JP4317154B2 - シンチレータパネルおよび放射線イメージセンサ - Google Patents
シンチレータパネルおよび放射線イメージセンサ Download PDFInfo
- Publication number
- JP4317154B2 JP4317154B2 JP2005124079A JP2005124079A JP4317154B2 JP 4317154 B2 JP4317154 B2 JP 4317154B2 JP 2005124079 A JP2005124079 A JP 2005124079A JP 2005124079 A JP2005124079 A JP 2005124079A JP 4317154 B2 JP4317154 B2 JP 4317154B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- scintillator
- transparent organic
- organic film
- scintillator panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005855 radiation Effects 0.000 title claims description 15
- 230000001681 protective effect Effects 0.000 claims description 26
- 230000002265 prevention Effects 0.000 claims description 16
- 239000000835 fiber Substances 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 9
- 239000010408 film Substances 0.000 description 75
- -1 polyparaxylylene Polymers 0.000 description 25
- 229920000052 poly(p-xylylene) Polymers 0.000 description 20
- 239000000758 substrate Substances 0.000 description 17
- 230000003746 surface roughness Effects 0.000 description 10
- 238000003384 imaging method Methods 0.000 description 8
- 229910003481 amorphous carbon Inorganic materials 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 238000005488 sandblasting Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 235000019592 roughness Nutrition 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Conversion Of X-Rays Into Visible Images (AREA)
- Measurement Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005124079A JP4317154B2 (ja) | 1998-06-18 | 2005-04-21 | シンチレータパネルおよび放射線イメージセンサ |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17119098 | 1998-06-18 | ||
| JP2005124079A JP4317154B2 (ja) | 1998-06-18 | 2005-04-21 | シンチレータパネルおよび放射線イメージセンサ |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000555115A Division JP3691392B2 (ja) | 1998-06-18 | 1999-06-18 | シンチレータパネル |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005338067A JP2005338067A (ja) | 2005-12-08 |
| JP2005338067A5 JP2005338067A5 (enExample) | 2006-08-24 |
| JP4317154B2 true JP4317154B2 (ja) | 2009-08-19 |
Family
ID=35491786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005124079A Expired - Fee Related JP4317154B2 (ja) | 1998-06-18 | 2005-04-21 | シンチレータパネルおよび放射線イメージセンサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4317154B2 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009041169A1 (ja) * | 2007-09-27 | 2009-04-02 | Konica Minolta Medical & Graphic, Inc. | シンチレータプレート |
| JP2010060414A (ja) * | 2008-09-03 | 2010-03-18 | Konica Minolta Medical & Graphic Inc | シンチレータプレート |
| JP5686993B2 (ja) | 2010-06-04 | 2015-03-18 | 浜松ホトニクス株式会社 | シンチレータパネル及び放射線イメージセンサ |
| JP5883556B2 (ja) | 2010-06-04 | 2016-03-15 | 浜松ホトニクス株式会社 | 放射線イメージセンサ |
| JP2012172972A (ja) | 2011-02-17 | 2012-09-10 | Konica Minolta Medical & Graphic Inc | シンチレータパネルの製造方法、シンチレータパネルおよびフラットパネルディテクタ |
| JP2012172971A (ja) * | 2011-02-17 | 2012-09-10 | Konica Minolta Medical & Graphic Inc | シンチレータパネル、その製造方法、フラットパネルディテクタ及びその製造方法 |
| JP2015096823A (ja) * | 2013-11-15 | 2015-05-21 | 浜松ホトニクス株式会社 | 放射線検出器、及び放射線検出器の製造方法 |
| JP6519195B2 (ja) * | 2015-01-23 | 2019-05-29 | コニカミノルタ株式会社 | シンチレータパネル及び放射線検出器 |
| JP6487263B2 (ja) * | 2015-04-20 | 2019-03-20 | 浜松ホトニクス株式会社 | 放射線検出器及びその製造方法 |
| KR102666048B1 (ko) * | 2019-05-29 | 2024-05-13 | 엘지디스플레이 주식회사 | 디지털 엑스레이 검출기와 이를 포함하는 디지털 엑스레이 검출 장치 및 이의 제조 방법 |
| JP2019164163A (ja) * | 2019-06-03 | 2019-09-26 | 浜松ホトニクス株式会社 | 放射線検出器 |
-
2005
- 2005-04-21 JP JP2005124079A patent/JP4317154B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2005338067A (ja) | 2005-12-08 |
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