JP4346899B2 - 静電チャックの製造方法 - Google Patents
静電チャックの製造方法 Download PDFInfo
- Publication number
- JP4346899B2 JP4346899B2 JP2002372875A JP2002372875A JP4346899B2 JP 4346899 B2 JP4346899 B2 JP 4346899B2 JP 2002372875 A JP2002372875 A JP 2002372875A JP 2002372875 A JP2002372875 A JP 2002372875A JP 4346899 B2 JP4346899 B2 JP 4346899B2
- Authority
- JP
- Japan
- Prior art keywords
- aluminum nitride
- calcium content
- ppm
- volume resistivity
- electrostatic chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 92
- 229910052791 calcium Inorganic materials 0.000 claims description 85
- 239000011575 calcium Substances 0.000 claims description 85
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 84
- 239000000843 powder Substances 0.000 claims description 70
- 238000010304 firing Methods 0.000 claims description 46
- 238000000034 method Methods 0.000 claims description 35
- 238000005245 sintering Methods 0.000 claims description 21
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 claims description 9
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 claims description 9
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 claims description 9
- 239000002994 raw material Substances 0.000 description 18
- 239000000654 additive Substances 0.000 description 15
- 230000000996 additive effect Effects 0.000 description 15
- 238000005259 measurement Methods 0.000 description 15
- 230000000052 comparative effect Effects 0.000 description 14
- 239000000463 material Substances 0.000 description 12
- 238000002156 mixing Methods 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 11
- 238000009694 cold isostatic pressing Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 5
- 238000000465 moulding Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000009434 installation Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000001354 calcination Methods 0.000 description 3
- 208000037584 hereditary sensory and autonomic neuropathy Diseases 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000010298 pulverizing process Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 150000001669 calcium Chemical class 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 229940043430 calcium compound Drugs 0.000 description 1
- 150000001674 calcium compounds Chemical class 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000004814 ceramic processing Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000005469 granulation Methods 0.000 description 1
- 230000003179 granulation Effects 0.000 description 1
- 238000001513 hot isostatic pressing Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
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- Ceramic Products (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002372875A JP4346899B2 (ja) | 2002-12-24 | 2002-12-24 | 静電チャックの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002372875A JP4346899B2 (ja) | 2002-12-24 | 2002-12-24 | 静電チャックの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004203647A JP2004203647A (ja) | 2004-07-22 |
| JP2004203647A5 JP2004203647A5 (enrdf_load_stackoverflow) | 2007-01-11 |
| JP4346899B2 true JP4346899B2 (ja) | 2009-10-21 |
Family
ID=32811355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002372875A Expired - Lifetime JP4346899B2 (ja) | 2002-12-24 | 2002-12-24 | 静電チャックの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4346899B2 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110352182A (zh) * | 2018-02-08 | 2019-10-18 | 日本碍子株式会社 | 半导体制造装置用加热器 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4773744B2 (ja) * | 2005-03-30 | 2011-09-14 | 株式会社トクヤマ | 窒化アルミニウム焼結体の製造方法 |
| KR20140017515A (ko) * | 2010-12-14 | 2014-02-11 | 헥사테크, 인크. | 다결정 알루미늄 질화물 소결체들을 위한 열팽창 엔지니어링 및 반도체들의 제조에의 응용 |
| US10566228B2 (en) | 2018-02-08 | 2020-02-18 | Ngk Insulators, Ltd. | Heater for semiconductor manufacturing apparatus |
-
2002
- 2002-12-24 JP JP2002372875A patent/JP4346899B2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110352182A (zh) * | 2018-02-08 | 2019-10-18 | 日本碍子株式会社 | 半导体制造装置用加热器 |
| CN110352182B (zh) * | 2018-02-08 | 2022-02-08 | 日本碍子株式会社 | 半导体制造装置用加热器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004203647A (ja) | 2004-07-22 |
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