JP2009014734A5 - - Google Patents
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- Publication number
- JP2009014734A5 JP2009014734A5 JP2008208441A JP2008208441A JP2009014734A5 JP 2009014734 A5 JP2009014734 A5 JP 2009014734A5 JP 2008208441 A JP2008208441 A JP 2008208441A JP 2008208441 A JP2008208441 A JP 2008208441A JP 2009014734 A5 JP2009014734 A5 JP 2009014734A5
- Authority
- JP
- Japan
- Prior art keywords
- sample
- substrate
- ion beam
- piece
- focused ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000000523 sample Substances 0.000 claims description 575
- 238000002360 preparation method Methods 0.000 claims description 89
- 239000000758 substrate Substances 0.000 claims description 87
- 238000007689 inspection Methods 0.000 claims description 83
- 238000010884 ion-beam technique Methods 0.000 claims description 58
- 238000012545 processing Methods 0.000 claims description 45
- 238000000151 deposition Methods 0.000 claims description 44
- 230000008021 deposition Effects 0.000 claims description 44
- 238000012546 transfer Methods 0.000 claims description 37
- 230000002950 deficient Effects 0.000 claims description 32
- 230000003287 optical effect Effects 0.000 claims description 29
- 230000005540 biological transmission Effects 0.000 claims description 24
- 238000004364 calculation method Methods 0.000 claims description 22
- 230000001678 irradiating effect Effects 0.000 claims description 21
- 239000004065 semiconductor Substances 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 238000010894 electron beam technology Methods 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 99
- 238000004458 analytical method Methods 0.000 description 42
- 238000000034 method Methods 0.000 description 40
- 238000005259 measurement Methods 0.000 description 12
- 230000007547 defect Effects 0.000 description 11
- 238000007796 conventional method Methods 0.000 description 9
- 238000012284 sample analysis method Methods 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 238000005520 cutting process Methods 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 7
- 238000000926 separation method Methods 0.000 description 6
- 230000005856 abnormality Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000000605 extraction Methods 0.000 description 5
- 239000008188 pellet Substances 0.000 description 5
- 239000000047 product Substances 0.000 description 5
- 238000005464 sample preparation method Methods 0.000 description 5
- 239000011163 secondary particle Substances 0.000 description 5
- 238000003754 machining Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 238000003776 cleavage reaction Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000000386 microscopy Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 230000007017 scission Effects 0.000 description 2
- UOACKFBJUYNSLK-XRKIENNPSA-N Estradiol Cypionate Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H](C4=CC=C(O)C=C4CC3)CC[C@@]21C)C(=O)CCC1CCCC1 UOACKFBJUYNSLK-XRKIENNPSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000538 analytical sample Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000001198 high resolution scanning electron microscopy Methods 0.000 description 1
- 238000007735 ion beam assisted deposition Methods 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008208441A JP4354002B2 (ja) | 2008-08-13 | 2008-08-13 | 試料作製装置及び集束イオンビーム装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008208441A JP4354002B2 (ja) | 2008-08-13 | 2008-08-13 | 試料作製装置及び集束イオンビーム装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006159234A Division JP4353962B2 (ja) | 2006-06-08 | 2006-06-08 | 試料解析方法及び試料作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009014734A JP2009014734A (ja) | 2009-01-22 |
| JP2009014734A5 true JP2009014734A5 (enrdf_load_stackoverflow) | 2009-03-05 |
| JP4354002B2 JP4354002B2 (ja) | 2009-10-28 |
Family
ID=40355764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008208441A Expired - Lifetime JP4354002B2 (ja) | 2008-08-13 | 2008-08-13 | 試料作製装置及び集束イオンビーム装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4354002B2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100989879B1 (ko) | 2008-11-21 | 2010-10-26 | 동국대학교 산학협력단 | 단면결합소자의 제조방법 및 이를 이용한 단면결합소자의 제조장치 |
| JP7425231B2 (ja) * | 2021-01-29 | 2024-01-30 | 株式会社日立ハイテクサイエンス | 試料片移設装置 |
-
2008
- 2008-08-13 JP JP2008208441A patent/JP4354002B2/ja not_active Expired - Lifetime
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