JP4339541B2 - 光学検査システム - Google Patents
光学検査システム Download PDFInfo
- Publication number
- JP4339541B2 JP4339541B2 JP2001512273A JP2001512273A JP4339541B2 JP 4339541 B2 JP4339541 B2 JP 4339541B2 JP 2001512273 A JP2001512273 A JP 2001512273A JP 2001512273 A JP2001512273 A JP 2001512273A JP 4339541 B2 JP4339541 B2 JP 4339541B2
- Authority
- JP
- Japan
- Prior art keywords
- color
- image
- preferred
- boundary
- optical inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/10—Segmentation; Edge detection
- G06T7/12—Edge-based segmentation
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/10—Segmentation; Edge detection
- G06T7/155—Segmentation; Edge detection involving morphological operators
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V20/00—Scenes; Scene-specific elements
- G06V20/60—Type of objects
- G06V20/69—Microscopic objects, e.g. biological cells or cellular parts
- G06V20/695—Preprocessing, e.g. image segmentation
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/10—Image acquisition modality
- G06T2207/10016—Video; Image sequence
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30141—Printed circuit board [PCB]
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Biomedical Technology (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Quality & Reliability (AREA)
- General Health & Medical Sciences (AREA)
- Molecular Biology (AREA)
- Multimedia (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Analysis (AREA)
- Image Processing (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IL131092 | 1999-07-25 | ||
| IL131092A IL131092A (en) | 1999-07-25 | 1999-07-25 | Optical inspection system |
| PCT/IL2000/000434 WO2001007893A2 (en) | 1999-07-25 | 2000-07-23 | Optical inspection system |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007320158A Division JP5086789B2 (ja) | 1999-07-25 | 2007-12-11 | 光学検査システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003511651A JP2003511651A (ja) | 2003-03-25 |
| JP2003511651A5 JP2003511651A5 (enExample) | 2009-05-07 |
| JP4339541B2 true JP4339541B2 (ja) | 2009-10-07 |
Family
ID=11073060
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001512273A Expired - Fee Related JP4339541B2 (ja) | 1999-07-25 | 2000-07-23 | 光学検査システム |
| JP2007320158A Expired - Fee Related JP5086789B2 (ja) | 1999-07-25 | 2007-12-11 | 光学検査システム |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007320158A Expired - Fee Related JP5086789B2 (ja) | 1999-07-25 | 2007-12-11 | 光学検査システム |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US7200259B1 (enExample) |
| JP (2) | JP4339541B2 (enExample) |
| AU (1) | AU6012800A (enExample) |
| GB (1) | GB2368120A (enExample) |
| IL (1) | IL131092A (enExample) |
| TW (2) | TW536919B (enExample) |
| WO (1) | WO2001007893A2 (enExample) |
Families Citing this family (120)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IL131092A (en) * | 1999-07-25 | 2006-08-01 | Orbotech Ltd | Optical inspection system |
| IL133696A (en) | 1999-12-23 | 2006-04-10 | Orbotech Ltd | Cam reference inspection of multi-color and contour images |
| CN1289901C (zh) | 2000-09-10 | 2006-12-13 | 奥博泰克有限公司 | Pcb检测中错误报警的减少 |
| WO2003010525A1 (en) * | 2001-07-27 | 2003-02-06 | Nippon Sheet Glass Co., Ltd. | Method for evaluating contamination of object surface and imaging box used for this method |
