JP4351956B2 - ワイヤボンディング装置 - Google Patents
ワイヤボンディング装置 Download PDFInfo
- Publication number
- JP4351956B2 JP4351956B2 JP2004174209A JP2004174209A JP4351956B2 JP 4351956 B2 JP4351956 B2 JP 4351956B2 JP 2004174209 A JP2004174209 A JP 2004174209A JP 2004174209 A JP2004174209 A JP 2004174209A JP 4351956 B2 JP4351956 B2 JP 4351956B2
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- JP
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- Prior art keywords
- wire
- image
- bonding
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- target
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54426—Marks applied to semiconductor devices or parts for alignment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78301—Capillary
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78313—Wedge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/8512—Aligning
- H01L2224/85121—Active alignment, i.e. by apparatus steering, e.g. optical alignment using marks or sensors
- H01L2224/8513—Active alignment, i.e. by apparatus steering, e.g. optical alignment using marks or sensors using marks formed on the semiconductor or solid-state body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/852—Applying energy for connecting
- H01L2224/85201—Compression bonding
- H01L2224/85205—Ultrasonic bonding
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Description
2 XYZマニュプレータ
3 コンピュータシステム
4 撮影部
5 モニタ
6 操作部
11 ボンディングツール
13 ワイヤガイド
14 ワイヤカッタ
34 ミラー
41 リアルタイム画像表示枠
42 登録画像表示枠
44〜46・51〜53 クロスマーク
47〜49・54〜56 基準点
A ボンディングワイヤ
B ループ
Claims (3)
- 相対的な位置合わせが必要な複数の対象部品を撮影する撮影手段と、
この撮影手段による対象部品の映像を画面表示させる表示手段と、
複数の対象部品が正しく位置合わせされた状態における複数の対象部品にそれぞれ対応する複数のマーク像の描画位置に関する調整基準情報を記憶する記憶手段と、
前記撮影手段による複数の対象部品が一緒に映し出された映像を前記表示手段に表示させた画面において、その対象部品の映像に、前記記憶手段の調整基準情報に基づいて複数の前記マーク像を重ねて表示させる制御手段とを有し、
作業者が前記表示手段に画面表示された対象部品の映像と前記マーク像とを比較しながら対象部品の位置合わせを行うようにしたことを特徴とするワイヤボンディング装置。 - 作業者の操作によりマーク像の描画位置を指定する入力手段をさらに有し、
前記制御手段が、正しく位置合わせされた対象部品の映像を前記表示手段に表示させた画面において、その対象部品の映像に、前記入力手段により指定された位置にマーク像を重ねて表示させ、これにより前記調整基準情報を取得して前記記憶手段に記憶させることを特徴とする請求項1に記載のワイヤボンディング装置。 - 前記撮影手段が、対象部品の側面及び底面のいずれか一方を撮影可能に配置され、
対象部品の側面及び底面のいずれか他方を前記撮影手段で撮影可能な使用位置と待避位置との間を進退可能に設けられたミラーをさらに有することを特徴とする請求項1若しくは請求項2に記載のワイヤボンディング装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004174209A JP4351956B2 (ja) | 2004-06-11 | 2004-06-11 | ワイヤボンディング装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004174209A JP4351956B2 (ja) | 2004-06-11 | 2004-06-11 | ワイヤボンディング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005353901A JP2005353901A (ja) | 2005-12-22 |
JP4351956B2 true JP4351956B2 (ja) | 2009-10-28 |
Family
ID=35588097
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004174209A Expired - Fee Related JP4351956B2 (ja) | 2004-06-11 | 2004-06-11 | ワイヤボンディング装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4351956B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011046557A1 (en) * | 2009-10-15 | 2011-04-21 | Kulicke And Soffa Industries, Inc. | Wire bonding machine, and method of calibrating a crosshair offset for a wire bonding operation |
JP6648132B2 (ja) * | 2015-06-12 | 2020-02-14 | 株式会社Fuji | 対基板作業機、および認識方法 |
-
2004
- 2004-06-11 JP JP2004174209A patent/JP4351956B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2005353901A (ja) | 2005-12-22 |
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