JPH10332635A5 - - Google Patents

Info

Publication number
JPH10332635A5
JPH10332635A5 JP1998131792A JP13179298A JPH10332635A5 JP H10332635 A5 JPH10332635 A5 JP H10332635A5 JP 1998131792 A JP1998131792 A JP 1998131792A JP 13179298 A JP13179298 A JP 13179298A JP H10332635 A5 JPH10332635 A5 JP H10332635A5
Authority
JP
Japan
Prior art keywords
sensor element
width
sensor
individualizing
recesses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998131792A
Other languages
English (en)
Japanese (ja)
Other versions
JP4319707B2 (ja
JPH10332635A (ja
Filing date
Publication date
Priority claimed from DE19720892A external-priority patent/DE19720892C2/de
Application filed filed Critical
Publication of JPH10332635A publication Critical patent/JPH10332635A/ja
Publication of JPH10332635A5 publication Critical patent/JPH10332635A5/ja
Application granted granted Critical
Publication of JP4319707B2 publication Critical patent/JP4319707B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP13179298A 1997-05-17 1998-05-14 電気化学的測定センサ用のセンサエレメント及びその製造方法 Expired - Lifetime JP4319707B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19720892A DE19720892C2 (de) 1997-05-17 1997-05-17 Sensorelement
DE19720892.4 1997-05-17

Publications (3)

Publication Number Publication Date
JPH10332635A JPH10332635A (ja) 1998-12-18
JPH10332635A5 true JPH10332635A5 (https=) 2005-10-06
JP4319707B2 JP4319707B2 (ja) 2009-08-26

Family

ID=7829878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13179298A Expired - Lifetime JP4319707B2 (ja) 1997-05-17 1998-05-14 電気化学的測定センサ用のセンサエレメント及びその製造方法

Country Status (3)

Country Link
US (1) US6027622A (https=)
JP (1) JP4319707B2 (https=)
DE (1) DE19720892C2 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6634213B1 (en) * 2000-02-18 2003-10-21 Honeywell International Inc. Permeable protective coating for a single-chip hydrogen sensor
US7098850B2 (en) * 2000-07-18 2006-08-29 King Patrick F Grounded antenna for a wireless communication device and method
US6806842B2 (en) * 2000-07-18 2004-10-19 Marconi Intellectual Property (Us) Inc. Wireless communication device and method for discs
US6483473B1 (en) * 2000-07-18 2002-11-19 Marconi Communications Inc. Wireless communication device and method
DE10127917C1 (de) * 2001-06-08 2002-12-12 Bosch Gmbh Robert Gassensor, insbesondere Lambdasonde
EP1978473B1 (en) 2002-04-24 2010-07-14 Mineral Lassen LLC Manufacturing method for a wireless communication device and manufacturing apparatus
US7818741B1 (en) * 2005-05-17 2010-10-19 Adobe Systems Incorporated Method and system to monitor installation of a software program
JP5420183B2 (ja) * 2008-03-19 2014-02-19 日本碍子株式会社 積層体からのセンサ素子用素子体の切り出し方法、センサ素子の製造方法、センサ素子、およびガスセンサ
EP2898846B1 (en) 2010-10-01 2018-01-31 Applied Medical Resources Corporation Electrosurgical system with a radio frequency amplifier and with means for adaptation to electrode spacing

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5991350A (ja) * 1982-11-17 1984-05-26 Toyota Central Res & Dev Lab Inc 薄膜酸素センサ
US4604161A (en) * 1985-05-02 1986-08-05 Xerox Corporation Method of fabricating image sensor arrays
DE3811713A1 (de) * 1988-04-08 1989-10-19 Bosch Gmbh Robert Planare polarographische sonde zur bestimmung des (lambda)-wertes von gasgemischen
US4851371A (en) * 1988-12-05 1989-07-25 Xerox Corporation Fabricating process for large array semiconductive devices
DE4004172C2 (de) * 1989-02-14 1998-06-04 Ngk Spark Plug Co Sauerstoffsensor zur Luft-Brennstoffgemisch-Kontrolle mit einer Schutzschicht, die eine Sauerstoff einschließende Substanz umfaßt, und Verfahren zur Herstellung des Sensors
US5345213A (en) * 1992-10-26 1994-09-06 The United States Of America, As Represented By The Secretary Of Commerce Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation
US5480535A (en) * 1992-12-28 1996-01-02 Kabushiki Kaisha Toyota Chuo Kenkyusho Thin film multilayered air/fuel ratio sensor
JPH0816669B2 (ja) * 1993-02-18 1996-02-21 日本電気株式会社 グルコースセンサの製造方法
US5827415A (en) * 1994-09-26 1998-10-27 The Board Of Trustees Of Leland Stanford Jun. Univ. Oxygen sensor

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