JP4354002B2 - 試料作製装置及び集束イオンビーム装置 - Google Patents

試料作製装置及び集束イオンビーム装置 Download PDF

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Publication number
JP4354002B2
JP4354002B2 JP2008208441A JP2008208441A JP4354002B2 JP 4354002 B2 JP4354002 B2 JP 4354002B2 JP 2008208441 A JP2008208441 A JP 2008208441A JP 2008208441 A JP2008208441 A JP 2008208441A JP 4354002 B2 JP4354002 B2 JP 4354002B2
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sample
ion beam
wafer
focused ion
piece
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Japanese (ja)
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JP2009014734A (ja
JP2009014734A5 (enrdf_load_stackoverflow
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馨 梅村
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Hitachi Ltd
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Hitachi Ltd
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JP2008208441A 2008-08-13 2008-08-13 試料作製装置及び集束イオンビーム装置 Expired - Lifetime JP4354002B2 (ja)

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JP2008208441A JP4354002B2 (ja) 2008-08-13 2008-08-13 試料作製装置及び集束イオンビーム装置

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JP2008208441A JP4354002B2 (ja) 2008-08-13 2008-08-13 試料作製装置及び集束イオンビーム装置

Related Parent Applications (1)

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JP2006159234A Division JP4353962B2 (ja) 2006-06-08 2006-06-08 試料解析方法及び試料作製方法

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JP2009014734A JP2009014734A (ja) 2009-01-22
JP2009014734A5 JP2009014734A5 (enrdf_load_stackoverflow) 2009-03-05
JP4354002B2 true JP4354002B2 (ja) 2009-10-28

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JP2008208441A Expired - Lifetime JP4354002B2 (ja) 2008-08-13 2008-08-13 試料作製装置及び集束イオンビーム装置

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JP (1) JP4354002B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100989879B1 (ko) 2008-11-21 2010-10-26 동국대학교 산학협력단 단면결합소자의 제조방법 및 이를 이용한 단면결합소자의 제조장치

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7425231B2 (ja) * 2021-01-29 2024-01-30 株式会社日立ハイテクサイエンス 試料片移設装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100989879B1 (ko) 2008-11-21 2010-10-26 동국대학교 산학협력단 단면결합소자의 제조방법 및 이를 이용한 단면결합소자의 제조장치

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JP2009014734A (ja) 2009-01-22

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