JP4243403B2 - 走査型プローブ顕微鏡の走査方法 - Google Patents

走査型プローブ顕微鏡の走査方法 Download PDF

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Publication number
JP4243403B2
JP4243403B2 JP2000006119A JP2000006119A JP4243403B2 JP 4243403 B2 JP4243403 B2 JP 4243403B2 JP 2000006119 A JP2000006119 A JP 2000006119A JP 2000006119 A JP2000006119 A JP 2000006119A JP 4243403 B2 JP4243403 B2 JP 4243403B2
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Japan
Prior art keywords
scanning
probe
sample
data
physical quantity
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Expired - Fee Related
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JP2000006119A
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English (en)
Japanese (ja)
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JP2001194284A (ja
JP2001194284A5 (enExample
Inventor
和俊 渡辺
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Hitachi High Tech Science Corp
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SII NanoTechnology Inc
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Priority to JP2000006119A priority Critical patent/JP4243403B2/ja
Priority to US09/754,651 priority patent/US6571612B2/en
Publication of JP2001194284A publication Critical patent/JP2001194284A/ja
Publication of JP2001194284A5 publication Critical patent/JP2001194284A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/85—Scanning probe control process
    • Y10S977/851—Particular movement or positioning of scanning tip

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2000006119A 2000-01-11 2000-01-11 走査型プローブ顕微鏡の走査方法 Expired - Fee Related JP4243403B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2000006119A JP4243403B2 (ja) 2000-01-11 2000-01-11 走査型プローブ顕微鏡の走査方法
US09/754,651 US6571612B2 (en) 2000-01-11 2001-01-04 Probe scanning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000006119A JP4243403B2 (ja) 2000-01-11 2000-01-11 走査型プローブ顕微鏡の走査方法

Publications (3)

Publication Number Publication Date
JP2001194284A JP2001194284A (ja) 2001-07-19
JP2001194284A5 JP2001194284A5 (enExample) 2005-06-09
JP4243403B2 true JP4243403B2 (ja) 2009-03-25

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Family Applications (1)

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JP2000006119A Expired - Fee Related JP4243403B2 (ja) 2000-01-11 2000-01-11 走査型プローブ顕微鏡の走査方法

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US (1) US6571612B2 (enExample)
JP (1) JP4243403B2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7473887B2 (en) * 2002-07-04 2009-01-06 University Of Bristol Of Senate House Resonant scanning probe microscope
JP4328357B2 (ja) * 2004-11-17 2009-09-09 パイオニア株式会社 記録媒体、記録装置及び方法、再生装置及び方法、並びにコンピュータプログラム
JP4811568B2 (ja) * 2005-06-17 2011-11-09 大日本印刷株式会社 パターン寸法計測方法およびパターン寸法計測装置
JP2009074987A (ja) * 2007-09-21 2009-04-09 Sii Nanotechnology Inc 走査型プローブ顕微鏡及び表面情報測定方法
JP2015040785A (ja) * 2013-08-22 2015-03-02 株式会社東芝 走査型プローブ顕微鏡
US10564180B2 (en) 2015-04-14 2020-02-18 Shimadzu Corporation Scanning probe microscope using gradual increases and decreases in relative speed when shifting and reciprocating the scanned probe across a sample
KR101710337B1 (ko) * 2015-06-02 2017-02-28 파크시스템스 주식회사 조정 가능한 스캔 속도를 가지는 측정 장치 및 측정 방법
US10431419B2 (en) * 2016-07-19 2019-10-01 Battelle Memorial Institute Sparse sampling methods and probe systems for analytical instruments
JP6631650B2 (ja) 2018-04-18 2020-01-15 株式会社島津製作所 走査型プローブ顕微鏡
JP7255521B2 (ja) * 2020-02-26 2023-04-11 株式会社島津製作所 走査型プローブ顕微鏡および走査型プローブ顕微鏡における光軸調整方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57123408A (en) * 1981-01-26 1982-07-31 Nissan Motor Co Ltd Supplying method of position data
JPH041948A (ja) * 1990-04-18 1992-01-07 Canon Inc 情報記録装置及び情報再生装置及び情報記録再生装置
US5948972A (en) * 1994-12-22 1999-09-07 Kla-Tencor Corporation Dual stage instrument for scanning a specimen
US5687487A (en) * 1995-09-25 1997-11-18 Dogwood Restorations Flatness tester

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Publication number Publication date
US6571612B2 (en) 2003-06-03
US20010032496A1 (en) 2001-10-25
JP2001194284A (ja) 2001-07-19

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