JP4327395B2 - センサおよび微細加工された装置 - Google Patents

センサおよび微細加工された装置 Download PDF

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Publication number
JP4327395B2
JP4327395B2 JP2001520110A JP2001520110A JP4327395B2 JP 4327395 B2 JP4327395 B2 JP 4327395B2 JP 2001520110 A JP2001520110 A JP 2001520110A JP 2001520110 A JP2001520110 A JP 2001520110A JP 4327395 B2 JP4327395 B2 JP 4327395B2
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Japan
Prior art keywords
electrode
signal
movable
electrodes
substrate
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Expired - Lifetime
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JP2001520110A
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English (en)
Japanese (ja)
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JP2003508756A5 (https=
JP2003508756A (ja
Inventor
ホロシャー，デビッド・シー
メミシアン，ジョン
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Analog Devices Inc
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Analog Devices Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
JP2001520110A 1999-08-31 2000-08-25 センサおよび微細加工された装置 Expired - Lifetime JP4327395B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15173099P 1999-08-31 1999-08-31
US60/151,730 1999-08-31
PCT/US2000/023534 WO2001016606A1 (en) 1999-08-31 2000-08-25 Feedback circuit for micromachined accelerometer

Publications (3)

Publication Number Publication Date
JP2003508756A JP2003508756A (ja) 2003-03-04
JP2003508756A5 JP2003508756A5 (https=) 2005-12-22
JP4327395B2 true JP4327395B2 (ja) 2009-09-09

Family

ID=22540018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001520110A Expired - Lifetime JP4327395B2 (ja) 1999-08-31 2000-08-25 センサおよび微細加工された装置

Country Status (6)

Country Link
US (2) US6530275B1 (https=)
EP (1) EP1236048B1 (https=)
JP (1) JP4327395B2 (https=)
AT (1) ATE322020T1 (https=)
DE (1) DE60027020T2 (https=)
WO (1) WO2001016606A1 (https=)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10357870B4 (de) * 2003-12-11 2013-02-07 Robert Bosch Gmbh Sensor mit symmetrischer Begrenzung eines Signals
US7194376B2 (en) * 2004-04-27 2007-03-20 Delphi Technologies, Inc. Circuit and method of processing multiple-axis sensor output signals
US20050235751A1 (en) * 2004-04-27 2005-10-27 Zarabadi Seyed R Dual-axis accelerometer
US20060266118A1 (en) * 2005-03-29 2006-11-30 Denison Timothy J Capacitive sensor with damping
ES2245614B1 (es) * 2005-05-25 2006-12-16 Universitat Autonoma De Barcelona Sistema de lectura para un elemento transductor mecanico.
US7368923B2 (en) * 2005-12-22 2008-05-06 Honeywell International Inc. Time interval trimmed differential capacitance sensor
US7377171B2 (en) * 2006-08-15 2008-05-27 General Electric Company Feedback circuit for radiation resistant transducer
US7552637B2 (en) * 2006-09-19 2009-06-30 Honeywell International Inc. Torque driving circuit
DE102008003342A1 (de) * 2008-01-07 2009-07-09 Robert Bosch Gmbh Vorrichtung mit einem Differenzkondensator und einer Auswerteschaltung
DE102008023535B4 (de) * 2008-05-14 2011-05-12 Texas Instruments Deutschland Gmbh Elektronische Vorrichtung und Verfahren zur Auswertung einer variablen Kapazität
US7956621B2 (en) * 2008-06-11 2011-06-07 Analog Devices, Inc. Anti-capture method and apparatus for micromachined devices
WO2010119046A2 (en) 2009-04-14 2010-10-21 Atlantic Inertial Systems Limited Accelerometer control systems
MX2012013044A (es) * 2010-05-12 2013-03-05 Hewlett Packard Development Co Acelerometro.
US8576006B1 (en) 2010-11-30 2013-11-05 Lockheed Martin Corporation Wideband variable gain amplifier
CN108075738B (zh) 2011-12-16 2021-10-01 美国亚德诺半导体公司 用于多个通道的低噪声放大器
US8860508B1 (en) 2012-12-05 2014-10-14 Lockheed Martin Corporation Digitally controlled wideband variable gain amplifier
US9383384B2 (en) * 2013-05-31 2016-07-05 Honeywell International Inc. Extended-range closed-loop accelerometer
CN103558417A (zh) * 2013-11-08 2014-02-05 中国工程物理研究院电子工程研究所 一种电荷平衡式微加速度计表头差分电容检测方法及其装置
GB2527595A (en) * 2014-06-27 2015-12-30 Atlantic Inertial Systems Ltd Accelerometers
GB2555804B (en) 2016-11-09 2022-02-02 Atlantic Inertial Systems Ltd Accelerometer control
GB2593132A (en) 2019-11-01 2021-09-22 Atlantic Inertial Systems Ltd Methods for closed loop operation of capacitive accelerometers
EP3862757B1 (en) 2020-02-07 2024-03-27 Atlantic Inertial Systems Limited Methods for closed loop operation of capacitive accelerometers and such capacitive accelerometers
WO2022266090A1 (en) * 2021-06-14 2022-12-22 Soundskrit Inc. Mems microphone

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992003740A1 (en) 1990-08-17 1992-03-05 Analog Devices, Inc. Monolithic accelerometer
US5326726A (en) 1990-08-17 1994-07-05 Analog Devices, Inc. Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
FR2689627B1 (fr) 1992-04-07 1997-06-20 Sextant Avionique Perfectionnement aux micro-capteurs pendulaires asservis.
US5801309A (en) 1994-03-18 1998-09-01 New Jersey Institute Of Technology Microaccelerometer employing resonant circuit detection of seismic mass displacement
JP3139305B2 (ja) * 1994-08-24 2001-02-26 株式会社村田製作所 容量型加速度センサ
JP3216455B2 (ja) 1994-12-22 2001-10-09 株式会社村田製作所 容量型静電サーボ加速度センサ
US5659262A (en) 1996-03-15 1997-08-19 Analog Devices, Inc. Offset trimming for a micromachined sensing device

Also Published As

Publication number Publication date
EP1236048B1 (en) 2006-03-29
US20030167843A1 (en) 2003-09-11
DE60027020D1 (de) 2006-05-18
ATE322020T1 (de) 2006-04-15
JP2003508756A (ja) 2003-03-04
US6761069B2 (en) 2004-07-13
DE60027020T2 (de) 2006-10-26
WO2001016606A1 (en) 2001-03-08
US6530275B1 (en) 2003-03-11
EP1236048A1 (en) 2002-09-04

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