JP4319707B2 - 電気化学的測定センサ用のセンサエレメント及びその製造方法 - Google Patents

電気化学的測定センサ用のセンサエレメント及びその製造方法 Download PDF

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Publication number
JP4319707B2
JP4319707B2 JP13179298A JP13179298A JP4319707B2 JP 4319707 B2 JP4319707 B2 JP 4319707B2 JP 13179298 A JP13179298 A JP 13179298A JP 13179298 A JP13179298 A JP 13179298A JP 4319707 B2 JP4319707 B2 JP 4319707B2
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Japan
Prior art keywords
heating device
sensor element
layer
sealing frame
sensor
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP13179298A
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English (en)
Japanese (ja)
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JPH10332635A5 (https=
JPH10332635A (ja
Inventor
グラーザー テオドーア
レンツ ハンス−イェルク
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Robert Bosch GmbH
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Robert Bosch GmbH
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Publication of JPH10332635A5 publication Critical patent/JPH10332635A5/ja
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Publication of JP4319707B2 publication Critical patent/JP4319707B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP13179298A 1997-05-17 1998-05-14 電気化学的測定センサ用のセンサエレメント及びその製造方法 Expired - Lifetime JP4319707B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19720892A DE19720892C2 (de) 1997-05-17 1997-05-17 Sensorelement
DE19720892.4 1997-05-17

Publications (3)

Publication Number Publication Date
JPH10332635A JPH10332635A (ja) 1998-12-18
JPH10332635A5 JPH10332635A5 (https=) 2005-10-06
JP4319707B2 true JP4319707B2 (ja) 2009-08-26

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ID=7829878

Family Applications (1)

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JP13179298A Expired - Lifetime JP4319707B2 (ja) 1997-05-17 1998-05-14 電気化学的測定センサ用のセンサエレメント及びその製造方法

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Country Link
US (1) US6027622A (https=)
JP (1) JP4319707B2 (https=)
DE (1) DE19720892C2 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6634213B1 (en) * 2000-02-18 2003-10-21 Honeywell International Inc. Permeable protective coating for a single-chip hydrogen sensor
US7098850B2 (en) * 2000-07-18 2006-08-29 King Patrick F Grounded antenna for a wireless communication device and method
US6806842B2 (en) * 2000-07-18 2004-10-19 Marconi Intellectual Property (Us) Inc. Wireless communication device and method for discs
US6483473B1 (en) * 2000-07-18 2002-11-19 Marconi Communications Inc. Wireless communication device and method
DE10127917C1 (de) * 2001-06-08 2002-12-12 Bosch Gmbh Robert Gassensor, insbesondere Lambdasonde
EP1978473B1 (en) 2002-04-24 2010-07-14 Mineral Lassen LLC Manufacturing method for a wireless communication device and manufacturing apparatus
US7818741B1 (en) * 2005-05-17 2010-10-19 Adobe Systems Incorporated Method and system to monitor installation of a software program
JP5420183B2 (ja) * 2008-03-19 2014-02-19 日本碍子株式会社 積層体からのセンサ素子用素子体の切り出し方法、センサ素子の製造方法、センサ素子、およびガスセンサ
EP2898846B1 (en) 2010-10-01 2018-01-31 Applied Medical Resources Corporation Electrosurgical system with a radio frequency amplifier and with means for adaptation to electrode spacing

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5991350A (ja) * 1982-11-17 1984-05-26 Toyota Central Res & Dev Lab Inc 薄膜酸素センサ
US4604161A (en) * 1985-05-02 1986-08-05 Xerox Corporation Method of fabricating image sensor arrays
DE3811713A1 (de) * 1988-04-08 1989-10-19 Bosch Gmbh Robert Planare polarographische sonde zur bestimmung des (lambda)-wertes von gasgemischen
US4851371A (en) * 1988-12-05 1989-07-25 Xerox Corporation Fabricating process for large array semiconductive devices
DE4004172C2 (de) * 1989-02-14 1998-06-04 Ngk Spark Plug Co Sauerstoffsensor zur Luft-Brennstoffgemisch-Kontrolle mit einer Schutzschicht, die eine Sauerstoff einschließende Substanz umfaßt, und Verfahren zur Herstellung des Sensors
US5345213A (en) * 1992-10-26 1994-09-06 The United States Of America, As Represented By The Secretary Of Commerce Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation
US5480535A (en) * 1992-12-28 1996-01-02 Kabushiki Kaisha Toyota Chuo Kenkyusho Thin film multilayered air/fuel ratio sensor
JPH0816669B2 (ja) * 1993-02-18 1996-02-21 日本電気株式会社 グルコースセンサの製造方法
US5827415A (en) * 1994-09-26 1998-10-27 The Board Of Trustees Of Leland Stanford Jun. Univ. Oxygen sensor

Also Published As

Publication number Publication date
DE19720892C2 (de) 2002-08-08
US6027622A (en) 2000-02-22
DE19720892A1 (de) 1998-11-19
JPH10332635A (ja) 1998-12-18

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