| JP4839560B2 (ja) * | 2001-09-27 | 2011-12-21 | 日本電気株式会社 | Ic外観検査方法 |
| US7430303B2 (en) * | 2002-03-29 | 2008-09-30 | Lockheed Martin Corporation | Target detection method and system |
| US7460703B2 (en) | 2002-12-03 | 2008-12-02 | Og Technologies, Inc. | Apparatus and method for detecting surface defects on a workpiece such as a rolled/drawn metal bar |
| US7124394B1 (en) * | 2003-04-06 | 2006-10-17 | Luminescent Technologies, Inc. | Method for time-evolving rectilinear contours representing photo masks |
| US7698665B2 (en) * | 2003-04-06 | 2010-04-13 | Luminescent Technologies, Inc. | Systems, masks, and methods for manufacturable masks using a functional representation of polygon pattern |
| JP4238074B2 (ja) * | 2003-06-19 | 2009-03-11 | 新日本製鐵株式会社 | 表面疵検査方法 |
| US7778493B2 (en) * | 2003-10-09 | 2010-08-17 | The Henry M. Jackson Foundation For The Advancement Of Military Medicine Inc. | Pixelation reconstruction for image resolution and image data transmission |
| EP1685522A1 (en) * | 2003-11-12 | 2006-08-02 | Siemens Corporate Research, Inc. | A system and method for filtering and automatic detection of candidate anatomical structures in medical images |
| WO2006004202A1 (en) * | 2004-07-05 | 2006-01-12 | Matsushita Electric Industrial Co., Ltd. | Method of generating image of component |
| JP2006024116A (ja) * | 2004-07-09 | 2006-01-26 | Dainippon Screen Mfg Co Ltd | カラー画像の領域分割 |
| US9137417B2 (en) | 2005-03-24 | 2015-09-15 | Kofax, Inc. | Systems and methods for processing video data |
| US8885229B1 (en) | 2013-05-03 | 2014-11-11 | Kofax, Inc. | Systems and methods for detecting and classifying objects in video captured using mobile devices |
| US9769354B2 (en) | 2005-03-24 | 2017-09-19 | Kofax, Inc. | Systems and methods of processing scanned data |
| US20060227381A1 (en) * | 2005-04-06 | 2006-10-12 | Xerox Corporation | Edge detection for dispersed-dot binary halftone images |
| US8585764B2 (en) | 2005-07-06 | 2013-11-19 | Spontech Spine Intelligence Group Ag | Intervertebral disc prosthesis manufacturing method |
| CN102670334A (zh) | 2005-07-06 | 2012-09-19 | 弗朗茨·小科弗 | 椎间盘假体 |
| CN101297390B (zh) * | 2005-09-13 | 2011-04-20 | 朗明科技公司 | 用于光刻法的系统、掩模和方法 |
| US7921385B2 (en) * | 2005-10-03 | 2011-04-05 | Luminescent Technologies Inc. | Mask-pattern determination using topology types |
| US7788627B2 (en) * | 2005-10-03 | 2010-08-31 | Luminescent Technologies, Inc. | Lithography verification using guard bands |
| WO2007041701A2 (en) * | 2005-10-04 | 2007-04-12 | Luminescent Technologies, Inc. | Mask-patterns including intentional breaks |
| WO2007044557A2 (en) | 2005-10-06 | 2007-04-19 | Luminescent Technologies, Inc. | System, masks, and methods for photomasks optimized with approximate and accurate merit functions |
| JP4825021B2 (ja) * | 2006-02-28 | 2011-11-30 | 株式会社日立ハイテクノロジーズ | レポートフォーマット設定方法、レポートフォーマット設定装置、及び欠陥レビューシステム |
| TWI398157B (zh) * | 2006-08-11 | 2013-06-01 | Hon Hai Prec Ind Co Ltd | 影像邊界掃描系統及方法 |
| WO2008039674A2 (en) | 2006-09-20 | 2008-04-03 | Luminescent Technologies, Inc. | Photo-mask and wafer image reconstruction |
| US8331645B2 (en) * | 2006-09-20 | 2012-12-11 | Luminescent Technologies, Inc. | Photo-mask and wafer image reconstruction |
| US20090092338A1 (en) * | 2007-10-05 | 2009-04-09 | Jeffrey Matthew Achong | Method And Apparatus For Determining The Direction of Color Dependency Interpolating In Order To Generate Missing Colors In A Color Filter Array |
| TWI399704B (zh) * | 2007-12-31 | 2013-06-21 | Hon Hai Prec Ind Co Ltd | 影像雜質分析系統及方法 |
| US9177218B2 (en) * | 2008-09-08 | 2015-11-03 | Kofax, Inc. | System and method, and computer program product for detecting an edge in scan data |
| US8774516B2 (en) | 2009-02-10 | 2014-07-08 | Kofax, Inc. | Systems, methods and computer program products for determining document validity |
| US9767354B2 (en) | 2009-02-10 | 2017-09-19 | Kofax, Inc. | Global geographic information retrieval, validation, and normalization |
| US9349046B2 (en) | 2009-02-10 | 2016-05-24 | Kofax, Inc. | Smart optical input/output (I/O) extension for context-dependent workflows |
| US8958605B2 (en) | 2009-02-10 | 2015-02-17 | Kofax, Inc. | Systems, methods and computer program products for determining document validity |
| US9576272B2 (en) | 2009-02-10 | 2017-02-21 | Kofax, Inc. | Systems, methods and computer program products for determining document validity |
| US8189943B2 (en) * | 2009-03-17 | 2012-05-29 | Mitsubishi Electric Research Laboratories, Inc. | Method for up-sampling depth images |
| CN101620060B (zh) * | 2009-08-13 | 2010-12-29 | 上海交通大学 | 颗粒大小分布自动检测方法 |
| US8780134B2 (en) | 2009-09-30 | 2014-07-15 | Nokia Corporation | Access to control of multiple editing effects |
| US20110074804A1 (en) * | 2009-09-30 | 2011-03-31 | Nokia Corporation | Selection of a region |
| TWI408362B (zh) * | 2009-10-19 | 2013-09-11 | Innolux Corp | 陣列基板與液晶面板的自動檢測方法,製程機台及其陣列基板自動檢測裝置 |
| AU2009250986B2 (en) * | 2009-12-16 | 2013-05-02 | Canon Kabushiki Kaisha | Rendering piece-wise smooth image from colour values along paths |
| GB2477116B (en) * | 2010-01-22 | 2014-09-17 | Frederick Warwick Michael Stentiford | A method and apparatus of processing an image |
| US9035673B2 (en) * | 2010-01-25 | 2015-05-19 | Palo Alto Research Center Incorporated | Method of in-process intralayer yield detection, interlayer shunt detection and correction |
| US8797721B2 (en) | 2010-02-02 | 2014-08-05 | Apple Inc. | Portable electronic device housing with outer glass surfaces |
| US8463016B2 (en) * | 2010-02-05 | 2013-06-11 | Luminescent Technologies, Inc. | Extending the field of view of a mask-inspection image |
| JP2011216080A (ja) * | 2010-03-18 | 2011-10-27 | Canon Inc | 画像処理装置、画像処理方法、および記憶媒体 |
| US8612903B2 (en) | 2010-09-14 | 2013-12-17 | Luminescent Technologies, Inc. | Technique for repairing a reflective photo-mask |
| US8555214B2 (en) | 2010-09-14 | 2013-10-08 | Luminescent Technologies, Inc. | Technique for analyzing a reflective photo-mask |
| JP5574379B2 (ja) * | 2010-10-13 | 2014-08-20 | 富士機械製造株式会社 | 画像処理装置及び画像処理方法 |
| US8386968B2 (en) | 2010-11-29 | 2013-02-26 | Luminescent Technologies, Inc. | Virtual photo-mask critical-dimension measurement |
| US8458622B2 (en) | 2010-11-29 | 2013-06-04 | Luminescent Technologies, Inc. | Photo-mask acceptance technique |
| US9005852B2 (en) | 2012-09-10 | 2015-04-14 | Dino Technology Acquisition Llc | Technique for repairing a reflective photo-mask |
| US8653454B2 (en) | 2011-07-13 | 2014-02-18 | Luminescent Technologies, Inc. | Electron-beam image reconstruction |
| NL2009853A (en) | 2011-12-23 | 2013-06-26 | Asml Netherlands Bv | Methods and apparatus for measuring a property of a substrate. |
| US9058580B1 (en) | 2012-01-12 | 2015-06-16 | Kofax, Inc. | Systems and methods for identification document processing and business workflow integration |
| US9514357B2 (en) | 2012-01-12 | 2016-12-06 | Kofax, Inc. | Systems and methods for mobile image capture and processing |
| US9058515B1 (en) | 2012-01-12 | 2015-06-16 | Kofax, Inc. | Systems and methods for identification document processing and business workflow integration |
| US10146795B2 (en) | 2012-01-12 | 2018-12-04 | Kofax, Inc. | Systems and methods for mobile image capture and processing |
| US9483794B2 (en) | 2012-01-12 | 2016-11-01 | Kofax, Inc. | Systems and methods for identification document processing and business workflow integration |
| KR102056664B1 (ko) * | 2012-10-04 | 2019-12-17 | 한국전자통신연구원 | 센서를 이용한 작업 방법 및 이를 수행하는 작업 시스템 |
| US9091935B2 (en) | 2013-03-11 | 2015-07-28 | Kla-Tencor Corporation | Multistage extreme ultra-violet mask qualification |
| US9355312B2 (en) | 2013-03-13 | 2016-05-31 | Kofax, Inc. | Systems and methods for classifying objects in digital images captured using mobile devices |
| US9208536B2 (en) | 2013-09-27 | 2015-12-08 | Kofax, Inc. | Systems and methods for three dimensional geometric reconstruction of captured image data |
| WO2014160426A1 (en) | 2013-03-13 | 2014-10-02 | Kofax, Inc. | Classifying objects in digital images captured using mobile devices |
| US9494854B2 (en) | 2013-03-14 | 2016-11-15 | Kla-Tencor Corporation | Technique for repairing an EUV photo-mask |
| US20140316841A1 (en) | 2013-04-23 | 2014-10-23 | Kofax, Inc. | Location-based workflows and services |
| CN103308523B (zh) * | 2013-05-28 | 2015-04-15 | 清华大学 | 多尺度瓶口缺陷检测方法及装置 |
| WO2015073920A1 (en) | 2013-11-15 | 2015-05-21 | Kofax, Inc. | Systems and methods for generating composite images of long documents using mobile video data |
| PL3078004T3 (pl) * | 2013-12-02 | 2023-05-08 | Leonhard Kurz Stiftung & Co. Kg | Sposób uwierzytelniania elementu zabezpieczającego |
| GB2522663B (en) | 2014-01-31 | 2020-02-12 | Apical Ltd | A method of selecting a region of interest |
| US9760788B2 (en) | 2014-10-30 | 2017-09-12 | Kofax, Inc. | Mobile document detection and orientation based on reference object characteristics |
| JP2016090548A (ja) * | 2014-11-11 | 2016-05-23 | 株式会社東芝 | ひび割れ情報収集方法及びひび割れ情報収集プログラム |
| JP2016090547A (ja) * | 2014-11-11 | 2016-05-23 | 株式会社東芝 | ひび割れ情報収集装置及びひび割れ情報を収集するためのサーバ装置 |
| US9747520B2 (en) * | 2015-03-16 | 2017-08-29 | Kla-Tencor Corporation | Systems and methods for enhancing inspection sensitivity of an inspection tool |
| DE102015204800B3 (de) * | 2015-03-17 | 2016-12-01 | MTU Aero Engines AG | Verfahren und Vorrichtung zur Qualitätsbeurteilung eines mittels eines additiven Herstellungsverfahrens hergestellten Bauteils |
| US9909860B2 (en) | 2015-04-15 | 2018-03-06 | General Electric Company | Systems and methods for monitoring component deformation |
| US10697760B2 (en) | 2015-04-15 | 2020-06-30 | General Electric Company | Data acquisition devices, systems and method for analyzing strain sensors and monitoring component strain |
| US9557164B2 (en) * | 2015-04-15 | 2017-01-31 | General Electric Company | Data acquisition devices, systems and method for analyzing strain sensors and monitoring turbine component strain |
| US9932853B2 (en) | 2015-04-28 | 2018-04-03 | General Electric Company | Assemblies and methods for monitoring turbine component strain |
| JP6478840B2 (ja) * | 2015-07-01 | 2019-03-06 | キヤノン株式会社 | 画像処理装置および画像処理方法 |
| JP6512965B2 (ja) * | 2015-07-01 | 2019-05-15 | キヤノン株式会社 | 画像処理装置および画像処理方法 |
| JP6433384B2 (ja) * | 2015-07-01 | 2018-12-05 | キヤノン株式会社 | 画像処理装置および画像処理方法 |
| US10242285B2 (en) | 2015-07-20 | 2019-03-26 | Kofax, Inc. | Iterative recognition-guided thresholding and data extraction |
| US9953408B2 (en) | 2015-11-16 | 2018-04-24 | General Electric Company | Methods for monitoring components |
| US9846933B2 (en) | 2015-11-16 | 2017-12-19 | General Electric Company | Systems and methods for monitoring components |
| US9733062B2 (en) | 2015-11-20 | 2017-08-15 | General Electric Company | Systems and methods for monitoring component strain |
| US10012552B2 (en) | 2015-11-23 | 2018-07-03 | General Electric Company | Systems and methods for monitoring component strain |
| US9967523B2 (en) | 2015-12-16 | 2018-05-08 | General Electric Company | Locating systems and methods for components |
| CN105509643B (zh) * | 2016-01-04 | 2019-04-19 | 京东方科技集团股份有限公司 | 一种亚像素单元线宽的测量方法及装置 |
| US9779296B1 (en) | 2016-04-01 | 2017-10-03 | Kofax, Inc. | Content-based detection and three dimensional geometric reconstruction of objects in image and video data |
| US9879981B1 (en) | 2016-12-02 | 2018-01-30 | General Electric Company | Systems and methods for evaluating component strain |
| US10132615B2 (en) | 2016-12-20 | 2018-11-20 | General Electric Company | Data acquisition devices, systems and method for analyzing passive strain indicators and monitoring turbine component strain |
| US10126119B2 (en) | 2017-01-17 | 2018-11-13 | General Electric Company | Methods of forming a passive strain indicator on a preexisting component |
| US10872176B2 (en) | 2017-01-23 | 2020-12-22 | General Electric Company | Methods of making and monitoring a component with an integral strain indicator |
| US11313673B2 (en) | 2017-01-24 | 2022-04-26 | General Electric Company | Methods of making a component with an integral strain indicator |
| US10345179B2 (en) | 2017-02-14 | 2019-07-09 | General Electric Company | Passive strain indicator |
| US10502551B2 (en) | 2017-03-06 | 2019-12-10 | General Electric Company | Methods for monitoring components using micro and macro three-dimensional analysis |
| US10451499B2 (en) | 2017-04-06 | 2019-10-22 | General Electric Company | Methods for applying passive strain indicators to components |
| US11300521B2 (en) | 2017-06-14 | 2022-04-12 | Camtek Ltd. | Automatic defect classification |
| US11062176B2 (en) | 2017-11-30 | 2021-07-13 | Kofax, Inc. | Object detection and image cropping using a multi-detector approach |
| TWI721385B (zh) * | 2018-07-08 | 2021-03-11 | 香港商康代影像技術方案香港有限公司 | 產生印刷電路板合成彩色影像之技術 |
| US11010887B2 (en) | 2018-09-17 | 2021-05-18 | General Electric Company | Automated distress ranking system |
| CN111175302A (zh) * | 2018-11-13 | 2020-05-19 | 晶彩科技股份有限公司 | 复合检测条件的光学影像自动撷取方法 |
