JP4356078B2 - 保護膜 - Google Patents

保護膜 Download PDF

Info

Publication number
JP4356078B2
JP4356078B2 JP2006275698A JP2006275698A JP4356078B2 JP 4356078 B2 JP4356078 B2 JP 4356078B2 JP 2006275698 A JP2006275698 A JP 2006275698A JP 2006275698 A JP2006275698 A JP 2006275698A JP 4356078 B2 JP4356078 B2 JP 4356078B2
Authority
JP
Japan
Prior art keywords
film
protective film
segment
producing
film according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006275698A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007083726A5 (enrdf_load_stackoverflow
JP2007083726A (ja
Inventor
尚登 大竹
佑一 青木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP2006275698A priority Critical patent/JP4356078B2/ja
Publication of JP2007083726A publication Critical patent/JP2007083726A/ja
Publication of JP2007083726A5 publication Critical patent/JP2007083726A5/ja
Application granted granted Critical
Publication of JP4356078B2 publication Critical patent/JP4356078B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Lubricants (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
JP2006275698A 2006-10-06 2006-10-06 保護膜 Expired - Fee Related JP4356078B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006275698A JP4356078B2 (ja) 2006-10-06 2006-10-06 保護膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006275698A JP4356078B2 (ja) 2006-10-06 2006-10-06 保護膜

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2001342308A Division JP4117388B2 (ja) 2001-11-07 2001-11-07 保護膜

Publications (3)

Publication Number Publication Date
JP2007083726A JP2007083726A (ja) 2007-04-05
JP2007083726A5 JP2007083726A5 (enrdf_load_stackoverflow) 2009-04-16
JP4356078B2 true JP4356078B2 (ja) 2009-11-04

Family

ID=37971186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006275698A Expired - Fee Related JP4356078B2 (ja) 2006-10-06 2006-10-06 保護膜

Country Status (1)

Country Link
JP (1) JP4356078B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8481464B2 (en) 2007-10-19 2013-07-09 Imott Corporation Spacer member reducing fretting wear and fastened structures using spacer member
JP5247323B2 (ja) * 2008-09-16 2013-07-24 株式会社豊田自動織機 液中プラズマ成膜方法、その方法により成膜される被覆膜および液中プラズマ成膜装置
JP6063376B2 (ja) * 2011-02-28 2017-01-18 本田技研工業株式会社 摺動部材
JP7589081B2 (ja) 2021-03-18 2024-11-25 キオクシア株式会社 成膜装置、成膜方法、及び半導体装置の製造方法

Also Published As

Publication number Publication date
JP2007083726A (ja) 2007-04-05

Similar Documents

Publication Publication Date Title
US9976209B2 (en) Sliding member and method for manufacturing the same
JP4117388B2 (ja) 保護膜
JP2007070667A (ja) ダイヤモンドライクカーボン硬質多層膜成形体およびその製造方法
CN102634753B (zh) 硬质涂层及其制备方法
JP2009167512A (ja) 摺動部品用ダイヤモンドライクカーボン皮膜およびその製造方法
JP5102516B2 (ja) 成形金型
WO2004076710A1 (ja) 非晶質炭素膜、その製造方法および非晶質炭素膜被覆部材
JP4356078B2 (ja) 保護膜
WO2007095120A2 (en) Multi-layer coating for razor blades
KR101779844B1 (ko) Dlc 코팅된 부품 및 dlc 코팅을 도포하는 방법
IN2012DN00310A (enrdf_load_stackoverflow)
JP5286626B2 (ja) 表面被覆切削工具およびその製造方法
WO2016111288A1 (ja) ダイヤモンドライクカーボン層積層体およびその製造方法
JP5226826B2 (ja) ダイヤモンドライクカーボン硬質多層膜成形体の製造方法
JP2009062206A (ja) 水素化アモルファスカーボン膜
JP5295102B2 (ja) 導電性保護膜及びその製造方法
JP2011068941A (ja) 硬質膜の成膜方法および硬質膜
JP2011133018A (ja) ピストンリング
JP2000087218A (ja) 高密着性炭素皮膜形成材及びその製法
KR100947331B1 (ko) 사용 수명이 향상된 보강층을 갖는 렌즈 금형 코어의 박막구조물 및 이의 형성 방법
JPH04341582A (ja) 剥離性の良いカーボン硬質膜
JP2005171329A (ja) 保護膜、保護膜の製造方法、および磁気記録媒体
JP4848546B2 (ja) 硬質皮膜被覆部材およびその製造方法
JP2007031797A (ja) ダイヤモンドライクカーボン皮膜被覆部材およびその製造方法
JP2019002033A (ja) ダイヤモンド状炭素膜構造体およびその製造方法

Legal Events

Date Code Title Description
A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20071023

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20071114

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20071023

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090227

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20090227

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20090323

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090331

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090529

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20090623

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20090709

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20090723

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20090709

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120814

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4356078

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120814

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120814

Year of fee payment: 3

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120814

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130814

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees