DE19720892C2 - Sensorelement - Google Patents

Sensorelement

Info

Publication number
DE19720892C2
DE19720892C2 DE19720892A DE19720892A DE19720892C2 DE 19720892 C2 DE19720892 C2 DE 19720892C2 DE 19720892 A DE19720892 A DE 19720892A DE 19720892 A DE19720892 A DE 19720892A DE 19720892 C2 DE19720892 C2 DE 19720892C2
Authority
DE
Germany
Prior art keywords
heating device
sensor element
cover layer
functional layers
sensor elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE19720892A
Other languages
German (de)
English (en)
Other versions
DE19720892A1 (de
Inventor
Theodor Graser
Hans-Joerg Renz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE19720892A priority Critical patent/DE19720892C2/de
Priority to JP13179298A priority patent/JP4319707B2/ja
Priority to US09/080,834 priority patent/US6027622A/en
Publication of DE19720892A1 publication Critical patent/DE19720892A1/de
Application granted granted Critical
Publication of DE19720892C2 publication Critical patent/DE19720892C2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
DE19720892A 1997-05-17 1997-05-17 Sensorelement Expired - Fee Related DE19720892C2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE19720892A DE19720892C2 (de) 1997-05-17 1997-05-17 Sensorelement
JP13179298A JP4319707B2 (ja) 1997-05-17 1998-05-14 電気化学的測定センサ用のセンサエレメント及びその製造方法
US09/080,834 US6027622A (en) 1997-05-17 1998-05-18 Sensor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19720892A DE19720892C2 (de) 1997-05-17 1997-05-17 Sensorelement

Publications (2)

Publication Number Publication Date
DE19720892A1 DE19720892A1 (de) 1998-11-19
DE19720892C2 true DE19720892C2 (de) 2002-08-08

Family

ID=7829878

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19720892A Expired - Fee Related DE19720892C2 (de) 1997-05-17 1997-05-17 Sensorelement

Country Status (3)

Country Link
US (1) US6027622A (https=)
JP (1) JP4319707B2 (https=)
DE (1) DE19720892C2 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6634213B1 (en) * 2000-02-18 2003-10-21 Honeywell International Inc. Permeable protective coating for a single-chip hydrogen sensor
US7098850B2 (en) * 2000-07-18 2006-08-29 King Patrick F Grounded antenna for a wireless communication device and method
US6806842B2 (en) * 2000-07-18 2004-10-19 Marconi Intellectual Property (Us) Inc. Wireless communication device and method for discs
US6483473B1 (en) * 2000-07-18 2002-11-19 Marconi Communications Inc. Wireless communication device and method
DE10127917C1 (de) * 2001-06-08 2002-12-12 Bosch Gmbh Robert Gassensor, insbesondere Lambdasonde
EP1978473B1 (en) 2002-04-24 2010-07-14 Mineral Lassen LLC Manufacturing method for a wireless communication device and manufacturing apparatus
US7818741B1 (en) * 2005-05-17 2010-10-19 Adobe Systems Incorporated Method and system to monitor installation of a software program
JP5420183B2 (ja) * 2008-03-19 2014-02-19 日本碍子株式会社 積層体からのセンサ素子用素子体の切り出し方法、センサ素子の製造方法、センサ素子、およびガスセンサ
EP2898846B1 (en) 2010-10-01 2018-01-31 Applied Medical Resources Corporation Electrosurgical system with a radio frequency amplifier and with means for adaptation to electrode spacing

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3811713A1 (de) * 1988-04-08 1989-10-19 Bosch Gmbh Robert Planare polarographische sonde zur bestimmung des (lambda)-wertes von gasgemischen
DE4004172A1 (de) * 1989-02-14 1990-08-16 Ngk Spark Plug Co Sauerstoffsensor zur luft-brennstoffgemisch-kontrolle mit einer schutzschicht, die eine sauerstoff einschliessende substanz umfasst, und verfahren zur herstellung des sensors
US5480535A (en) * 1992-12-28 1996-01-02 Kabushiki Kaisha Toyota Chuo Kenkyusho Thin film multilayered air/fuel ratio sensor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5991350A (ja) * 1982-11-17 1984-05-26 Toyota Central Res & Dev Lab Inc 薄膜酸素センサ
US4604161A (en) * 1985-05-02 1986-08-05 Xerox Corporation Method of fabricating image sensor arrays
US4851371A (en) * 1988-12-05 1989-07-25 Xerox Corporation Fabricating process for large array semiconductive devices
US5345213A (en) * 1992-10-26 1994-09-06 The United States Of America, As Represented By The Secretary Of Commerce Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation
JPH0816669B2 (ja) * 1993-02-18 1996-02-21 日本電気株式会社 グルコースセンサの製造方法
US5827415A (en) * 1994-09-26 1998-10-27 The Board Of Trustees Of Leland Stanford Jun. Univ. Oxygen sensor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3811713A1 (de) * 1988-04-08 1989-10-19 Bosch Gmbh Robert Planare polarographische sonde zur bestimmung des (lambda)-wertes von gasgemischen
DE4004172A1 (de) * 1989-02-14 1990-08-16 Ngk Spark Plug Co Sauerstoffsensor zur luft-brennstoffgemisch-kontrolle mit einer schutzschicht, die eine sauerstoff einschliessende substanz umfasst, und verfahren zur herstellung des sensors
US5480535A (en) * 1992-12-28 1996-01-02 Kabushiki Kaisha Toyota Chuo Kenkyusho Thin film multilayered air/fuel ratio sensor

Also Published As

Publication number Publication date
US6027622A (en) 2000-02-22
DE19720892A1 (de) 1998-11-19
JP4319707B2 (ja) 2009-08-26
JPH10332635A (ja) 1998-12-18

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
R084 Declaration of willingness to licence
R084 Declaration of willingness to licence
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20141202