| US11423527B2 (en) | 2018-11-20 | 2022-08-23 | Bnsf Railway Company | System and method for minimizing lost vehicle axel motion and filtering erroneous electrical signals |
| US10984521B2 (en) | 2018-11-20 | 2021-04-20 | Bnsf Railway Company | Systems and methods for determining defects in physical objects |
| US12373930B2 (en) | 2018-11-20 | 2025-07-29 | Bnsf Railway Company | Computational heuristic encoder enhancement relay system |
| US11508055B2 (en) | 2018-11-20 | 2022-11-22 | Bnsf Railway Company | Systems and methods for calibrating image capturing modules |
| CN109886914B (zh) * | 2018-12-19 | 2020-01-17 | 浙江企银印务科技有限公司 | 基于局部亮度不变性先验的纸张缺陷检测方法 |
| DE102019116103B4 (de) * | 2019-06-13 | 2021-04-22 | Notion Systems GmbH | Verfahren zum Beschriften einer Leiterplatte durch Erzeugen von Schattierungen in einer funktionalen Lackschicht |
| CN110793454A (zh) * | 2019-11-04 | 2020-02-14 | 如冈自动化控制技术(上海)有限公司 | 一种激光检测塞子插孔深度的装置和方法 |
| IL295078B2 (en) | 2020-02-16 | 2025-10-01 | Orbotech Ltd | System and method for testing multiple characteristics of sample objects in the production of electrical circuits |
| CN114022403A (zh) * | 2020-07-16 | 2022-02-08 | 京东方科技集团股份有限公司 | 检测显示面板不良的方法及装置 |
| CN112017157B (zh) * | 2020-07-21 | 2023-04-11 | 中国科学院西安光学精密机械研究所 | 一种光学元件激光损伤阈值测试中损伤点识别方法 |
| CN113109368B (zh) * | 2021-03-12 | 2023-09-01 | 浙江华睿科技股份有限公司 | 玻璃裂纹检测方法、装置、设备及介质 |
| CN113516193B (zh) * | 2021-07-19 | 2024-03-01 | 中国农业大学 | 基于图像处理的红枣缺陷识别分类方法及装置 |
| CN116563288B (zh) * | 2023-07-11 | 2023-09-05 | 深圳市欣精艺科技有限公司 | 一种汽车发动机齿轮螺纹孔检测方法 |
| CN116645364B (zh) * | 2023-07-18 | 2023-10-27 | 金乡县金沪合金钢有限公司 | 一种基于图像数据的合金钢铸件气孔缺陷检测方法 |
| CN118329887B (zh) * | 2024-04-22 | 2025-05-02 | 深圳市航达高新材料有限公司 | 芯片封装件的检测方法、装置、设备及存储介质 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5774573A (en) | 1984-12-20 | 1998-06-30 | Orbotech Ltd. | Automatic visual inspection system |
| US5774572A (en) | 1984-12-20 | 1998-06-30 | Orbotech Ltd. | Automatic visual inspection system |
| JPS61229175A (ja) * | 1985-04-03 | 1986-10-13 | Nec Corp | パタ−ン情報処理方式 |
| US4928313A (en) * | 1985-10-25 | 1990-05-22 | Synthetic Vision Systems, Inc. | Method and system for automatically visually inspecting an article |
| IL81450A (en) | 1987-02-02 | 1994-10-07 | Orbotech Ltd | Lighting device for optical scanners |
| US4758888A (en) | 1987-02-17 | 1988-07-19 | Orbot Systems, Ltd. | Method of and means for inspecting workpieces traveling along a production line |
| US4923066A (en) * | 1987-10-08 | 1990-05-08 | Elor Optronics Ltd. | Small arms ammunition inspection system |
| US5058982A (en) | 1989-06-21 | 1991-10-22 | Orbot Systems Ltd. | Illumination system and inspection apparatus including same |
| US5586058A (en) | 1990-12-04 | 1996-12-17 | Orbot Instruments Ltd. | Apparatus and method for inspection of a patterned object by comparison thereof to a reference |
| US5544256A (en) * | 1993-10-22 | 1996-08-06 | International Business Machines Corporation | Automated defect classification system |
| JPH07183697A (ja) * | 1993-12-24 | 1995-07-21 | Matsushita Electric Ind Co Ltd | 電子部品実装装置 |
| US6005978A (en) * | 1996-02-07 | 1999-12-21 | Cognex Corporation | Robust search for image features across image sequences exhibiting non-uniform changes in brightness |
| US5917332A (en) * | 1996-05-09 | 1999-06-29 | Advanced Micro Devices, Inc. | Arrangement for improving defect scanner sensitivity and scanning defects on die of a semiconductor wafer |
| US5963662A (en) * | 1996-08-07 | 1999-10-05 | Georgia Tech Research Corporation | Inspection system and method for bond detection and validation of surface mount devices |
| JPH10149441A (ja) * | 1996-11-20 | 1998-06-02 | Casio Comput Co Ltd | 画像処理方法、及びその装置 |
| IL120071A (en) | 1997-01-24 | 2002-03-10 | Orbotech Ltd | Method and system for continuously processing workpieces along a production line |
| US6201892B1 (en) * | 1997-02-26 | 2001-03-13 | Acuity Imaging, Llc | System and method for arithmetic operations for electronic package inspection |
| US6895109B1 (en) * | 1997-09-04 | 2005-05-17 | Texas Instruments Incorporated | Apparatus and method for automatically detecting defects on silicon dies on silicon wafers |
| US6586829B1 (en) * | 1997-12-18 | 2003-07-01 | Si Diamond Technology, Inc. | Ball grid array package |
| AU8819998A (en) | 1998-08-18 | 2000-03-14 | Orbotech Ltd. | Inspection of printed circuit boards using color |
| WO2000019372A1 (en) | 1998-09-28 | 2000-04-06 | Orbotech Ltd. | Pixel coding and image processing method |
| US6385342B1 (en) * | 1998-11-13 | 2002-05-07 | Xerox Corporation | Blocking signature detection for identification of JPEG images |
| US6489586B1 (en) * | 1999-04-29 | 2002-12-03 | Cad-Tech, Inc. | Method and apparatus for verification of assembled printed circuit boards |
| US6603877B1 (en) * | 1999-06-01 | 2003-08-05 | Beltronics, Inc. | Method of and apparatus for optical imaging inspection of multi-material objects and the like |
| IL131092A (en) * | 1999-07-25 | 2006-08-01 | Orbotech Ltd | Optical inspection system |
| US6456899B1 (en) * | 1999-12-07 | 2002-09-24 | Ut-Battelle, Llc | Context-based automated defect classification system using multiple morphological masks |
| US6586839B2 (en) * | 2000-08-31 | 2003-07-01 | Texas Instruments Incorporated | Approach to structurally reinforcing the mechanical performance of silicon level interconnect layers |
-
1999
- 1999-07-25 IL IL131092A patent/IL131092A/en not_active IP Right Cessation
- 1999-08-03 TW TW090117726A patent/TW536919B/zh not_active IP Right Cessation
- 1999-08-03 TW TW088113346A patent/TW512636B/zh not_active IP Right Cessation
-
2000
- 2000-07-23 JP JP2001512273A patent/JP4339541B2/ja not_active Expired - Fee Related
- 2000-07-23 AU AU60128/00A patent/AU6012800A/en not_active Abandoned
- 2000-07-23 GB GB0201514A patent/GB2368120A/en not_active Withdrawn
- 2000-07-23 WO PCT/IL2000/000434 patent/WO2001007893A2/en not_active Ceased
- 2000-07-23 US US10/031,045 patent/US7200259B1/en not_active Expired - Fee Related
-
2007
- 2007-02-01 US US11/701,354 patent/US20070133862A1/en not_active Abandoned
- 2007-12-11 JP JP2007320158A patent/JP5086789B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US7200259B1 (en) | 2007-04-03 |
| TW536919B (en) | 2003-06-11 |
| AU6012800A (en) | 2001-02-13 |
| JP2003511651A (ja) | 2003-03-25 |
| TW512636B (en) | 2002-12-01 |
| US20070133862A1 (en) | 2007-06-14 |
| WO2001007893A2 (en) | 2001-02-01 |
| WO2001007893A3 (en) | 2002-06-27 |
| IL131092A0 (en) | 2001-01-28 |
| JP2008164597A (ja) | 2008-07-17 |
| IL131092A (en) | 2006-08-01 |
| GB0201514D0 (en) | 2002-03-13 |
| GB2368120A (en) | 2002-04-24 |
