JP2007083726A5 - - Google Patents
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- Publication number
- JP2007083726A5 JP2007083726A5 JP2006275698A JP2006275698A JP2007083726A5 JP 2007083726 A5 JP2007083726 A5 JP 2007083726A5 JP 2006275698 A JP2006275698 A JP 2006275698A JP 2006275698 A JP2006275698 A JP 2006275698A JP 2007083726 A5 JP2007083726 A5 JP 2007083726A5
- Authority
- JP
- Japan
- Prior art keywords
- protective film
- film according
- segments
- segment
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001681 protective effect Effects 0.000 claims description 13
- 238000000151 deposition Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 230000000873 masking effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 2
- 238000007740 vapor deposition Methods 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 229910003460 diamond Inorganic materials 0.000 claims 1
- 239000010432 diamond Substances 0.000 claims 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 1
- 238000002294 plasma sputter deposition Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 230000008021 deposition Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006275698A JP4356078B2 (ja) | 2006-10-06 | 2006-10-06 | 保護膜 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006275698A JP4356078B2 (ja) | 2006-10-06 | 2006-10-06 | 保護膜 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001342308A Division JP4117388B2 (ja) | 2001-11-07 | 2001-11-07 | 保護膜 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007083726A JP2007083726A (ja) | 2007-04-05 |
| JP2007083726A5 true JP2007083726A5 (enrdf_load_stackoverflow) | 2009-04-16 |
| JP4356078B2 JP4356078B2 (ja) | 2009-11-04 |
Family
ID=37971186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006275698A Expired - Fee Related JP4356078B2 (ja) | 2006-10-06 | 2006-10-06 | 保護膜 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4356078B2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| MX2010004093A (es) | 2007-10-19 | 2010-04-30 | Imott Corp | Material de base de vacio para reducir desgaste por friccion y estructura de sujecion usando material de base de vacio. |
| JP5247323B2 (ja) * | 2008-09-16 | 2013-07-24 | 株式会社豊田自動織機 | 液中プラズマ成膜方法、その方法により成膜される被覆膜および液中プラズマ成膜装置 |
| WO2012117854A1 (ja) * | 2011-02-28 | 2012-09-07 | 本田技研工業株式会社 | 摺動部材 |
| JP7589081B2 (ja) | 2021-03-18 | 2024-11-25 | キオクシア株式会社 | 成膜装置、成膜方法、及び半導体装置の製造方法 |
-
2006
- 2006-10-06 JP JP2006275698A patent/JP4356078B2/ja not_active Expired - Fee Related
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