JP4364001B2 - 搬送ロボット - Google Patents

搬送ロボット Download PDF

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Publication number
JP4364001B2
JP4364001B2 JP2004030906A JP2004030906A JP4364001B2 JP 4364001 B2 JP4364001 B2 JP 4364001B2 JP 2004030906 A JP2004030906 A JP 2004030906A JP 2004030906 A JP2004030906 A JP 2004030906A JP 4364001 B2 JP4364001 B2 JP 4364001B2
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JP
Japan
Prior art keywords
hand
workpiece
transfer robot
base
linear movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004030906A
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English (en)
Japanese (ja)
Other versions
JP2005223204A5 (enExample
JP2005223204A (ja
Inventor
弘敬 小川
剛之 松崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Priority to JP2004030906A priority Critical patent/JP4364001B2/ja
Publication of JP2005223204A publication Critical patent/JP2005223204A/ja
Publication of JP2005223204A5 publication Critical patent/JP2005223204A5/ja
Application granted granted Critical
Publication of JP4364001B2 publication Critical patent/JP4364001B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2004030906A 2004-02-06 2004-02-06 搬送ロボット Expired - Fee Related JP4364001B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004030906A JP4364001B2 (ja) 2004-02-06 2004-02-06 搬送ロボット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004030906A JP4364001B2 (ja) 2004-02-06 2004-02-06 搬送ロボット

Publications (3)

Publication Number Publication Date
JP2005223204A JP2005223204A (ja) 2005-08-18
JP2005223204A5 JP2005223204A5 (enExample) 2007-03-01
JP4364001B2 true JP4364001B2 (ja) 2009-11-11

Family

ID=34998582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004030906A Expired - Fee Related JP4364001B2 (ja) 2004-02-06 2004-02-06 搬送ロボット

Country Status (1)

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JP (1) JP4364001B2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9142442B2 (en) 2012-10-11 2015-09-22 Tes Co., Ltd. Apparatus for transferring substrates
KR101837647B1 (ko) * 2016-01-29 2018-03-13 (주)씨엔원 로드락 챔버용 기판 이송장치

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5059573B2 (ja) * 2007-12-06 2012-10-24 東京エレクトロン株式会社 基板保持具、基板搬送装置および基板処理システム
KR101338858B1 (ko) 2011-01-31 2013-12-16 주식회사 나온테크 개별적으로 구동되는 핸드를 갖는 기판 이송 장치 및 그 제어 방법
JP5727823B2 (ja) * 2011-03-15 2015-06-03 株式会社アルバック 回転駆動装置
TWI725115B (zh) * 2016-01-29 2021-04-21 日商達誼恆股份有限公司 基板移載用機器手

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9142442B2 (en) 2012-10-11 2015-09-22 Tes Co., Ltd. Apparatus for transferring substrates
US9209064B2 (en) 2012-10-11 2015-12-08 Tes Co., Ltd. Apparatus for transferring substrates
US9209063B2 (en) 2012-10-11 2015-12-08 Tes Co., Ltd. Apparatus for transferring substrates
KR101837647B1 (ko) * 2016-01-29 2018-03-13 (주)씨엔원 로드락 챔버용 기판 이송장치

Also Published As

Publication number Publication date
JP2005223204A (ja) 2005-08-18

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