JP4260180B2 - 三次元形状測定装置及び三次元形状測定装置用プローブ - Google Patents

三次元形状測定装置及び三次元形状測定装置用プローブ Download PDF

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Publication number
JP4260180B2
JP4260180B2 JP2006298743A JP2006298743A JP4260180B2 JP 4260180 B2 JP4260180 B2 JP 4260180B2 JP 2006298743 A JP2006298743 A JP 2006298743A JP 2006298743 A JP2006298743 A JP 2006298743A JP 4260180 B2 JP4260180 B2 JP 4260180B2
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Japan
Prior art keywords
measurement
coordinate
mirror
probe
unit
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JP2006298743A
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English (en)
Japanese (ja)
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JP2008116279A (ja
Inventor
恵一 吉住
圭司 久保
博之 望月
隆憲 舟橋
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Panasonic Corp
Panasonic Holdings Corp
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Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2006298743A priority Critical patent/JP4260180B2/ja
Priority to TW096134863A priority patent/TWI345047B/zh
Priority to KR1020070098286A priority patent/KR100921847B1/ko
Priority to CN2009101755031A priority patent/CN101660900B/zh
Priority to CN2007101624178A priority patent/CN101173854B/zh
Publication of JP2008116279A publication Critical patent/JP2008116279A/ja
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Publication of JP4260180B2 publication Critical patent/JP4260180B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2006298743A 2006-11-02 2006-11-02 三次元形状測定装置及び三次元形状測定装置用プローブ Active JP4260180B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2006298743A JP4260180B2 (ja) 2006-11-02 2006-11-02 三次元形状測定装置及び三次元形状測定装置用プローブ
TW096134863A TWI345047B (en) 2006-11-02 2007-09-19 Three dimensional shape measuring apparatus
KR1020070098286A KR100921847B1 (ko) 2006-11-02 2007-09-28 3차원 형상 측정 장치
CN2009101755031A CN101660900B (zh) 2006-11-02 2007-09-29 三维形状测定装置用测定探头
CN2007101624178A CN101173854B (zh) 2006-11-02 2007-09-29 三维形状测定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006298743A JP4260180B2 (ja) 2006-11-02 2006-11-02 三次元形状測定装置及び三次元形状測定装置用プローブ

Publications (2)

Publication Number Publication Date
JP2008116279A JP2008116279A (ja) 2008-05-22
JP4260180B2 true JP4260180B2 (ja) 2009-04-30

Family

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Family Applications (1)

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JP2006298743A Active JP4260180B2 (ja) 2006-11-02 2006-11-02 三次元形状測定装置及び三次元形状測定装置用プローブ

Country Status (4)

Country Link
JP (1) JP4260180B2 (zh)
KR (1) KR100921847B1 (zh)
CN (2) CN101173854B (zh)
TW (1) TWI345047B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019004376A1 (de) 2018-06-22 2019-12-24 Mitutoyo Corporation Messapparat und Messverfahren

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5135183B2 (ja) * 2008-11-27 2013-01-30 パナソニック株式会社 三次元形状測定装置
KR101330468B1 (ko) * 2010-09-09 2013-11-15 파나소닉 주식회사 삼차원 형상 측정장치
CN102692457B (zh) * 2011-03-24 2014-10-08 常州展华机器人有限公司 曲面三维超声探伤用四-七轴联动装置
CN102207489B (zh) * 2011-03-29 2013-07-24 常州信雷迪特电子系统工程有限公司 组合式三-六轴三维探伤装置
CN102322812A (zh) * 2011-08-30 2012-01-18 合肥工业大学 小阿贝误差三维测量系统
JP5985311B2 (ja) * 2012-08-30 2016-09-06 Ntn株式会社 軸受トラック溝測定装置および軸受トラック溝測定方法
CN103479387B (zh) * 2013-09-22 2016-08-10 江苏美伦影像系统有限公司 可移动回转式c型扫描系统
WO2015151830A1 (ja) * 2014-03-31 2015-10-08 コニカミノルタ株式会社 光学素子の測定用ジグ、偏芯測定装置及び偏芯測定方法
JP6427982B2 (ja) * 2014-06-20 2018-11-28 コニカミノルタ株式会社 測定装置
WO2016121122A1 (ja) * 2015-01-30 2016-08-04 株式会社牧野フライス製作所 レーザ加工機およびレーザ加工方法
US9546860B2 (en) * 2015-04-18 2017-01-17 Mediatek Singapore Pte. Ltd. Method and system for contactless dimensional measurement of articles
JP6570393B2 (ja) * 2015-09-25 2019-09-04 株式会社ミツトヨ 形状測定装置の制御方法
EP3392610B1 (en) 2017-04-19 2022-02-23 Renishaw PLC Bearing mount
JP6953233B2 (ja) * 2017-08-24 2021-10-27 株式会社トプコン ３次元測量装置
CN107621234B (zh) * 2017-10-27 2023-12-01 无锡万耐特自动化设备股份公司 高精度超微测力零件表面形状跟踪装置
DE102018111368B3 (de) 2018-05-14 2019-04-25 Carl Mahr Holding Gmbh Werkstückhalter, Messvorrichtung und Messverfahren zum Messen eines Werkstücks
CN109855535B (zh) * 2019-02-20 2024-03-08 朝阳浪马轮胎有限责任公司 一种成型胎胚尺寸检测装置和检测方法
JP7373970B2 (ja) * 2019-11-06 2023-11-06 オークマ株式会社 工作機械の誤差補正方法及び工作機械
CN112964211B (zh) * 2021-01-22 2022-01-04 大连理工大学 一种球壳零件厚度及面形的检测方法及装置
CN113566680B (zh) * 2021-07-26 2023-06-23 巴斯夫杉杉电池材料有限公司 一种旋轮磨磨盘检具
CN115096186B (zh) * 2022-06-27 2024-06-14 东风设备制造有限公司 基于2d视觉与激光测距的板簧类零件的三维位姿计算方法
CN117553685B (zh) * 2024-01-12 2024-03-19 东莞市兆丰精密仪器有限公司 一种全尺寸测量设备

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2151441Y (zh) * 1992-11-16 1993-12-29 天津大学 全息式激光光触针测量头
JPH10170243A (ja) * 1996-12-11 1998-06-26 Matsushita Electric Ind Co Ltd 形状測定装置及び方法
CN1495408A (zh) * 2002-03-08 2004-05-12 奥林巴斯光学工业株式会社 三维坐标测定方法
JP4646520B2 (ja) 2004-01-09 2011-03-09 オリンパス株式会社 ３次元形状測定方法及び装置
CN2769850Y (zh) * 2005-03-07 2006-04-05 合肥工业大学 多功能纳米激光测量头

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019004376A1 (de) 2018-06-22 2019-12-24 Mitutoyo Corporation Messapparat und Messverfahren
US11092422B2 (en) 2018-06-22 2021-08-17 Mitutoyo Corporation Measuring apparatus and measuring method

Also Published As

Publication number Publication date
CN101660900B (zh) 2012-10-17
CN101173854A (zh) 2008-05-07
CN101173854B (zh) 2010-07-21
TW200821539A (en) 2008-05-16
JP2008116279A (ja) 2008-05-22
TWI345047B (en) 2011-07-11
KR20080040563A (ko) 2008-05-08
CN101660900A (zh) 2010-03-03
KR100921847B1 (ko) 2009-10-13

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