JP4308707B2 - 薄膜の溝挿入方法 - Google Patents
薄膜の溝挿入方法 Download PDFInfo
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- JP4308707B2 JP4308707B2 JP2004133357A JP2004133357A JP4308707B2 JP 4308707 B2 JP4308707 B2 JP 4308707B2 JP 2004133357 A JP2004133357 A JP 2004133357A JP 2004133357 A JP2004133357 A JP 2004133357A JP 4308707 B2 JP4308707 B2 JP 4308707B2
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- thin film
- groove
- suction pipe
- insertion method
- flat surface
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Description
かかる場合、薄膜がある程度の大きさであれば、それ程支障を生じない。
本発明は、上記問題点を除去するようにした薄膜の溝挿入方法を提供するものである。
吸引パイプ1は、回転と三次元方向に移動自在な部材Aに接続されている。吸引パイプ1は、周知の自在継手10(回転自在継手)を介して接続され、また、部材Aは、モ−タ11により図示しない歯車等を介して回転自在[例えば、図4に記載の破線方向に回転]となっており、部材Aに接続された部材12は、モ−タ12により図示しない伝達部材を介してZ方向[垂直方向、例えば、図1に記載の実線方向]に移動自在となっており、部材Aに接続された部材14は、モ−タ15により図示しない伝達部材を介してY方向(水平方向、図1で言えば、図1の紙面に垂直方向)に移動自在となっており、部材Aに接続された部材16は、モ−タ17により図示しない伝達部材を介してX方向[水平方向、例えば、図1に記載の一点鎖線方向]に移動自在となっている。
2 ・・・・・薄膜
2a・・・・・一辺
20 ・・・・・挟持部材
30 ・・・・・溝
31 ・・・・・平坦面
Claims (1)
- 溝に薄膜を挿入する薄膜の溝挿入方法であって、
前記溝は、平坦面より没すると共に、直線状に形成されたものであり、
前記薄膜を吸引パイプで吸着すると共に、前記吸引パイプを回転させて前記薄膜の一辺を前記平坦面に当接させ、当接させた後、前記吸引パイプのみが回転する空回り状態とし、前記薄膜の前記一辺を前記溝に平行に保ちつつ、前記吸引パイプを前記溝に向かって移動させ、前記薄膜の前記一辺を前記溝に挿入する
ことを特徴とする薄膜の溝挿入方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004133357A JP4308707B2 (ja) | 2004-04-28 | 2004-04-28 | 薄膜の溝挿入方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2004133357A JP4308707B2 (ja) | 2004-04-28 | 2004-04-28 | 薄膜の溝挿入方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005316088A JP2005316088A (ja) | 2005-11-10 |
JP4308707B2 true JP4308707B2 (ja) | 2009-08-05 |
Family
ID=35443605
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004133357A Expired - Fee Related JP4308707B2 (ja) | 2004-04-28 | 2004-04-28 | 薄膜の溝挿入方法 |
Country Status (1)
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JP (1) | JP4308707B2 (ja) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000131527A (ja) * | 1998-10-29 | 2000-05-12 | Hitachi Cable Ltd | フィルタ挿入型光導波路の製造方法及び製造装置 |
JP2002182047A (ja) * | 2000-12-11 | 2002-06-26 | Hitachi Ltd | Plcフィルタ搭載装置および方法 |
JP3701618B2 (ja) * | 2001-08-24 | 2005-10-05 | 日本電信電話株式会社 | 導波路型光素子及びその作製方法 |
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2004
- 2004-04-28 JP JP2004133357A patent/JP4308707B2/ja not_active Expired - Fee Related
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JP2005316088A (ja) | 2005-11-10 |
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