| JP5086789B2 (ja) | 2012-11-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4339541B2 (ja) | 光学検査システム | |
| CN115791822B (zh) | 晶圆表面缺陷的视觉检测算法及检测系统 | |
| US7925073B2 (en) | Multiple optical input inspection system | |
| Zhang et al. | Multi-scale blur estimation and edge type classification for scene analysis | |
| US20070165939A1 (en) | Reduction of false alarms in pcb inspection | |
| WO2018107939A1 (zh) | 一种基于边缘完备度的图像分割最优识别方法 | |
| US20060029257A1 (en) | Apparatus for determining a surface condition of an object | |
| JP4964171B2 (ja) | 対象領域抽出方法および装置ならびにプログラム | |
| CN109975196B (zh) | 一种网织红细胞检测方法及其系统 | |
| CN113609984A (zh) | 一种指针式仪表读数识别方法、装置及电子设备 | |
| CN109063564A (zh) | 一种目标变化检测方法 | |
| CN115082314A (zh) | 一种自适应特征提取的光学表面缺陷图像分步拼接的方法 | |
| JP4249966B2 (ja) | プリント配線基板の検査方法及び検査装置 | |
| JP3020973B2 (ja) | 画像処理方法 | |
| CN110348307B (zh) | 一种起重机金属结构攀爬机器人的路径边缘识别方法及系统 | |
| JPS63236989A (ja) | 異物検出装置 | |
| JP2840347B2 (ja) | 基板実装検査装置 | |
| JPH03175343A (ja) | 外観検査による欠陥抽出方法 | |
| Banerjee et al. | Handling of impreciseness in gray level corner detection using fuzzy set theoretic approach | |
| US6005966A (en) | Method and apparatus for multi-stream detection of high density metalization layers of multilayer structures having low contrast | |
| JPH10208066A (ja) | 被検査物のエッジライン抽出方法及びこの方法を用いた外観検査方法 | |
| JP2710685B2 (ja) | 外観検査による欠陥検出方法 | |
| CN116029989B (zh) | 用于石料图像的石料边缘图像分割方法 | |
| IL174705A (en) | Method for identifying irregularities in a smooth curve in an image | |
| IL179547A (en) | Automated optical inspection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20041222 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070611 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20070904 |
|
| A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20070911 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20071005 |
|
| A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20071015 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20071109 |
|
| A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20071116 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20071210 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080916 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20081204 |
|
| A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20081211 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20090106 |
|
| A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20090114 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20090203 |
|
| A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20090210 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090316 |
|
| A524 | Written submission of copy of amendment under article 19 pct |
Free format text: JAPANESE INTERMEDIATE CODE: A524 Effective date: 20090316 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090421 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090604 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20090625 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20090702 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120710 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120710 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130710 Year of fee payment: 4 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |