JP4320312B2 - 相変化膜を含む記録媒体の製造方法 - Google Patents

相変化膜を含む記録媒体の製造方法 Download PDF

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Publication number
JP4320312B2
JP4320312B2 JP2005162513A JP2005162513A JP4320312B2 JP 4320312 B2 JP4320312 B2 JP 4320312B2 JP 2005162513 A JP2005162513 A JP 2005162513A JP 2005162513 A JP2005162513 A JP 2005162513A JP 4320312 B2 JP4320312 B2 JP 4320312B2
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JP
Japan
Prior art keywords
phase change
film
amorphous
change film
region
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Expired - Fee Related
Application number
JP2005162513A
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English (en)
Japanese (ja)
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JP2006338787A5 (https=
JP2006338787A (ja
Inventor
由美子 安齋
俊通 新谷
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Hitachi Ltd
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Hitachi Ltd
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Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2005162513A priority Critical patent/JP4320312B2/ja
Priority to US11/209,649 priority patent/US20060275712A1/en
Publication of JP2006338787A publication Critical patent/JP2006338787A/ja
Publication of JP2006338787A5 publication Critical patent/JP2006338787A5/ja
Application granted granted Critical
Publication of JP4320312B2 publication Critical patent/JP4320312B2/ja
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Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/266—Sputtering or spin-coating layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
    • G11B7/0045—Recording
    • G11B7/00454—Recording involving phase-change effects

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP2005162513A 2005-06-02 2005-06-02 相変化膜を含む記録媒体の製造方法 Expired - Fee Related JP4320312B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005162513A JP4320312B2 (ja) 2005-06-02 2005-06-02 相変化膜を含む記録媒体の製造方法
US11/209,649 US20060275712A1 (en) 2005-06-02 2005-08-24 Method for fabrication of physical patterns and the method for fabrication of device using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005162513A JP4320312B2 (ja) 2005-06-02 2005-06-02 相変化膜を含む記録媒体の製造方法

Publications (3)

Publication Number Publication Date
JP2006338787A JP2006338787A (ja) 2006-12-14
JP2006338787A5 JP2006338787A5 (https=) 2008-05-08
JP4320312B2 true JP4320312B2 (ja) 2009-08-26

Family

ID=37494528

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005162513A Expired - Fee Related JP4320312B2 (ja) 2005-06-02 2005-06-02 相変化膜を含む記録媒体の製造方法

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Country Link
US (1) US20060275712A1 (https=)
JP (1) JP4320312B2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6788963B2 (en) * 2002-08-08 2004-09-07 Flarion Technologies, Inc. Methods and apparatus for operating mobile nodes in multiple a states
JP4685754B2 (ja) 2006-12-28 2011-05-18 株式会社日立製作所 トラッキング方法
JP4903081B2 (ja) * 2007-05-17 2012-03-21 株式会社日立製作所 光ディスク媒体及びトラッキング方法
SG156564A1 (en) * 2008-04-09 2009-11-26 Asml Holding Nv Lithographic apparatus and device manufacturing method
EP2345932A4 (en) * 2008-10-14 2012-06-13 Asahi Kasei Corp HEAT-RESISTANT RESISTANT MATERIAL, LAMINATED BODY FOR THERMAL LITHOGRAPHY WITH THE MATERIAL AND MOLDING PROCESS WITH THE MATERIAL AND LAMINATE BODY
CN114512150B (zh) 2020-11-16 2025-02-18 华为技术有限公司 一种光存储介质、光存储介质制备方法以及系统

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4423138A (en) * 1982-01-21 1983-12-27 Eastman Kodak Company Resist developer with ammonium or phosphonium compound and method of use to develop o-quinone diazide and novolac resist
US5051340A (en) * 1989-06-23 1991-09-24 Eastman Kodak Company Master for optical element replication
JPH086256A (ja) * 1994-06-24 1996-01-12 Mitsubishi Electric Corp レジストパターンの形成方法および該方法に用いられる酸性の水溶性材料組成物
US5935733A (en) * 1996-04-05 1999-08-10 Intel Corporation Photolithography mask and method of fabrication
US6030556A (en) * 1997-07-08 2000-02-29 Imation Corp. Optical disc stampers and methods/systems for manufacturing the same
US6964804B2 (en) * 2001-02-14 2005-11-15 Shipley Company, L.L.C. Micromachined structures made by combined wet and dry etching
US6780766B2 (en) * 2001-04-06 2004-08-24 Micron Technology, Inc. Methods of forming regions of differing composition over a substrate
US6511896B2 (en) * 2001-04-06 2003-01-28 Micron Technology, Inc. Method of etching a substantially amorphous TA2O5 comprising layer
US6969472B2 (en) * 2001-04-19 2005-11-29 Lsi Logic Corporation Method of fabricating sub-micron hemispherical and hemicylidrical structures from non-spherically shaped templates
JP4120268B2 (ja) * 2002-05-27 2008-07-16 株式会社日立製作所 情報記録媒体および情報記録方法
US6831019B1 (en) * 2002-08-29 2004-12-14 Micron Technology, Inc. Plasma etching methods and methods of forming memory devices comprising a chalcogenide comprising layer received operably proximate conductive electrodes
EP1482494A3 (en) * 2003-05-28 2007-08-29 Matsushita Electric Industrial Co., Ltd. Method for producing master for optical information recording media
TW200504746A (en) * 2003-06-23 2005-02-01 Matsushita Electric Industrial Co Ltd Method for producing stamper for optical information recording medium

Also Published As

Publication number Publication date
US20060275712A1 (en) 2006-12-07
JP2006338787A (ja) 2006-12-14

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