JP4324701B2 - 発光分光分析装置 - Google Patents

発光分光分析装置 Download PDF

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Publication number
JP4324701B2
JP4324701B2 JP2005097858A JP2005097858A JP4324701B2 JP 4324701 B2 JP4324701 B2 JP 4324701B2 JP 2005097858 A JP2005097858 A JP 2005097858A JP 2005097858 A JP2005097858 A JP 2005097858A JP 4324701 B2 JP4324701 B2 JP 4324701B2
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correction
measurement
interference
wavelength position
coexisting
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Japanese (ja)
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JP2006275892A5 (enrdf_load_stackoverflow
JP2006275892A (ja
Inventor
敬久 大森
伸彦 西
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Shimadzu Corp
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Shimadzu Corp
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  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP2005097858A 2005-03-30 2005-03-30 発光分光分析装置 Expired - Lifetime JP4324701B2 (ja)

Priority Applications (1)

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JP2005097858A JP4324701B2 (ja) 2005-03-30 2005-03-30 発光分光分析装置

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JP2005097858A JP4324701B2 (ja) 2005-03-30 2005-03-30 発光分光分析装置

Publications (3)

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JP2006275892A JP2006275892A (ja) 2006-10-12
JP2006275892A5 JP2006275892A5 (enrdf_load_stackoverflow) 2007-07-26
JP4324701B2 true JP4324701B2 (ja) 2009-09-02

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JP2005097858A Expired - Lifetime JP4324701B2 (ja) 2005-03-30 2005-03-30 発光分光分析装置

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Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4626572B2 (ja) * 2006-06-14 2011-02-09 株式会社島津製作所 発光分光分析装置
JP5131211B2 (ja) * 2009-01-20 2013-01-30 株式会社島津製作所 発光分光分析装置
JP5383265B2 (ja) * 2009-03-17 2014-01-08 株式会社日立ハイテクノロジーズ エッチング装置、分析装置、エッチング処理方法、およびエッチング処理プログラム
JP6316064B2 (ja) * 2014-03-31 2018-04-25 株式会社日立ハイテクサイエンス Ｉｃｐ発光分光分析装置
JP6696458B2 (ja) * 2017-02-23 2020-05-20 株式会社島津製作所 発光分光分析装置
JP7214316B2 (ja) * 2018-03-26 2023-01-30 一般財団法人電力中央研究所 コンクリートの塩化物イオン濃度の定量方法、定量装置、及び定量プログラム
KR102330367B1 (ko) * 2020-08-20 2021-11-23 한국핵융합에너지연구원 플라즈마 스펙트럼 데이터의 보정 방법 및 이를 위한 스마트센서
KR102335854B1 (ko) * 2020-08-20 2021-12-06 한국핵융합에너지연구원 스마트센서를 이용한 플라즈마 공정 제어 방법 및 시스템
JP7653718B2 (ja) * 2023-02-24 2025-03-31 株式会社リガク 蛍光ｘ線分析装置

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JP2006275892A (ja) 2006-10-12

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