JP4265912B2 - 薄膜ppb酸素センサ - Google Patents
薄膜ppb酸素センサ Download PDFInfo
- Publication number
- JP4265912B2 JP4265912B2 JP2002544645A JP2002544645A JP4265912B2 JP 4265912 B2 JP4265912 B2 JP 4265912B2 JP 2002544645 A JP2002544645 A JP 2002544645A JP 2002544645 A JP2002544645 A JP 2002544645A JP 4265912 B2 JP4265912 B2 JP 4265912B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- oxygen sensor
- oxygen
- platinum
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4075—Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/28—Electrolytic cell components
- G01N27/30—Electrodes, e.g. test electrodes; Half-cells
- G01N27/304—Gas permeable electrodes
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Description
2 第1電極
3 第2電極
4 主表面
4a ギャップ
10 酸素センサ
g ガード電極
106、107 ボンドパッド
110 センサチップ
120 ヒータチップ
Claims (11)
- 単一の主表面を有する結晶体と、
前記主表面上に延びる第1電極と、
前記主表面上に延びる第2電極と、
を備え、
前記第1及び第2電極が、実質的に前記主表面において前記結晶体を通る酸素イオン伝導領域を、該第1及び第2電極間に形成するように相互配置されており、
前記第1電極及び前記第2電極の少なくとも1つが、鉛により被毒された白金電極であって前記主表面から第1の白金層、鉛層、第2の白金層からなる構成を有する白金電極である
ことを特徴とする酸素センサ。 - 前記第1電極及び前記第2電極が多孔性であることを特徴とする、請求項1に記載の酸素センサ。
- 熱接触状態にあるヒータを更に備えることを特徴とする、請求項1に記載の酸素センサ。
- 前記ヒータがチップを備え、該チップが、該チップを加熱するための加熱要素と、チップ温度を制御するフィードバック信号をもたらすための抵抗温度要素とを有することを特徴とする、請求項3に記載の酸素センサ。
- 前記ヒータに固着されており、摂氏250度から400度の間の一定温度を維持するように作動可能であることを特徴とする、請求項3に記載の酸素センサ。
- 摂氏330度から350度の一定温度を維持するように作動可能であることを特徴とする、請求項5に記載の酸素センサ。
- 前記結晶体が、単結晶ジルコニアのシートを含むことを特徴とする、請求項1に記載の酸素センサ。
- 前記単結晶ジルコニアが、イットリウム安定化ジルコニアであることを特徴とする、請求項7に記載の酸素センサ。
- 酸素濃度を測定するための方法であって、
単一の主表面を有する結晶体を準備する段階と、
前記主表面上に延びる第1電極を設ける段階と、
前記結晶体を通りかつ前記主表面にほぼ平行な電流経路に沿って、前記第1電極との間に酸素イオン伝導領域を形成するように、該第1電極に対して相互配置された第2電極を設ける段階と、
を含み、
前記第1電極及び前記第2電極の少なくとも1つを、鉛により被毒された白金電極であって前記主表面から第1の白金層、鉛層、第2の白金層からなる構成を有する白金電極とする
ことを特徴とする方法。 - 結晶質酸化物の薄膜と、
前記薄膜の単一の表面上に配設され、該表面における前記薄膜内に電極制限されたイオン電流を形成する第1及び第2多孔性電極と、
を備え、
前記第1電極及び前記第2電極の少なくとも1つが、鉛により被毒された白金電極であって前記主表面から第1の白金層、鉛層、第2の白金層からなる構成を有する白金電極であり、
前記電極に電位を印加することにより、前記表面における酸素分圧を表すイオン電流を発生させるようにする、
ことを特徴とする酸素センサ。 - 前記第1の白金層、鉛層および第2の白金層は、等しい厚さを有することを特徴とする請求項1又は10に記載の酸素センサ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/721,376 US6557393B1 (en) | 2000-11-22 | 2000-11-22 | Thin film ppb oxygen sensor |
PCT/US2001/050187 WO2002042756A2 (en) | 2000-11-22 | 2001-11-07 | Thin film ppb oxygen sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005500509A JP2005500509A (ja) | 2005-01-06 |
JP4265912B2 true JP4265912B2 (ja) | 2009-05-20 |
Family
ID=24897723
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002544645A Expired - Fee Related JP4265912B2 (ja) | 2000-11-22 | 2001-11-07 | 薄膜ppb酸素センサ |
Country Status (4)
Country | Link |
---|---|
US (1) | US6557393B1 (ja) |
EP (1) | EP1340067B1 (ja) |
JP (1) | JP4265912B2 (ja) |
WO (1) | WO2002042756A2 (ja) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004009390A2 (en) * | 2002-07-19 | 2004-01-29 | Board Of Regents, The University Of Texas System | Time-resolved exhaust emissions sensor |
US8658013B2 (en) * | 2005-12-01 | 2014-02-25 | Delphi Technologies, Inc. | Sensor and sensing method |
WO2007121032A2 (en) * | 2006-03-23 | 2007-10-25 | The Research Foundation Of State University Of New York | Optical methods and systems for detecting a constituent in a gas containing oxygen in harsh environments |
DE102006062053A1 (de) * | 2006-12-29 | 2008-07-03 | Robert Bosch Gmbh | Verfahren zur Herstellung eines Sensorelements für Gasgemische |
KR20100035682A (ko) * | 2007-04-27 | 2010-04-06 | 세라마테크, 인코오포레이티드 | 입자상 물질 센서 |
US20090056416A1 (en) * | 2007-08-30 | 2009-03-05 | Nair Balakrishnan G | Ceramic Particulate Matter Sensor With Low Electrical Leakage |
JP5339754B2 (ja) * | 2008-03-19 | 2013-11-13 | 新コスモス電機株式会社 | 酸素ガス濃度測定方法 |
US7998417B2 (en) * | 2008-08-22 | 2011-08-16 | Board Of Regents, University Of Texas System | Particulate matter sensor with a heater |
US7891232B2 (en) * | 2008-11-21 | 2011-02-22 | Board Of Regents, The University Of Texas System | Rigid particulate matter sensor |
US8161796B2 (en) * | 2009-04-16 | 2012-04-24 | Emisense Technologies Llc | Particulate matter sensor with an insulating air gap |
WO2011153441A2 (en) * | 2010-06-04 | 2011-12-08 | Board Of Regents Of The University Of Texas System | Highly epitaxial thin films for high temperature/highly sensitive chemical sensors for critical and reducing environment |
US8461602B2 (en) | 2010-08-27 | 2013-06-11 | Quarkstar Llc | Solid state light sheet using thin LEDs for general illumination |
US8198109B2 (en) * | 2010-08-27 | 2012-06-12 | Quarkstar Llc | Manufacturing methods for solid state light sheet or strip with LEDs connected in series for general illumination |
US8210716B2 (en) * | 2010-08-27 | 2012-07-03 | Quarkstar Llc | Solid state bidirectional light sheet for general illumination |
US8338199B2 (en) * | 2010-08-27 | 2012-12-25 | Quarkstar Llc | Solid state light sheet for general illumination |
US8192051B2 (en) * | 2010-11-01 | 2012-06-05 | Quarkstar Llc | Bidirectional LED light sheet |
US8410726B2 (en) | 2011-02-22 | 2013-04-02 | Quarkstar Llc | Solid state lamp using modular light emitting elements |
US8314566B2 (en) | 2011-02-22 | 2012-11-20 | Quarkstar Llc | Solid state lamp using light emitting strips |
DE102014217402A1 (de) * | 2014-09-01 | 2016-03-03 | Robert Bosch Gmbh | Verfahren und Vorrichtung zur Diagnose der Funktion eines Abgassensors |
FR3035220A1 (fr) * | 2015-04-20 | 2016-10-21 | Commissariat Energie Atomique | " dispositif electronique de mesure d'au moins une caracteristique electrique d'un objet " |
US11480542B2 (en) | 2019-11-26 | 2022-10-25 | Delphi Technologies Ip Limited | Particulate matter sensor and electrode pattern thereof |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5334077B2 (ja) * | 1973-08-29 | 1978-09-19 | ||
JPS5739341A (en) | 1980-08-22 | 1982-03-04 | Toyota Motor Corp | Oxygen sensor |
JPS57137848A (en) | 1981-02-19 | 1982-08-25 | Nissan Motor Co Ltd | Oxygen concentration measuring element |
JPS60236059A (ja) * | 1984-05-09 | 1985-11-22 | Hitachi Chem Co Ltd | 燃焼安全装置用センサ |
DE3578216D1 (de) | 1985-10-01 | 1990-07-19 | Honda Motor Co Ltd | Verfahren und vorrichtung fuer die bestimmung von sauerstoff in gasen. |
JPS62198748A (ja) * | 1986-02-26 | 1987-09-02 | Sharp Corp | 酸素センサ |
JPH087178B2 (ja) | 1988-10-04 | 1996-01-29 | 日本碍子株式会社 | 酸素センサ |
JP2946697B2 (ja) | 1990-09-06 | 1999-09-06 | 東陶機器株式会社 | 酸素ガスセンサ |
JP2815125B2 (ja) * | 1991-07-31 | 1998-10-27 | 新コスモス電機株式会社 | 接触燃焼式ガス検知素子 |
US5344549A (en) * | 1991-10-11 | 1994-09-06 | The United States Of America As Represented By The United States Department Of Energy | Oxygen partial pressure sensor |
RU2022264C1 (ru) | 1992-03-16 | 1994-10-30 | Институт высокотемпературной электрохимии Уральского отделения РАН | Материал для электродов электрохимических датчиков кислорода |
RU2053506C1 (ru) | 1993-06-10 | 1996-01-27 | Институт химической физики РАН в п.Черноголовка | Твердоэлектролитный датчик для анализа газов |
SE512866C2 (sv) * | 1995-02-21 | 2000-05-29 | Volvo Ab | Anordning för analys av avgaser |
JP3796333B2 (ja) | 1996-12-20 | 2006-07-12 | 日本碍子株式会社 | ガスセンサ |
JP3648063B2 (ja) * | 1997-09-22 | 2005-05-18 | 日本特殊陶業株式会社 | ガスセンサとそれを用いたガスセンサシステム、及びガスセンサの製造方法 |
JP3534612B2 (ja) | 1998-05-18 | 2004-06-07 | 日本特殊陶業株式会社 | 平面型限界電流式センサ |
-
2000
- 2000-11-22 US US09/721,376 patent/US6557393B1/en not_active Expired - Lifetime
-
2001
- 2001-11-07 WO PCT/US2001/050187 patent/WO2002042756A2/en active Application Filing
- 2001-11-07 JP JP2002544645A patent/JP4265912B2/ja not_active Expired - Fee Related
- 2001-11-07 EP EP01985129A patent/EP1340067B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2005500509A (ja) | 2005-01-06 |
WO2002042756A3 (en) | 2003-02-27 |
EP1340067A2 (en) | 2003-09-03 |
WO2002042756A2 (en) | 2002-05-30 |
EP1340067B1 (en) | 2011-08-31 |
US6557393B1 (en) | 2003-05-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4265912B2 (ja) | 薄膜ppb酸素センサ | |
US5783154A (en) | Sensor for reducing or oxidizing gases | |
BRPI0817851B1 (pt) | Sensor de gás e método de detecção de um ou mais gases | |
KR101104306B1 (ko) | 온도 및 다중 가스 감응 센서 어레이 및 이의 제조방법 | |
US4797194A (en) | Electrochemical element | |
KR20000049146A (ko) | 센서 요소 | |
US20180106745A1 (en) | Gas sensor | |
US11987891B2 (en) | Sensor in an internet-of-things | |
EP0227257B1 (en) | Electrochemical device | |
JP2001153835A (ja) | ガスセンサ素子の出力調整方法 | |
JP5359985B2 (ja) | ガスセンサ | |
JP4913866B2 (ja) | 感応センサ及びその製造方法 | |
JP5672339B2 (ja) | ガスセンサ | |
KR101992022B1 (ko) | 반도체식 가스센서 | |
KR100531376B1 (ko) | 이산화탄소 가스 센서 및 그 제조방법 | |
US8024959B2 (en) | Gas sensor and gas detection method | |
US4790924A (en) | Method of fabrication of air/fuel sensors based on electrochemical pumping and sensors made thereby | |
RU2206082C1 (ru) | Полупроводниковый металлооксидный датчик газов | |
KR100329807B1 (ko) | 반도체식 가스 센서의 전극 구조 | |
JPH0735726A (ja) | 気体成分検出素子 | |
KR20240093597A (ko) | 가스 센서 및 가스 센서의 제조 방법 | |
JPH11344457A (ja) | 臭いセンサ | |
JPH11326269A (ja) | 限界電流式酸素センサ | |
JPH0518921A (ja) | 酸素センサの製造方法 | |
CN116519748A (zh) | 感测结构 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20041108 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20071113 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20080212 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20080219 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080513 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080610 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080731 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080909 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20081208 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20090113 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20090212 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120227 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130227 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130227 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140227 Year of fee payment: 5 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |