JP4283840B2 - Iii族窒化物半導体の製造方法 - Google Patents
Iii族窒化物半導体の製造方法 Download PDFInfo
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- JP4283840B2 JP4283840B2 JP2006289055A JP2006289055A JP4283840B2 JP 4283840 B2 JP4283840 B2 JP 4283840B2 JP 2006289055 A JP2006289055 A JP 2006289055A JP 2006289055 A JP2006289055 A JP 2006289055A JP 4283840 B2 JP4283840 B2 JP 4283840B2
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- layer
- group iii
- nitride semiconductor
- iii nitride
- etch
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/02433—Crystal orientation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/0242—Crystalline insulating materials
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02636—Selective deposition, e.g. simultaneous growth of mono- and non-monocrystalline semiconductor materials
- H01L21/02639—Preparation of substrate for selective deposition
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02636—Selective deposition, e.g. simultaneous growth of mono- and non-monocrystalline semiconductor materials
- H01L21/02647—Lateral overgrowth
- H01L21/0265—Pendeoepitaxy
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Weting (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Led Devices (AREA)
Description
2、5:GaN層
3、6:マイクロパイプ
4:エッチピット
Claims (6)
- III 族窒化物半導体からなる第1層の上面をTMAH水溶液によりウェットエッチングしてエッチピットを形成する工程と、
前記第1層の上面にIII 族窒化物半導体からなる第2層を、前記エッチピットの上部を覆うように形成する工程と、
を有することを特徴とするIII 族窒化物半導体の製造方法。 - 前記第1層はC面を主面とすることを特徴とする請求項1に記載のIII 族窒化物半導体の製造方法。
- 前記第1層のIII 族窒化物半導体と前記第2層のIII 族窒化物半導体の組成が同一であることを特徴とする請求項1または請求項2に記載のIII 族窒化物半導体の製造方法。
- 前記第2層は、ELO法により形成することを特徴とする請求項1ないし請求項3のいずれか1項に記載のIII 族窒化物半導体の製造方法。
- 前記エッチピットの直径は、1μm以上であることを特徴とする請求項1ないし請求項4のいずれか1項に記載のIII 族窒化物半導体の製造方法。
- 前記第2層はエッチピットの全部または一部を埋めるように形成されていて、
前記第2層を形成する工程の後、前記第1層表面より上の第2層の領域を除去する工程を有することを特徴とする請求項1ないし請求項5のいずれか1項に記載のIII 族窒化物半導体の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006289055A JP4283840B2 (ja) | 2006-10-24 | 2006-10-24 | Iii族窒化物半導体の製造方法 |
US11/976,450 US7696071B2 (en) | 2006-10-24 | 2007-10-24 | Group III nitride based semiconductor and production method therefor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006289055A JP4283840B2 (ja) | 2006-10-24 | 2006-10-24 | Iii族窒化物半導体の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008108843A JP2008108843A (ja) | 2008-05-08 |
JP4283840B2 true JP4283840B2 (ja) | 2009-06-24 |
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Application Number | Title | Priority Date | Filing Date |
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JP2006289055A Active JP4283840B2 (ja) | 2006-10-24 | 2006-10-24 | Iii族窒化物半導体の製造方法 |
Country Status (2)
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US (1) | US7696071B2 (ja) |
JP (1) | JP4283840B2 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008108844A (ja) * | 2006-10-24 | 2008-05-08 | Toyota Central R&D Labs Inc | トレンチ構造またはメサ構造を有するiii族窒化物半導体装置およびその製造方法 |
JP6301259B2 (ja) | 2011-11-21 | 2018-03-28 | サン‐ゴバン、クリストー、エ、デテクトゥールSaint−Gobain Cristaux & Detecteurs | 半導体基板および形成方法 |
JP2013214686A (ja) * | 2012-04-04 | 2013-10-17 | Furukawa Co Ltd | Iii族窒化物半導体層およびiii族窒化物半導体層の製造方法 |
FR3010228B1 (fr) * | 2013-08-30 | 2016-12-30 | St Microelectronics Tours Sas | Procede de traitement d'une couche de nitrure de gallium comportant des dislocations |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3216118B2 (ja) | 1997-03-11 | 2001-10-09 | 日亜化学工業株式会社 | 窒化物半導体素子及びその製造方法 |
WO1999067815A1 (en) * | 1998-06-23 | 1999-12-29 | Trustees Of Boston University | Crystallographic wet chemical etching of iii-nitride material |
US6380569B1 (en) | 1999-08-10 | 2002-04-30 | Rockwell Science Center, Llc | High power unipolar FET switch |
JP3583375B2 (ja) | 2001-03-02 | 2004-11-04 | 三菱電線工業株式会社 | GaN系半導体基材およびその製造方法 |
JP4631214B2 (ja) | 2001-06-05 | 2011-02-16 | ソニー株式会社 | 窒化物半導体膜の製造方法 |
US7303630B2 (en) * | 2003-11-05 | 2007-12-04 | Sumitomo Electric Industries, Ltd. | Method of growing GaN crystal, method of producing single crystal GaN substrate, and single crystal GaN substrate |
JP4645034B2 (ja) | 2003-02-06 | 2011-03-09 | 株式会社豊田中央研究所 | Iii族窒化物半導体を有する半導体素子 |
EP1492209B1 (en) * | 2003-06-27 | 2008-01-09 | Nichia Corporation | Nitride semiconductor laser device having current blocking layer and method of manufacturing the same |
JP4534444B2 (ja) | 2003-07-10 | 2010-09-01 | 日亜化学工業株式会社 | 窒化物半導体レーザ及びその製造方法 |
US7459380B2 (en) * | 2006-05-05 | 2008-12-02 | Applied Materials, Inc. | Dislocation-specific dielectric mask deposition and lateral epitaxial overgrowth to reduce dislocation density of nitride films |
JP2008108844A (ja) | 2006-10-24 | 2008-05-08 | Toyota Central R&D Labs Inc | トレンチ構造またはメサ構造を有するiii族窒化物半導体装置およびその製造方法 |
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2006
- 2006-10-24 JP JP2006289055A patent/JP4283840B2/ja active Active
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2007
- 2007-10-24 US US11/976,450 patent/US7696071B2/en active Active
Also Published As
Publication number | Publication date |
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US20080105903A1 (en) | 2008-05-08 |
JP2008108843A (ja) | 2008-05-08 |
US7696071B2 (en) | 2010-04-13 |
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