DE60027020T2 - Rückkopplungsschaltung für mikromechanischen beschleunigungssensor - Google Patents
Rückkopplungsschaltung für mikromechanischen beschleunigungssensor Download PDFInfo
- Publication number
- DE60027020T2 DE60027020T2 DE60027020T DE60027020T DE60027020T2 DE 60027020 T2 DE60027020 T2 DE 60027020T2 DE 60027020 T DE60027020 T DE 60027020T DE 60027020 T DE60027020 T DE 60027020T DE 60027020 T2 DE60027020 T2 DE 60027020T2
- Authority
- DE
- Germany
- Prior art keywords
- electrode
- signal
- feedback
- voltage
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001133 acceleration Effects 0.000 title claims abstract description 25
- 239000003990 capacitor Substances 0.000 claims abstract description 18
- 230000004044 response Effects 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 15
- 230000008859 change Effects 0.000 claims description 13
- 230000000737 periodic effect Effects 0.000 claims description 13
- 230000000694 effects Effects 0.000 claims description 9
- 230000000295 complement effect Effects 0.000 claims description 6
- 238000012545 processing Methods 0.000 description 8
- 230000008901 benefit Effects 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 6
- 238000013459 approach Methods 0.000 description 4
- 230000033228 biological regulation Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 230000003071 parasitic effect Effects 0.000 description 3
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- 238000010276 construction Methods 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
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- 238000012546 transfer Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
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- 238000006243 chemical reaction Methods 0.000 description 1
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- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15173099P | 1999-08-31 | 1999-08-31 | |
| US151730P | 1999-08-31 | ||
| PCT/US2000/023534 WO2001016606A1 (en) | 1999-08-31 | 2000-08-25 | Feedback circuit for micromachined accelerometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60027020D1 DE60027020D1 (de) | 2006-05-18 |
| DE60027020T2 true DE60027020T2 (de) | 2006-10-26 |
Family
ID=22540018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60027020T Expired - Lifetime DE60027020T2 (de) | 1999-08-31 | 2000-08-25 | Rückkopplungsschaltung für mikromechanischen beschleunigungssensor |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US6530275B1 (https=) |
| EP (1) | EP1236048B1 (https=) |
| JP (1) | JP4327395B2 (https=) |
| AT (1) | ATE322020T1 (https=) |
| DE (1) | DE60027020T2 (https=) |
| WO (1) | WO2001016606A1 (https=) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10357870B4 (de) * | 2003-12-11 | 2013-02-07 | Robert Bosch Gmbh | Sensor mit symmetrischer Begrenzung eines Signals |
| US7194376B2 (en) * | 2004-04-27 | 2007-03-20 | Delphi Technologies, Inc. | Circuit and method of processing multiple-axis sensor output signals |
| US20050235751A1 (en) * | 2004-04-27 | 2005-10-27 | Zarabadi Seyed R | Dual-axis accelerometer |
| US20060266118A1 (en) * | 2005-03-29 | 2006-11-30 | Denison Timothy J | Capacitive sensor with damping |
| ES2245614B1 (es) * | 2005-05-25 | 2006-12-16 | Universitat Autonoma De Barcelona | Sistema de lectura para un elemento transductor mecanico. |
| US7368923B2 (en) * | 2005-12-22 | 2008-05-06 | Honeywell International Inc. | Time interval trimmed differential capacitance sensor |
| US7377171B2 (en) * | 2006-08-15 | 2008-05-27 | General Electric Company | Feedback circuit for radiation resistant transducer |
| US7552637B2 (en) * | 2006-09-19 | 2009-06-30 | Honeywell International Inc. | Torque driving circuit |
| DE102008003342A1 (de) * | 2008-01-07 | 2009-07-09 | Robert Bosch Gmbh | Vorrichtung mit einem Differenzkondensator und einer Auswerteschaltung |
| DE102008023535B4 (de) * | 2008-05-14 | 2011-05-12 | Texas Instruments Deutschland Gmbh | Elektronische Vorrichtung und Verfahren zur Auswertung einer variablen Kapazität |
| US7956621B2 (en) * | 2008-06-11 | 2011-06-07 | Analog Devices, Inc. | Anti-capture method and apparatus for micromachined devices |
| WO2010119046A2 (en) | 2009-04-14 | 2010-10-21 | Atlantic Inertial Systems Limited | Accelerometer control systems |
| MX2012013044A (es) * | 2010-05-12 | 2013-03-05 | Hewlett Packard Development Co | Acelerometro. |
| US8576006B1 (en) | 2010-11-30 | 2013-11-05 | Lockheed Martin Corporation | Wideband variable gain amplifier |
| CN108075738B (zh) | 2011-12-16 | 2021-10-01 | 美国亚德诺半导体公司 | 用于多个通道的低噪声放大器 |
| US8860508B1 (en) | 2012-12-05 | 2014-10-14 | Lockheed Martin Corporation | Digitally controlled wideband variable gain amplifier |
| US9383384B2 (en) * | 2013-05-31 | 2016-07-05 | Honeywell International Inc. | Extended-range closed-loop accelerometer |
| CN103558417A (zh) * | 2013-11-08 | 2014-02-05 | 中国工程物理研究院电子工程研究所 | 一种电荷平衡式微加速度计表头差分电容检测方法及其装置 |
| GB2527595A (en) * | 2014-06-27 | 2015-12-30 | Atlantic Inertial Systems Ltd | Accelerometers |
| GB2555804B (en) | 2016-11-09 | 2022-02-02 | Atlantic Inertial Systems Ltd | Accelerometer control |
| GB2593132A (en) | 2019-11-01 | 2021-09-22 | Atlantic Inertial Systems Ltd | Methods for closed loop operation of capacitive accelerometers |
| EP3862757B1 (en) | 2020-02-07 | 2024-03-27 | Atlantic Inertial Systems Limited | Methods for closed loop operation of capacitive accelerometers and such capacitive accelerometers |
| WO2022266090A1 (en) * | 2021-06-14 | 2022-12-22 | Soundskrit Inc. | Mems microphone |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1992003740A1 (en) | 1990-08-17 | 1992-03-05 | Analog Devices, Inc. | Monolithic accelerometer |
| US5326726A (en) | 1990-08-17 | 1994-07-05 | Analog Devices, Inc. | Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure |
| FR2689627B1 (fr) | 1992-04-07 | 1997-06-20 | Sextant Avionique | Perfectionnement aux micro-capteurs pendulaires asservis. |
| US5801309A (en) | 1994-03-18 | 1998-09-01 | New Jersey Institute Of Technology | Microaccelerometer employing resonant circuit detection of seismic mass displacement |
| JP3139305B2 (ja) * | 1994-08-24 | 2001-02-26 | 株式会社村田製作所 | 容量型加速度センサ |
| JP3216455B2 (ja) | 1994-12-22 | 2001-10-09 | 株式会社村田製作所 | 容量型静電サーボ加速度センサ |
| US5659262A (en) | 1996-03-15 | 1997-08-19 | Analog Devices, Inc. | Offset trimming for a micromachined sensing device |
-
2000
- 2000-08-25 US US09/645,201 patent/US6530275B1/en not_active Expired - Lifetime
- 2000-08-25 WO PCT/US2000/023534 patent/WO2001016606A1/en not_active Ceased
- 2000-08-25 JP JP2001520110A patent/JP4327395B2/ja not_active Expired - Lifetime
- 2000-08-25 DE DE60027020T patent/DE60027020T2/de not_active Expired - Lifetime
- 2000-08-25 AT AT00957859T patent/ATE322020T1/de not_active IP Right Cessation
- 2000-08-25 EP EP00957859A patent/EP1236048B1/en not_active Expired - Lifetime
-
2003
- 2003-03-11 US US10/385,805 patent/US6761069B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP1236048B1 (en) | 2006-03-29 |
| US20030167843A1 (en) | 2003-09-11 |
| JP4327395B2 (ja) | 2009-09-09 |
| DE60027020D1 (de) | 2006-05-18 |
| ATE322020T1 (de) | 2006-04-15 |
| JP2003508756A (ja) | 2003-03-04 |
| US6761069B2 (en) | 2004-07-13 |
| WO2001016606A1 (en) | 2001-03-08 |
| US6530275B1 (en) | 2003-03-11 |
| EP1236048A1 (en) | 2002-09-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |