ。 - 前記第2接着部材は、前記第1活性面、前記リードフレームパッド、前記第2チップの裏面及び外周により定義された容積を充填することを特徴とする請求項1に記載のマルチチップパッケージ。
- 前記第2接着部材は、接着テープ部材及び硬化した液状接着剤の両方を含むことを特徴とする請求項2に記載のマルチチップパッケージ。
- 前記複数の第1ボンディングパッドは、前記リードフレームパッドの中央開口部に配列されていることを特徴とする請求項1に記載のマルチチップパッケージ。
- 前記複数の第1ボンディングパッドは、第1、第2平行列対を形成するように配列され、
前記第1平行列対は、前記第1活性面の長辺方向の中心軸線に対称的に配列され、前記第2平行列対は、前記第1活性面の対向する短辺方向の縁部に配列されることを特徴とする請求項4に記載のマルチチップパッケージ。 - 前記第1平行列対は、前記第2平行列対と垂直であることを特徴とする請求項5に記載のマルチチップパッケージ。
- 前記複数の第1ボンディングパッドは、前記リードフレームパッドの中央開口部に配列される第1群と、
前記リードフレームパッドの外周の外側に配列される第2群と、
を含むことを特徴とする請求項1に記載のマルチチップパッケージ。 - 前記第2接着部材は、硬化した液状接着成分から形成されることを特徴とする請求項1に記載のマルチチップパッケージ。
- 前記液状接着成分は、非導電性エポキシ樹脂であることを特徴とする請求項8に記載のマルチチップパッケージ。
- 前記第1チップは、前記リードフレームパッドの外周から延びることを特徴とする請求項1に記載のマルチチップパッケージ。
- 上面、下面及び中央開口部を有するリードフレームパッドと、前記リードフレームパッドの周りに配列され、対応する外部リードと電気的に接続される内部リードと、前記外部リードとを有するリードフレームを形成する段階と、
第1活性面に配列された複数の第1ボンディングパッドを有する第1チップを、前記第1活性面の一部と前記リードフレームパッドの下面の一部との間に配列される第1接着部材を用いて、前記リードフレームパッドの下面に貼付ける段階と、
前記複数の第1ボンディングパッドと前記内部リードとの間に、前記リードフレームパッドの中央開口部を通る複数の第1ボンディングワイヤーを形成する段階と、
第2活性面及び該第2活性面の反対面である裏面を有し、前記第2活性面上に複数の第2ボンディングパッドが形成されている第2チップを、前記裏面の一部と前記リードフレームパッドの上面の一部との間に配列される第2接着部材を用いて、前記リードフレームパッドの上面に貼付ける段階と、
前記複数の第2ボンディングパッドと前記内部リードとの間に複数の第2ボンディングワイヤーを形成する段階と、
前記第1、第2チップ、複数の第1、第2ボンディングワイヤー、内部リードを封止するパッケージ本体を形成する段階と、
所定の形状に前記外部リードを形成する段階と、
を備えることを特徴とするマルチチップパッケージの製造方法。
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