ATE322020T1 - Rückkopplungsschaltung für mikromechanischen beschleunigungssensor - Google Patents

Rückkopplungsschaltung für mikromechanischen beschleunigungssensor

Info

Publication number
ATE322020T1
ATE322020T1 AT00957859T AT00957859T ATE322020T1 AT E322020 T1 ATE322020 T1 AT E322020T1 AT 00957859 T AT00957859 T AT 00957859T AT 00957859 T AT00957859 T AT 00957859T AT E322020 T1 ATE322020 T1 AT E322020T1
Authority
AT
Austria
Prior art keywords
movable electrode
acceleration sensor
feedback circuit
fixed electrodes
micromechanical acceleration
Prior art date
Application number
AT00957859T
Other languages
English (en)
Inventor
David C Hollocher
John Memishian
Original Assignee
Analog Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Analog Devices Inc filed Critical Analog Devices Inc
Application granted granted Critical
Publication of ATE322020T1 publication Critical patent/ATE322020T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
AT00957859T 1999-08-31 2000-08-25 Rückkopplungsschaltung für mikromechanischen beschleunigungssensor ATE322020T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US15173099P 1999-08-31 1999-08-31

Publications (1)

Publication Number Publication Date
ATE322020T1 true ATE322020T1 (de) 2006-04-15

Family

ID=22540018

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00957859T ATE322020T1 (de) 1999-08-31 2000-08-25 Rückkopplungsschaltung für mikromechanischen beschleunigungssensor

Country Status (6)

Country Link
US (2) US6530275B1 (de)
EP (1) EP1236048B1 (de)
JP (1) JP4327395B2 (de)
AT (1) ATE322020T1 (de)
DE (1) DE60027020T2 (de)
WO (1) WO2001016606A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10357870B4 (de) * 2003-12-11 2013-02-07 Robert Bosch Gmbh Sensor mit symmetrischer Begrenzung eines Signals
US20050235751A1 (en) * 2004-04-27 2005-10-27 Zarabadi Seyed R Dual-axis accelerometer
US7194376B2 (en) * 2004-04-27 2007-03-20 Delphi Technologies, Inc. Circuit and method of processing multiple-axis sensor output signals
US20060266118A1 (en) * 2005-03-29 2006-11-30 Denison Timothy J Capacitive sensor with damping
ES2245614B1 (es) * 2005-05-25 2006-12-16 Universitat Autonoma De Barcelona Sistema de lectura para un elemento transductor mecanico.
US7368923B2 (en) * 2005-12-22 2008-05-06 Honeywell International Inc. Time interval trimmed differential capacitance sensor
US7377171B2 (en) * 2006-08-15 2008-05-27 General Electric Company Feedback circuit for radiation resistant transducer
US7552637B2 (en) * 2006-09-19 2009-06-30 Honeywell International Inc. Torque driving circuit
DE102008003342A1 (de) * 2008-01-07 2009-07-09 Robert Bosch Gmbh Vorrichtung mit einem Differenzkondensator und einer Auswerteschaltung
DE102008023535B4 (de) * 2008-05-14 2011-05-12 Texas Instruments Deutschland Gmbh Elektronische Vorrichtung und Verfahren zur Auswertung einer variablen Kapazität
US7956621B2 (en) * 2008-06-11 2011-06-07 Analog Devices, Inc. Anti-capture method and apparatus for micromachined devices
US9201091B2 (en) 2009-04-14 2015-12-01 Atlantic Inertial Systems Limited Accelerometer control systems
CA2799152C (en) * 2010-05-12 2017-10-03 Robert Newton Bicknell Accelerometer
US8576006B1 (en) 2010-11-30 2013-11-05 Lockheed Martin Corporation Wideband variable gain amplifier
CN103999364B (zh) 2011-12-16 2018-01-19 美国亚德诺半导体公司 用于多个通道的低噪声放大器
US8860508B1 (en) 2012-12-05 2014-10-14 Lockheed Martin Corporation Digitally controlled wideband variable gain amplifier
US9383384B2 (en) * 2013-05-31 2016-07-05 Honeywell International Inc. Extended-range closed-loop accelerometer
CN103558417A (zh) * 2013-11-08 2014-02-05 中国工程物理研究院电子工程研究所 一种电荷平衡式微加速度计表头差分电容检测方法及其装置
GB2527595A (en) * 2014-06-27 2015-12-30 Atlantic Inertial Systems Ltd Accelerometers
GB2555804B (en) * 2016-11-09 2022-02-02 Atlantic Inertial Systems Ltd Accelerometer control
GB2593132A (en) 2019-11-01 2021-09-22 Atlantic Inertial Systems Ltd Methods for closed loop operation of capacitive accelerometers
EP3862757B1 (de) 2020-02-07 2024-03-27 Atlantic Inertial Systems Limited Verfahren für den betrieb von kapazitiven beschleunigungsmessern in geschlossenen regelkreisen und solche kapazitiven beschleunigungsmesser
US20240284122A1 (en) * 2021-06-14 2024-08-22 Soundskrit Inc. Mems microphone

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5326726A (en) 1990-08-17 1994-07-05 Analog Devices, Inc. Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
WO1992003740A1 (en) 1990-08-17 1992-03-05 Analog Devices, Inc. Monolithic accelerometer
FR2689627B1 (fr) * 1992-04-07 1997-06-20 Sextant Avionique Perfectionnement aux micro-capteurs pendulaires asservis.
US5801309A (en) 1994-03-18 1998-09-01 New Jersey Institute Of Technology Microaccelerometer employing resonant circuit detection of seismic mass displacement
JP3139305B2 (ja) * 1994-08-24 2001-02-26 株式会社村田製作所 容量型加速度センサ
JP3216455B2 (ja) * 1994-12-22 2001-10-09 株式会社村田製作所 容量型静電サーボ加速度センサ
US5659262A (en) * 1996-03-15 1997-08-19 Analog Devices, Inc. Offset trimming for a micromachined sensing device

Also Published As

Publication number Publication date
JP2003508756A (ja) 2003-03-04
EP1236048B1 (de) 2006-03-29
JP4327395B2 (ja) 2009-09-09
EP1236048A1 (de) 2002-09-04
US6530275B1 (en) 2003-03-11
US20030167843A1 (en) 2003-09-11
WO2001016606A1 (en) 2001-03-08
DE60027020T2 (de) 2006-10-26
US6761069B2 (en) 2004-07-13
DE60027020D1 (de) 2006-05-18

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