JP4241870B2 - Light emitting device and manufacturing method thereof - Google Patents

Light emitting device and manufacturing method thereof Download PDF

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JP4241870B2
JP4241870B2 JP2007335793A JP2007335793A JP4241870B2 JP 4241870 B2 JP4241870 B2 JP 4241870B2 JP 2007335793 A JP2007335793 A JP 2007335793A JP 2007335793 A JP2007335793 A JP 2007335793A JP 4241870 B2 JP4241870 B2 JP 4241870B2
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light emitting
light
recess
emitting element
emitting device
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JP2009044116A (en
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拓也 乃一
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Nichia Corp
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Nichia Corp
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Priority to JP2007335793A priority Critical patent/JP4241870B2/en
Priority to US12/167,673 priority patent/US8026533B2/en
Priority to TW97125901A priority patent/TW200921949A/en
Priority to CN 200810135856 priority patent/CN101350346B/en
Priority to EP08160748.3A priority patent/EP2017892B1/en
Priority to KR1020080070027A priority patent/KR100958509B1/en
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Priority to HK09106256.7A priority patent/HK1127161A1/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/48463Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013Alloys
    • H01L2924/0132Binary Alloys
    • H01L2924/01322Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3025Electromagnetic shielding

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Abstract

A light emitting device and manufacturing method thereof, wherein the light emitting device 100 includes a light emitting element 101, a package for arranging the light emitting element 101, and an electrically conductive wire 106 for connecting an electrode disposed on the package and an electrode of the light emitting element. The package includes a support member 108 having a mounting portion to arrange the light emitting element 101 and defining a recess 103 to house a semiconductor element 102 which is different than the light emitting element, and a light transmissive member 107 covering at least the light emitting element 101. The package defines a hollow portion 111 between the light transmissive member 107 covering the opening of the recess 103 and an inner wall defining the recess 103.

Description

本発明は、照明器具、ディスプレイ、携帯電話のバックライト、動画照明補助光源、そ
の他の光源などに用いられる発光装置およびその製造方法に関する。
The present invention relates to a light emitting device used for a lighting fixture, a display, a backlight of a mobile phone, a moving image illumination auxiliary light source, other light sources, and the like, and a method for manufacturing the same.

発光ダイオードのような発光素子を利用した発光装置は、小型で電力効率が良く鮮やかな色の発光をする。また、このような発光素子は、電球などと異なり球切れなどの心配がない。さらに、初期駆動特性が優れ、振動やオン・オフ点灯の繰り返しに強いという特徴を有する。このような優れた特性を有するため、発光ダイオード(LED)、レーザーダイオード(LD)などの発光素子を利用した発光装置は、照明器具、携帯電話のバックライトなどの光源として利用されている。   A light-emitting device using a light-emitting element such as a light-emitting diode is small in size, power-efficient, and emits bright colors. In addition, unlike a light bulb or the like, such a light emitting element does not have to worry about a broken bulb. Furthermore, it has the characteristics that it has excellent initial drive characteristics and is resistant to repeated vibration and on / off lighting. Because of such excellent characteristics, light-emitting devices using light-emitting elements such as light-emitting diodes (LEDs) and laser diodes (LDs) are used as light sources for lighting fixtures and backlights of mobile phones.

このような発光装置において、発光素子を過電圧による破壊から保護するため、発光装置にツェナーダイオードなどの保護素子が搭載されることがある。このような保護素子は、発光素子が搭載された支持基板上に、発光素子に隣接して配置され、その発光素子と電気的に接続されている。   In such a light-emitting device, a protective element such as a Zener diode may be mounted on the light-emitting device in order to protect the light-emitting element from destruction due to overvoltage. Such a protective element is disposed adjacent to the light emitting element on the support substrate on which the light emitting element is mounted, and is electrically connected to the light emitting element.

例えば、下記特許文献1に開示された発光装置は、極性の異なる第1の電極および第2の電極が設けられた絶縁性基板と、第1の電極の上面側に配置されたLEDチップと、第2の電極に配置された保護素子(例えば、ツェナーダイオード)と、LEDチップおよび該LEDチップに接続された導電性ワイヤを被覆する封止樹脂と、を備えている。さらに、LEDチップの一方の電極は第1の電極と、他方の電極は第2の電極と、それぞれワイヤにて接続されている。一方、保護素子は、上面側の電極が第1の電極と導電性ワイヤにて接続され、下面側の電極が導電性接着剤を介して第2の電極に接続されている。   For example, a light emitting device disclosed in Patent Document 1 below includes an insulating substrate provided with first and second electrodes having different polarities, an LED chip disposed on the upper surface side of the first electrode, The protective element (for example, Zener diode) arrange | positioned at the 2nd electrode and the sealing resin which coat | covers the LED chip and the electroconductive wire connected to this LED chip are provided. Furthermore, one electrode of the LED chip is connected to the first electrode, and the other electrode is connected to the second electrode by wires. On the other hand, the upper surface side electrode of the protective element is connected to the first electrode by a conductive wire, and the lower surface side electrode is connected to the second electrode via a conductive adhesive.

このような発光装置において、発光素子からの光が保護素子に吸収されたり、保護素子に遮光されたりすることにより、発光装置全体として光取り出し効率が低下することがある。そこで、保護素子の高さが発光素子の高さより低くなるように保護素子の下に凹部を形成して、その凹部内に保護素子を配置すれば、保護素子による光の遮断を少なくすることができる。あるいは、下記特許文献2に開示された発光装置のように、発光素子と保護素子との間に発光素子を被覆する透光性部材とは別の反射部材を配置して発光素子からの光を発光装置の外へ反射させることにより、発光素子から発光装置の外へ取り出される光の経路を保護素子が妨げることが無くなる。なお、複数の半導体素子を支持基板上に実装するときの作業し易さ等を考慮して、保護素子を収納するための凹部は、発光素子が実装される面と同じ面に開口部を有するように支持基板に設けられていることが好ましい。   In such a light-emitting device, the light extraction efficiency of the light-emitting device as a whole may be reduced when light from the light-emitting element is absorbed by the protective element or is blocked by the protective element. Therefore, if a concave portion is formed under the protective element so that the height of the protective element is lower than the height of the light emitting element, and the protective element is disposed in the concave portion, light blocking by the protective element may be reduced. it can. Alternatively, as in the light-emitting device disclosed in Patent Document 2 below, a reflective member different from the translucent member that covers the light-emitting element is disposed between the light-emitting element and the protective element, so that light from the light-emitting element is emitted. By reflecting outside the light emitting device, the protective element does not interfere with the path of light extracted from the light emitting element to the outside of the light emitting device. In consideration of ease of work when mounting a plurality of semiconductor elements on a support substrate, the recess for storing the protective element has an opening on the same surface as the surface on which the light emitting element is mounted. It is preferable that it is provided on the support substrate.

特開平11−54804号公報。Japanese Patent Application Laid-Open No. 11-54804.

特開2007−150229号公報。JP2007-150229A.

しかしながら、発光素子の搭載面よりも下に形成した凹部内に保護素子を載置すると、上方に載置された発光素子の端面方向から発光する光の一部が凹部内に閉じこめられる。これにより、発光装置の外部への光の取り出し効率が低下してしまう。さらに、保護素子のボディカラーが発光素子からの光を吸収する場合は、閉じこめられた光が保護素子により吸収されてしまうため、発光装置の出力が著しく低下する。また、光反射性の充填物にて保護素子を収納する凹部を埋設することにより凹部内への光の侵入を阻止しようとすれば、手間や材料費用がかかるため現実的ではない。   However, when the protective element is placed in the recess formed below the mounting surface of the light emitting element, part of the light emitted from the end face direction of the light emitting element placed above is confined in the recess. Thereby, the light extraction efficiency to the outside of the light emitting device is reduced. Further, when the body color of the protective element absorbs light from the light emitting element, the light confined by the protective element is absorbed by the protective element, so that the output of the light emitting device is significantly reduced. Further, it is not practical to attempt to prevent the intrusion of light into the recess by embedding the recess for housing the protective element with a light-reflective filling, because it takes time and material costs.

そこで、本発明は、優れた信頼性と光学特性とを有する発光装置を提供することを目的とし、また、そのような発光装置を低廉に製造する方法を提供することを目的とする。   Accordingly, an object of the present invention is to provide a light emitting device having excellent reliability and optical characteristics, and to provide a method for manufacturing such a light emitting device at low cost.

以上の目的を達成するために本発明に係る発光装置は、発光素子と、その発光素子を配置するパッケージと、そのパッケージに設けられた電極と上記発光素子の電極とを接続する導電性ワイヤと、を備えており、上記パッケージが上記発光素子を配置する搭載部および上記発光素子とは別の半導体素子を収納する凹部を有する支持体と、その支持体に配置された透光性部材と、を備えている発光装置であって、上記透光性部材は、少なくとも上記発光素子と上記凹部の開口部を被覆しており、上記凹部に収納された半導体素子の側面と上記凹部の内壁面との間に、空洞が設けられていることを特徴とする。上記空洞は、さらに、上記開口部を覆う透光性部材の底面と、上記凹部に収納された半導体素子の上面との間に設けられていることが好ましい。 In order to achieve the above object, a light emitting device according to the present invention includes a light emitting element, a package in which the light emitting element is disposed, an electrode provided in the package, and a conductive wire that connects the electrode of the light emitting element. And a support having a mounting portion in which the package arranges the light emitting element and a recess for housing a semiconductor element different from the light emitting element, and a translucent member disposed on the support, The translucent member covers at least the light emitting element and the opening of the recess, and includes a side surface of the semiconductor element housed in the recess and an inner wall surface of the recess. Between the two, a cavity is provided . The cavity further includes a bottom surface of the light transmissive member covering the opening, it is preferably provided between the upper surface of the semiconductor element housed in the recess.

上記透光性部材は、上記凹部の開口部から上記凹部の底面に向かって凸状の突出部を有していることが好ましい。   It is preferable that the translucent member has a protruding portion that is convex from the opening of the recess toward the bottom surface of the recess.

上記凹部は、上記発光素子の複数の搭載部に挟まれた領域に設けられており、上記支持体は、上記搭載部の略直下にそれぞれ外部接続電極を備えていることが好ましい。   The recess is provided in a region sandwiched between the plurality of mounting portions of the light emitting element, and the support preferably includes external connection electrodes substantially directly below the mounting portion.

上記凹部の開口部を平面視した外形と、上記凹部に収納された半導体素子を平面視した外形との相似比は、1.0から2.5であることが好ましい。   The similarity ratio between the outer shape of the opening of the recess in plan view and the outer shape of the semiconductor element accommodated in the recess in plan view is preferably 1.0 to 2.5.

以上の目的を達成するために本発明に係る発光装置の製造方法は、発光素子と、その発光素子を配置するパッケージと、そのパッケージに設けられた電極と上記発光素子の電極とを接続する導電性ワイヤと、を備えており、上記パッケージが上記発光素子を少なくとも被覆する透光性部材と、上記発光素子が配置される搭載部および上記発光素子とは別の半導体素子を収納する凹部を有する支持体と、を備えている発光装置の製造方法であって、上記発光素子が搭載される上面に開口する凹部を有する支持体を形成する第一の工程と、上記半導体素子の上面を上記発光素子の搭載部の上面よりも下に配置して、上記凹部に上記半導体素子を収納する第二の工程と、上記発光素子および上記導電性ワイヤを配置する第三の工程と、上記凹部内に空洞を形成しながら、少なくとも上記発光素子および上記凹部の開口部を覆う透光性部材を上記支持体に配置する第四の工程と、を有することを特徴とする。   In order to achieve the above object, a method for manufacturing a light-emitting device according to the present invention includes a light-emitting element, a package in which the light-emitting element is disposed, an electrode provided in the package, and a conductive material that connects the electrode of the light-emitting element. A translucent member that covers at least the light emitting element, a mounting portion in which the light emitting element is disposed, and a recess that houses a semiconductor element different from the light emitting element. A light emitting device comprising: a support; and a first step of forming a support having a recess opening on an upper surface on which the light emitting element is mounted, and the upper surface of the semiconductor element emits light on the upper surface. A second step of disposing the semiconductor element in the recess, a third step of disposing the light emitting element and the conductive wire, and a lower step of the element mounting portion. While forming a sinus, and having a fourth step of the light-transmissive member covering at least the light emitting element and the opening of the recess is arranged in the support body.

上記第四の工程は、上記透光性部材の材料を上記発光素子の搭載面に対して略平行な方向に連続的に供給する工程を含むことが好ましい。   Preferably, the fourth step includes a step of continuously supplying the material of the translucent member in a direction substantially parallel to the mounting surface of the light emitting element.

上記透光性部材の材料の粘度は、上記半導体素子の大きさに対する上記凹部の大きさに基づいて、上記第四の工程にて上記凹部に気泡が残存するように調整されていることが好ましい。   The viscosity of the material of the translucent member is preferably adjusted based on the size of the recess relative to the size of the semiconductor element so that bubbles remain in the recess in the fourth step. .

上記透光性部材の材料は、シリコーン樹脂またはエポキシ樹脂から選択された少なくとも一種以上の樹脂を含み、その樹脂に粒子状蛍光体が含有されたものであることが好ましい。   The material of the translucent member preferably contains at least one resin selected from silicone resins or epoxy resins, and the resin contains a particulate phosphor.

上記透光性部材の材料の粘度は、200Pa・s以上500Pa・s以下であることが好ましい。   The viscosity of the material of the translucent member is preferably 200 Pa · s or more and 500 Pa · s or less.

上記凹部の開口部を平面視した外形と、上記凹部に収納された半導体素子を平面視した外形との相似比は、1.0から2.5であり、上記凹部の深さと、上記凹部に収納された半導体素子の高さとの比は、1.0から2.14であることが好ましい。   The similarity ratio between the outer shape of the opening of the recess in plan view and the outer shape of the semiconductor element housed in the recess in plan view is 1.0 to 2.5, and the depth of the recess and the recess The ratio of the height of the housed semiconductor element is preferably 1.0 to 2.14.

本発明にかかる発光装置は、発光素子の実装面より低い凹部の底面に保護素子を配置し、さらに、保護素子が収納された凹部内に空洞を有する。ここで、発光素子を被覆する透光性部材と空洞との間に屈折率差が生じている。そして、屈折率の異なるそれらの境界面で発光素子から放射された光や、蛍光体からの光が反射されて発光装置の外部へ取り出される。すなわち、本発明は、凹部内に設けられた空洞を利用することにより、先行技術と比較して、発光装置の光取り出し効率を向上させることができる。また、それらの光が凹部にて損失することなく発光装置から取り出されることで、発光装置の配光色度のバラつきも小さくなる。   In the light emitting device according to the present invention, the protection element is disposed on the bottom surface of the recess that is lower than the mounting surface of the light emitting element, and the cavity is further provided in the recess in which the protection element is accommodated. Here, a difference in refractive index is generated between the light-transmitting member that covers the light-emitting element and the cavity. Then, the light emitted from the light emitting element and the light from the phosphor are reflected at the boundary surfaces having different refractive indexes and extracted outside the light emitting device. That is, according to the present invention, the light extraction efficiency of the light emitting device can be improved by using the cavity provided in the recess as compared with the prior art. In addition, since the light is extracted from the light emitting device without being lost in the concave portion, the variation in the light distribution chromaticity of the light emitting device is reduced.

本発明にかかる発光装置は、透光性部材を支持体に配置したことによる空洞を保護素子が収納された凹部内に設けることにより、該凹部内への光の侵入を阻止している。そのため、光反射性の充填物を凹部内に埋設するものや、発光素子と保護素子との間に発光素子を被覆する透光性部材とは別の反射部材を設けるものなどと比較して、本発明は、保護素子を収納する凹部による光損失が少なく、比較的簡単な構成の低廉な発光装置とすることができる。   In the light emitting device according to the present invention, a cavity formed by arranging the translucent member on the support is provided in the concave portion in which the protective element is accommodated, thereby preventing light from entering the concave portion. Therefore, in comparison with what embeds a light-reflective filling in the recess, or provides a reflective member different from the translucent member that covers the light-emitting element between the light-emitting element and the protective element, The present invention can provide an inexpensive light-emitting device with a relatively simple structure with less light loss due to the concave portion that houses the protective element.

また、本発明にかかる発光装置の製造方法は、保護素子を収納する凹部内に光反射性の充填物を埋設するものや発光素子と保護素子との間に反射部材を設けるものと比較して、凹部における光損失が少ない発光装置を比較的簡単かつ低廉に形成することができる。さらに、本発明における発光装置の製造方法は、発光素子を被覆する透光性部材を支持体上にて形成する工程を有することにより、発光素子の実装面より低い底面を有する凹部に気泡を残存させることも同時に行える。そのため、凹部における光損失が少ない発光装置を比較的簡単かつ低廉に製造することができる。   In addition, the method for manufacturing a light emitting device according to the present invention is compared to a method of embedding a light-reflective filler in a recess for housing a protective element or a method of providing a reflective member between a light emitting element and a protective element. A light emitting device with little light loss in the recess can be formed relatively easily and inexpensively. Furthermore, the method for manufacturing a light-emitting device according to the present invention includes a step of forming a light-transmitting member that covers the light-emitting element on a support, whereby bubbles remain in a recess having a bottom surface lower than the mounting surface of the light-emitting element. Can be done at the same time. Therefore, it is possible to manufacture a light emitting device with little light loss in the recesses relatively easily and inexpensively.

本発明を実施するための最良の形態を説明する。ただし、以下に示す形態は、本発明の技術思想を具体化するための発光装置およびその製造方法を例示するものであって、本発明は、発光装置およびその製造方法を以下に限定するものではない。   The best mode for carrying out the present invention will be described. However, the form shown below illustrates the light emitting device and the manufacturing method thereof for embodying the technical idea of the present invention, and the present invention does not limit the light emitting device and the manufacturing method thereof to the following. Absent.

また、本明細書は特許請求の範囲に示される部材を、実施の形態の部材に特定するものでは決してない。実施の形態に記載されている構成部品の寸法、材質、形状、その相対的配置等は、特に特定的な記載がない限りは、本発明の範囲をそれのみに限定する趣旨ではなく、単なる説明例にすぎない。なお、各図面が示す部材の大きさや位置関係等は、説明を明確にするため誇張していることがある。さらに以下の説明において、同一の名称、符号については同一もしくは同質の部材を示しており、詳細な説明を適宜省略する。さらに、本発明を構成する各要素は、複数の要素を同一の部材で構成して一の部材で複数の要素を兼用する態様としてもよいし、逆に一の部材の機能を複数の部材で分担して実現することもできる。   Further, the present specification by no means specifies the members shown in the claims to the members of the embodiments. The dimensions, materials, shapes, relative arrangements, and the like of the components described in the embodiments are not intended to limit the scope of the present invention only to the description unless otherwise specified. It is just an example. Note that the size, positional relationship, and the like of the members shown in each drawing may be exaggerated for clarity of explanation. Further, in the following description, the same name and reference sign indicate the same or the same members, and detailed description will be omitted as appropriate. Furthermore, each element constituting the present invention may be configured such that a plurality of elements are constituted by the same member and the plurality of elements are shared by one member, and conversely, the function of one member is constituted by a plurality of members. It can also be realized by sharing.

発光素子と、その発光素子を配置するパッケージと、そのパッケージに設けられた電極と発光素子の電極とを接続する導電性ワイヤと、を備えており、さらにパッケージが、発光素子を配置する搭載部および発光素子とは別の半導体素子を収納する凹部を有する支持体と、少なくとも発光素子を被覆する透光性部材と、を備えている発光装置について、上記凹部による光の損失を低減させるため、本発明者は、種々の検討を行った。その結果、発光素子とは別の半導体素子を収納する凹部の開口部を、発光素子を被覆する透光性部材の一部で覆い、その凹部に空洞を設けたパッケージとすることにより課題を解決するに至った。本発明は、凹部に空洞を有することにより、凹部の開口部を覆う透光性部材と空洞との間に屈折率差が生じる。そして、屈折率の異なるそれらの境界面を反射面として光が反射され発光装置から出射される。このように、本発明は、凹部において光を損失させることがないので、先行技術と比較して発光装置の光取り出し効率が向上する。   A light emitting element, a package in which the light emitting element is disposed, and a conductive wire that connects an electrode provided in the package and the electrode of the light emitting element, and the package further includes a mounting portion on which the light emitting element is disposed. In order to reduce the loss of light due to the recess, the light-emitting device includes a support having a recess that houses a semiconductor element different from the light-emitting element, and a translucent member that covers at least the light-emitting element. The inventor conducted various studies. As a result, the problem is solved by covering the opening of the recess that houses the semiconductor element different from the light emitting element with a part of the light-transmitting member that covers the light emitting element, and forming a cavity in the recess. It came to do. In the present invention, by having a cavity in the recess, a refractive index difference is generated between the light-transmitting member that covers the opening of the recess and the cavity. Then, light is reflected and emitted from the light emitting device with the boundary surfaces having different refractive indexes as reflection surfaces. As described above, according to the present invention, since light is not lost in the recess, the light extraction efficiency of the light emitting device is improved as compared with the prior art.

さらに、発光装置のパッケージにおける空洞は、凹部の開口部を覆う透光性部材の底面と、凹部に収納された半導体素子の上面との間に設けられていることが好ましい。透光性部材を伝播する光が、凹部内に収納された半導体素子に吸収されることを抑えることができるからである。   Furthermore, the cavity in the package of the light emitting device is preferably provided between the bottom surface of the translucent member that covers the opening of the recess and the top surface of the semiconductor element housed in the recess. This is because light propagating through the translucent member can be prevented from being absorbed by the semiconductor element housed in the recess.

透光性部材は、凹部の開口部において突出部を有しており、その突出部が、凹部の底面に向かって凸状の底面を有していることが好ましい。このような突出部により、光を凹部内に入射させることなく、支持体上面の透光性部材のほうに反射させる効果が高まるからである。また、透光性部材やその突出部の底面と、凹部に収納された半導体素子の上面との間に空洞が設けられていることが好ましい。透光性部材の底面と半導体素子の上面との間に、空洞による間隔を設けることにより、凹部外の光は、半導体素子の方まで届かなくなり、凹部内に収納された半導体素子による損失を受けることがなくなる。   It is preferable that the translucent member has a protrusion at the opening of the recess, and the protrusion has a convex bottom surface toward the bottom surface of the recess. This is because such a protrusion increases the effect of reflecting light toward the translucent member on the upper surface of the support without causing light to enter the recess. Moreover, it is preferable that a cavity is provided between the translucent member or the bottom surface of the protruding portion and the top surface of the semiconductor element housed in the recess. By providing a gap between the bottom surface of the translucent member and the upper surface of the semiconductor element, the light outside the recess does not reach the semiconductor element and is lost by the semiconductor element housed in the recess. Nothing will happen.

凹部の開口部を平面視した外形と、凹部に収納された半導体素子を平面視した外形との相似比は、1.0から2.5であることが好ましい。半導体素子の大きさに対して凹部の開口部の大きさが大きすぎると、凹部内に侵入しようとする光が多くなるからである。また、半導体素子の大きさに対して開口部の大きさが小さすぎると、半導体素子を凹部内に配置する工程の作業性が低下するため、量産性の良い発光装置とすることができないからである。   The similarity ratio between the outer shape of the opening of the recess in plan view and the outer shape of the semiconductor element accommodated in the recess in plan view is preferably 1.0 to 2.5. This is because if the size of the opening of the recess is too large relative to the size of the semiconductor element, more light will enter the recess. In addition, if the size of the opening is too small with respect to the size of the semiconductor element, the workability of the process of arranging the semiconductor element in the recess is reduced, so that a light-emitting device with good mass productivity cannot be obtained. is there.

発光素子と、その発光素子を配置するパッケージと、そのパッケージに設けられた電極と発光素子の電極とを接続する導電性ワイヤと、を備えており、パッケージが発光素子を少なくとも被覆する透光性部材と、発光素子が配置される搭載部および発光素子とは別の半導体素子を収納する凹部を有する支持体と、を備えている発光装置の製造方法について、本発明者は、凹部における光損失が少ない発光装置を比較的簡単かつ低廉に製造するため種々の検討を行った。その結果、本発明にかかる製造方法は、発光素子の搭載面に開口部を有する凹部を支持体に形成する第一の工程と、半導体素子の上面を発光素子の搭載面よりも下に配置して、凹部に半導体素子を収納する第二の工程と、発光素子および導電性ワイヤを配置する第三の工程と、凹部内に空洞を形成しながら、少なくとも発光素子および凹部の開口部を覆う透光性部材を支持体に配置する第四の工程と、を有することを特徴とすることにより、課題を解決するに至った。すなわち、本発明にかかる発光装置の製造方法は、半導体素子を収納する凹部内に光反射性の充填物を埋設する工程を要しないので、凹部における光損失が少ない発光装置を比較的簡単かつ低廉に製造することができる。   A light-emitting element, a package in which the light-emitting element is disposed, and a conductive wire that connects an electrode provided in the package and the electrode of the light-emitting element, and the package at least covers the light-emitting element Regarding a method for manufacturing a light-emitting device including a member, a mounting portion in which the light-emitting element is disposed, and a support having a recess that houses a semiconductor element different from the light-emitting element, the present inventor Various studies were conducted to manufacture a light emitting device with a small amount of light relatively easily and inexpensively. As a result, the manufacturing method according to the present invention includes a first step of forming a recess having an opening on the mounting surface of the light emitting element on the support, and the upper surface of the semiconductor element is disposed below the mounting surface of the light emitting element. A second step of housing the semiconductor element in the recess, a third step of arranging the light emitting element and the conductive wire, and a transparent covering at least the light emitting element and the opening of the recess while forming a cavity in the recess. It has come to solve a subject by having the 4th process of arranging a photonic member on a support. That is, the method for manufacturing a light emitting device according to the present invention does not require a step of embedding a light-reflective filling in the concave portion that accommodates the semiconductor element, so that a light emitting device with little light loss in the concave portion is relatively simple and inexpensive. Can be manufactured.

また、本発明は、支持体への透光性部材の形成と空洞の形成を同じ工程で行うことにより発光装置を製造する工程を簡略化することができる。このような方法によるとき、透光性部材を形成する第四の工程は、透光性部材の材料を発光素子の搭載面に対して略平行な方向に連続的に供給する工程を含む。すなわち、発光素子が配置された搭載面に対して略平行な方向に、流動性のある透光性部材の材料を流し込み、その材料を型で成型して硬化させることにより透光性部材を形成する。なお、「略平行」とは、発光素子の搭載面に平行な面に対して±10°程度の範囲を許容範囲として含むものとする。   Moreover, this invention can simplify the process of manufacturing a light-emitting device by performing the formation of the translucent member to a support body, and formation of a cavity in the same process. According to such a method, the fourth step of forming the translucent member includes a step of continuously supplying the material of the translucent member in a direction substantially parallel to the mounting surface of the light emitting element. That is, a light-transmitting member material is poured in a direction substantially parallel to the mounting surface on which the light-emitting element is disposed, and the light-transmitting member is molded and cured with a mold to form a light-transmitting member. To do. Note that “substantially parallel” includes an allowable range of about ± 10 ° with respect to a plane parallel to the mounting surface of the light emitting element.

透光性部材の材料の粘度は、収納される半導体素子と凹部の大きさに基づいて、第四の工程にて空洞が気泡の残存として形成されるように調整されている。例えば、凹部の大きさおよび深さは、凹部の開口部を平面視した外形と、凹部に収納された半導体素子を平面視した外形との相似比が、1.0から2.5であり、かつ、凹部の深さDと、凹部に収納された半導体素子の高さHとの比(D/H)が、1.0から2.14とすることが好ましい。気泡の大きさを、発光装置の信頼性の低下に繋がらない必要最小限とするためである。   The viscosity of the material of the translucent member is adjusted so that cavities are formed as remaining bubbles in the fourth step based on the size of the semiconductor element to be accommodated and the recess. For example, the size and depth of the recess have a similarity ratio of 1.0 to 2.5 between the outer shape of the recess opening in plan view and the outer shape of the semiconductor element housed in the recess in plan view. And it is preferable that ratio (D / H) of the depth D of a recessed part and the height H of the semiconductor element accommodated in the recessed part shall be 1.0 to 2.14. This is because the size of the bubbles is set to the minimum necessary so as not to reduce the reliability of the light emitting device.

さらに、透光性部材の材料の粘度は、200Pa・s以上500Pa・s以下であることが好ましい。粘度が低いと、半導体素子を収納した凹部に空洞が形成されることなく、透光性部材の材料にて凹部が満たされてしまう。一方、粘度が高すぎると、透光性部材の材料を配置する工程の作業性が低下するからである。   Furthermore, the viscosity of the material of the translucent member is preferably 200 Pa · s or more and 500 Pa · s or less. When the viscosity is low, the recess is filled with the material of the translucent member without forming a cavity in the recess containing the semiconductor element. On the other hand, if the viscosity is too high, the workability of the step of arranging the material of the translucent member is lowered.

また、透光性部材の材料の粘度を調整することにより、凹部の開口部から凹部の底面に向かって凸状に材料を延在させて、凹部の開口部に透光性部材の突出部を形成する。そして、透光性部材の突出部における凸状の底面と、凹部に収納された半導体素子の上面との間に空洞を設けた発光装置とすることもできる。   Further, by adjusting the viscosity of the material of the translucent member, the material is extended in a convex shape from the opening of the recess toward the bottom surface of the recess, and the protruding portion of the translucent member is formed in the opening of the recess. Form. And it can also be set as the light-emitting device which provided the cavity between the convex bottom face in the protrusion part of a translucent member, and the upper surface of the semiconductor element accommodated in the recessed part.

透光性部材の材料は、シリコーン樹脂またはエポキシ樹脂から選択された少なくとも一種以上の樹脂を含み、その樹脂に粒子状蛍光体が含有されたものであることが好ましい。樹脂中の粒子状蛍光体の含有率を調整することにより、粒子状蛍光体を含む樹脂の粘度を容易に調整することができ、透光性部材に蛍光体を含む発光装置について、本発明の空洞を形成させることが容易にできるからである。   The material of the translucent member preferably contains at least one resin selected from silicone resins or epoxy resins, and the resin contains a particulate phosphor. By adjusting the content of the particulate phosphor in the resin, the viscosity of the resin containing the particulate phosphor can be easily adjusted, and the light emitting device including the phosphor in the translucent member of the present invention This is because a cavity can be easily formed.

以下、図面を参照しながら本発明を実施するための最良の形態を説明する。図1は、本形態の発光装置100を模式的に示す上面図である。図2は、図1のX―X方向における断面を模式的に示す断面図であり、図3は、図1のY−Y方向における断面を模式的に示す断面図である。また、図4は、本形態の発光装置100を模式的に示す底面図である。図5は、本形態の発光装置100を模式的に示す斜視図である。図6は、本形態の発光装置とは別の発光装置200について、図2に示される発光装置100と同じ断面を模式的に示す断面図である。   The best mode for carrying out the present invention will be described below with reference to the drawings. FIG. 1 is a top view schematically showing a light emitting device 100 of this embodiment. 2 is a cross-sectional view schematically showing a cross section in the XX direction of FIG. 1, and FIG. 3 is a cross-sectional view schematically showing a cross section in the YY direction of FIG. FIG. 4 is a bottom view schematically showing the light emitting device 100 of the present embodiment. FIG. 5 is a perspective view schematically showing the light emitting device 100 of the present embodiment. FIG. 6 is a cross-sectional view schematically showing the same cross section as the light-emitting device 100 shown in FIG. 2 for a light-emitting device 200 different from the light-emitting device of the present embodiment.

図1に示されるように、本形態の発光装置100は、主な構成部材として、二つの発光素子101a、101bと、それらの発光素子を配置する支持体108と、発光素子と同じ支持体に搭載された別の半導体素子102と、半導体素子102の電極を支持体の電極に接続する第一の導電性ワイヤ105、発光素子の電極を支持体の電極に接続する第二の導電性ワイヤ106と、を備える。   As shown in FIG. 1, the light-emitting device 100 of the present embodiment includes two light-emitting elements 101a and 101b as main constituent members, a support 108 on which the light-emitting elements are arranged, and the same support as the light-emitting elements. Another mounted semiconductor element 102, a first conductive wire 105 connecting the electrode of the semiconductor element 102 to the electrode of the support, and a second conductive wire 106 connecting the electrode of the light emitting element to the electrode of the support And comprising.

本形態において、発光素子とは別に支持体に搭載された半導体素子102は、発光素子を過電圧から保護するための保護素子(例えば、ツェナーダイオード)である。支持体108は、発光素子101a、101bが配置された上面側から底面側に向かって窪んだ凹部103を有しており、保護素子は、この凹部103内に収納されている。   In this embodiment, the semiconductor element 102 mounted on the support separately from the light emitting element is a protective element (for example, a Zener diode) for protecting the light emitting element from overvoltage. The support 108 has a recess 103 that is recessed from the upper surface side where the light emitting elements 101 a and 101 b are arranged toward the bottom surface side, and the protection element is accommodated in the recess 103.

さらに、支持体108の上面には、図2、3、5に示されるように、凹部103の開口部を塞ぐように透光性部材107が配置されており、この透光性部材107は、少なくとも上面側に配置された発光素子101a、101bおよびそれに接続する第二の導電性ワイヤ106を被覆している。ここで、凹部103は、支持体108の上面に配置された透光性部材と凹部内壁との間に空洞を有している。ここで、本発明における「空洞」とは、透光性部材107の内部または透光性部材107と支持体との間に形成され、空気またはその他の気体が含まれた気泡であったり、透光性部材107の下面と凹部との間に形成された隙間であったりする。このような空洞は、凹部に配置された半導体素子の外側、特に、半導体素子の上側すなわち開口部の外側から光が進行している方位に配置される。空洞の形状や数は、限定されない。例えば、多数の球状の空洞が凹部内に分散した状態であってもよい。空洞が分散して配置されることにより、透光性部材に拡散剤を含有させたときと同様の効果が得られる。すなわち、透光性部材で光が拡散されることにより凹部の底面方向への光の侵入が抑制される。また、空洞の位置は、開口部における透光性部材の底面と、半導体素子の上面との間に限定されることはない。凹部の開口部を覆う透光性部材と凹部の内壁との間に形成された空洞であればよく、例えば、凹部に収納された半導体素子の側面と、凹部の内壁面との間に空洞が設けられていてもよい。   Further, as shown in FIGS. 2, 3, and 5, a translucent member 107 is disposed on the upper surface of the support 108 so as to close the opening of the recess 103. The light emitting elements 101a and 101b arranged at least on the upper surface side and the second conductive wire 106 connected thereto are covered. Here, the recess 103 has a cavity between the translucent member disposed on the upper surface of the support 108 and the inner wall of the recess. Here, the “cavity” in the present invention is a bubble that is formed inside the light-transmitting member 107 or between the light-transmitting member 107 and the support and contains air or other gas. It may be a gap formed between the lower surface of the optical member 107 and the recess. Such a cavity is disposed outside the semiconductor element disposed in the recess, particularly in the direction in which light travels from the upper side of the semiconductor element, that is, from the outside of the opening. The shape and number of cavities are not limited. For example, a large number of spherical cavities may be dispersed in the recesses. By disperse | distributing and arrange | positioning a cavity, the effect similar to when a diffusing agent is contained in the translucent member is acquired. In other words, the light is diffused by the translucent member, thereby suppressing the intrusion of light toward the bottom surface of the recess. The position of the cavity is not limited between the bottom surface of the translucent member in the opening and the top surface of the semiconductor element. A cavity formed between the translucent member covering the opening of the recess and the inner wall of the recess may be used. For example, the cavity is formed between the side surface of the semiconductor element housed in the recess and the inner wall surface of the recess. It may be provided.

本形態における発光装置100は、図2および図3に示されるように、凹部103の開口部を覆う透光性部材107の下面と、半導体素子102の上面と凹部103の内壁との間に設けられた空洞111を有する。凹部103の開口部に形成された空洞111と透光性部材107との境界面において、その境界面に入射されてくる光を透光性部材107の側に反射させることができる。そのため、本形態の発光装置100は、光を凹部103の内部に侵入させることなく、発光装置の外部へ取り出すことができる。   As shown in FIGS. 2 and 3, the light emitting device 100 in this embodiment is provided between the lower surface of the translucent member 107 covering the opening of the recess 103, the upper surface of the semiconductor element 102, and the inner wall of the recess 103. A cavity 111 formed. Light incident on the boundary surface between the cavity 111 formed in the opening of the recess 103 and the translucent member 107 can be reflected toward the translucent member 107. Therefore, the light-emitting device 100 of this embodiment can extract light to the outside of the light-emitting device without allowing light to enter the recess 103.

このような空洞111は、支持体108に透光性部材107を形成する工程において一体的に形成させることができる。例えば、支持体108の上面に孔版やマスクを配置させた後、透光性部材107の材料を印刷することにより形成させることができる。この方法は、支持体の上面に略平行な方向に連続的に材料を供給しながら配置させて、支持体108の上面に配置された各部材を被覆する方法である。したがって、凹部103が透光性部材107の材料で完全に充填されてしまうことなく、凹部103に空洞111を形成しながら透光性部材107の材料を配置する必要がある。本形態の透光性部材107の材料は、凹部103の開口部の大きさや材料を配置する工程の作業のし易さ等を考慮して、予め所定の粘度に調整されている。例えば、透光性部材に蛍光体を含有する発光装置とするため、蛍光体をYAG系蛍光体とし、透光性部材の材料をシリコーン樹脂として、両者を混合する。このように作製した材料の粘度は、B型粘度計による計測で、200Pa・s以上500Pa・s以下に調整される。   Such a cavity 111 can be integrally formed in the step of forming the translucent member 107 on the support 108. For example, after a stencil or a mask is arranged on the upper surface of the support 108, the material of the translucent member 107 can be printed. This method is a method of covering each member arranged on the upper surface of the support 108 by arranging the material while supplying the material continuously in a direction substantially parallel to the upper surface of the support. Therefore, it is necessary to dispose the material of the translucent member 107 while forming the cavity 111 in the recess 103 without completely filling the recess 103 with the material of the translucent member 107. The material of the translucent member 107 of this embodiment is adjusted to a predetermined viscosity in advance in consideration of the size of the opening of the recess 103 and the ease of work in the step of arranging the material. For example, in order to obtain a light-emitting device that contains a phosphor in a translucent member, the phosphor is a YAG-based phosphor, and the translucent member is a silicone resin. The viscosity of the material thus prepared is adjusted to 200 Pa · s or more and 500 Pa · s or less by measurement with a B-type viscometer.

なお、本形態の製造方法は、透光性部材の材料を支持体上面に配置したとき、発光素子が搭載された支持体上面から窪んだ凹部に気泡の残存による空洞が形成され易いことを利用している。つまり、その窪んだ凹部に保護素子を収納して、その保護素子の周囲に気泡を残存させることにより空洞を形成する。したがって、本形態における発光装置の製造方法により、発光素子を被覆する透光性部材の材料を支持体上面に配置する工程と、発光素子の実装面より低い底面を有する凹部に気泡の残存により空洞を形成させる工程と、を併合することができる。本形態の発光装置は、保護素子を収納する凹部に、光反射性の充填物を埋設するものと比較して、光取り出し効率が高い発光装置を比較的簡単かつ低廉に製造することができる。   Note that the manufacturing method of the present embodiment utilizes the fact that when the material of the translucent member is disposed on the upper surface of the support, a cavity due to remaining bubbles is easily formed in the recess recessed from the upper surface of the support on which the light emitting element is mounted. is doing. In other words, the protective element is accommodated in the recessed portion, and a cavity is formed by leaving bubbles around the protective element. Therefore, according to the method for manufacturing a light-emitting device in this embodiment, a material for a light-transmitting member that covers the light-emitting element is disposed on the upper surface of the support, and a cavity is left in a recess having a bottom surface lower than the mounting surface of the light-emitting element Can be combined with the step of forming. In the light-emitting device of this embodiment, a light-emitting device with high light extraction efficiency can be manufactured relatively easily and inexpensively as compared with a case where a light-reflective filling is embedded in a recess that houses a protective element.

また、本形態の発光装置は、図6に示されるように、透光性部材107の突出部112を凹部103の開口部に設けることができる。この突出部112は、透光性部材107のうち、凹部の底面の方に向かって凸状に出っ張った凸面を有する部位である。さらに、突出部112における凸状の底面と、凹部に収納された半導体素子102の上面との間に空洞111を有することもできる。このような透光性部材の突出部112は、ある程度の粘度を有する透光性部材の流動性を利用して形状を整え、その後硬化させることにより形成することができる。すなわち、透光性部材の材料の粘度を調整した後、凹部の開口部から凹部の底面に向かって凸状に流動性の材料を延在させ、所望の形状となったときに硬化させる。また、透光性部材の材料の粘度を適宜調整することにより凹部の底面方向への延在の度合いを調整することもできる。これにより、突出部における凸状の底面と、凹部に収納された半導体素子の上面との間に空洞を形成、あるいはその大きさを調整することができる。   Further, in the light emitting device of this embodiment, as illustrated in FIG. 6, the protruding portion 112 of the translucent member 107 can be provided in the opening portion of the recessed portion 103. The projecting portion 112 is a portion of the translucent member 107 having a convex surface protruding in a convex shape toward the bottom surface of the concave portion. Furthermore, a cavity 111 can be provided between the convex bottom surface of the protrusion 112 and the upper surface of the semiconductor element 102 housed in the recess. Such a projecting portion 112 of the translucent member can be formed by adjusting the shape by using the fluidity of the translucent member having a certain degree of viscosity and then curing it. That is, after adjusting the viscosity of the material of the translucent member, the fluid material is extended in a convex shape from the opening of the concave portion toward the bottom surface of the concave portion, and is cured when the desired shape is obtained. In addition, the degree of extension of the recess in the bottom surface direction can be adjusted by appropriately adjusting the viscosity of the material of the translucent member. Thereby, a cavity can be formed between the convex bottom surface of the protruding portion and the upper surface of the semiconductor element housed in the concave portion, or the size thereof can be adjusted.

あるいは、本形態における空洞111は、予め別の工程で形成された透光性部材107を支持体108の上面に配置し、その透光性部材107の一部で、半導体素子を配置させた凹部の開口部を塞ぐことにより設けることもできる。つまり、発光素子を覆うように支持体108の上面に配置させた透光性部材107のうち、凹部103の開口部を塞ぐ透光性部材107の下面と凹部103との間に空洞を形成し、透光性部材の下面により光を反射させて外部に取り出すこともできる。なお、生産性の向上を考慮すれば、先に説明したように、発光素子や導電性ワイヤを被覆する透光性部材の形成と同時に空洞も形成される製造方法によることが好ましい。   Alternatively, the cavity 111 in this embodiment is a concave portion in which the translucent member 107 formed in advance in another process is disposed on the upper surface of the support 108 and a semiconductor element is disposed in a part of the translucent member 107. It can also be provided by closing the opening. That is, of the translucent member 107 disposed on the upper surface of the support 108 so as to cover the light emitting element, a cavity is formed between the lower surface of the translucent member 107 that closes the opening of the recess 103 and the recess 103. The light can also be reflected outside by the lower surface of the translucent member and taken out to the outside. In consideration of improvement in productivity, as described above, it is preferable to use a manufacturing method in which a cavity is formed at the same time as the formation of a light-transmitting member covering a light-emitting element or a conductive wire.

本明細書において、各部材の上面とは、支持体の外観形状を形成する各面のうち、発光素子が搭載される側の面を上面として、その上面と向かい合う面を底面とする。また、上面と底面を接続する、それらの間の面を側面とする。   In the present specification, the upper surface of each member refers to the surface on the side on which the light emitting element is mounted among the surfaces forming the external shape of the support, and the surface facing the upper surface is the bottom surface. Moreover, let the surface between them which connects an upper surface and a bottom face be a side surface.

本形態の発光装置100は、外部接続電極110a、110cを正負一対備えており、発光装置100が配線基板(図示せず。)に半田付けされるとき、その半田を介して外部接続電極110a、110cが配線基板の電極と接続される。このとき、外部接続電極110a、110cは、支持体から半田を経由して配線基板へ向かう放熱経路とすることもできる。   The light-emitting device 100 of this embodiment includes a pair of positive and negative external connection electrodes 110a and 110c. When the light-emitting device 100 is soldered to a wiring board (not shown), the external connection electrodes 110a and 110a are connected via the solder. 110c is connected to the electrode of the wiring board. At this time, the external connection electrodes 110a and 110c can be a heat dissipation path from the support body to the wiring board via the solder.

そこで、支持体の底面側に設けられた外部接続電極の略直上に発光素子の搭載部が配置されると放熱経路が短縮できるため、発光装置の放熱性が向上する。さらに、本形態の発光装置100の如く、複数の発光素子101a、101bの搭載部を支持体108に設けたとき、支持体は、その上面方向から見て、複数の発光素子をそれぞれ配置する複数の搭載部104bに挟まれた領域に、発光素子とは別の半導体素子を収納するための凹部の開口部を有する支持体とすることが好ましい。さらに、発光装置100の正負一対の外部接続電極110a、110cが発光素子101a、101bの各搭載部104bの直下まで延設されていることが好ましい。つまり、発光装置100を構成する支持体108の裏面に配置された外部接続電極110a、110cの外形は、搭載部104bの配置パターン外形を、支持体108の上面(図1に示される。)から裏面(図4に示される。)に向けて垂直に投影させたとき、その投影形状の少なくとも一部を含む形状であることが好ましく、上記投影形状の全部を含む形状を有することがより好ましい。   Therefore, if the mounting portion of the light emitting element is disposed almost directly above the external connection electrode provided on the bottom surface side of the support, the heat dissipation path can be shortened, so that the heat dissipation of the light emitting device is improved. Further, when the mounting portion of the plurality of light emitting elements 101a and 101b is provided on the support body 108 as in the light emitting device 100 of the present embodiment, the support body has a plurality of light emitting elements respectively arranged when viewed from the top surface direction. It is preferable to provide a support having an opening portion of a recess for housing a semiconductor element different from the light emitting element in a region sandwiched between the mounting portions 104b. Furthermore, it is preferable that a pair of positive and negative external connection electrodes 110a and 110c of the light emitting device 100 are extended to directly below the mounting portions 104b of the light emitting elements 101a and 101b. That is, the outer shape of the external connection electrodes 110a and 110c arranged on the back surface of the support 108 constituting the light emitting device 100 is the same as the arrangement pattern outer shape of the mounting portion 104b from the upper surface of the support 108 (shown in FIG. 1). When projected vertically toward the back surface (shown in FIG. 4), it is preferably a shape including at least a part of the projected shape, and more preferably a shape including all of the projected shape.

例えば、本形態の発光装置は、図4に示されるように、支持体の底面に配置された正負一対の外部接続電極110a、110cが、支持体108の両端部から発光素子101a、101bの搭載部104bの直下まで延在されている。このような外部接続電極と発光素子の搭載部との配置関係により、支持体に複数の発光素子を搭載したとき、凹部または凹部に設けられた空洞が、発光素子の搭載部から外部接続電極を経由して配線基板へ向かう放熱の妨げとなることがなくなる。そのため、発光装置の放熱性を低下させることがなくなり、発光装置の出力を向上させることができる。   For example, in the light emitting device of this embodiment, as shown in FIG. 4, a pair of positive and negative external connection electrodes 110 a and 110 c arranged on the bottom surface of the support are mounted on the light emitting elements 101 a and 101 b from both ends of the support 108. It extends just below the portion 104b. Due to the arrangement relationship between the external connection electrode and the mounting portion of the light emitting element, when a plurality of light emitting elements are mounted on the support, the concave portion or the cavity provided in the concave portion is connected to the external connecting electrode from the mounting portion of the light emitting element. There is no hindrance to heat dissipation via the circuit board. Therefore, the heat dissipation of the light emitting device is not lowered, and the output of the light emitting device can be improved.

半導体素子が収納される凹部内に正負一対の電極を設け、それらの電極と半導体素子との電気的接続を凹部内にて行うこともできる。凹部内の電極と半導体素子との電極の接続方式は、例えば、凹部の底面に露出された正負一対の電極と、半導体素子の電極を向かい合わせにしてバンプなどにより接合させたり、半導体素子の上面の電極を、凹部底面の電極に導電性ワイヤにて接続したりすることができる。半導体素子の各電極と凹部内の電極に接続させた導電性ワイヤは、その全体が凹部内に収納されることが好ましい。つまり、導電性ワイヤの最頂部が、発光素子が配置された支持体の上面よりも下にあることが好ましい。これにより、透光性部材107が導電性ワイヤに影響を及ぼすことが少なくなり、導電性ワイヤの金属疲労による発光装置の信頼性の低下をなくすることができる。   It is also possible to provide a pair of positive and negative electrodes in the recess in which the semiconductor element is accommodated, and to make electrical connection between the electrode and the semiconductor element in the recess. The electrode connection method between the electrode in the recess and the semiconductor element is, for example, a pair of positive and negative electrodes exposed on the bottom surface of the recess and the electrode of the semiconductor element facing each other by a bump or the like. The electrode can be connected to the electrode on the bottom surface of the recess with a conductive wire. The conductive wire connected to each electrode of the semiconductor element and the electrode in the recess is preferably housed entirely in the recess. That is, it is preferable that the topmost part of the conductive wire is below the upper surface of the support body on which the light emitting element is disposed. As a result, the translucent member 107 is less likely to affect the conductive wire, and the reliability of the light emitting device due to metal fatigue of the conductive wire can be eliminated.

本形態の発光装置のように、発光素子と、それとは別の発光素子との間に凹部を有する構成においては、発光素子に挟まれた領域で光の量が多くなり、それらが凹部内に侵入すると光の損失も多くなる。そのような構成の発光装置における光の損失を低減させるため、本発明を特に好ましく適用することができる。以下、本形態の発光装置における各構成部材について詳述する。   In a structure having a concave portion between a light emitting element and another light emitting element as in the light emitting device of this embodiment, the amount of light increases in a region sandwiched between the light emitting elements, and they are in the concave portion. If it enters, the loss of light increases. In order to reduce the light loss in the light emitting device having such a configuration, the present invention can be particularly preferably applied. Hereinafter, each component in the light emitting device of the present embodiment will be described in detail.

(発光素子)
本形態では、発光素子および保護素子を支持体に配置させた半導体装置について説明するが、このような形態に限定されることなく、受光素子、その他の保護素子(抵抗、トランジスタあるいはコンデンサなど)、あるいはそれらを少なくとも二種以上組み合わせたものを搭載した半導体装置とすることができる。発光素子、凹部内に収容される保護素子またはその他の半導体素子は、1つでもよいし、複数でもよい。発光素子の発光色は、赤色系、緑色系または青色系のいずれか一種、あるいはそれらの色を組み合わせたものでよい。
(Light emitting element)
In this embodiment, a semiconductor device in which a light emitting element and a protection element are arranged on a support will be described. However, the present invention is not limited to such a form, and a light receiving element, other protection elements (such as a resistor, a transistor, or a capacitor), Or it can be set as the semiconductor device carrying what combined those at least 2 or more types. There may be one or more light emitting elements, protective elements or other semiconductor elements housed in the recesses. The light emission color of the light emitting element may be any one of red, green, and blue, or a combination thereof.

本形態における発光素子は、蛍光物質を備えた発光装置とするとき、その蛍光物質を励起可能な波長を発光できる活性層を有する半導体発光素子が好ましい。このような半導体発光素子として、ZnSeやGaNなど種々の半導体を挙げることができるが、蛍光物質を効率良く励起できる短波長が発光可能な窒化物半導体(InAlGa1−X−YN、0≦X、0≦Y、X+Y≦1)が好適に挙げられる。半導体層の材料やその混晶度によって発光波長を種々選択することができる。 When the light-emitting element in this embodiment is a light-emitting device including a fluorescent substance, a semiconductor light-emitting element having an active layer that can emit light having a wavelength capable of exciting the fluorescent substance is preferable. Examples of such semiconductor light emitting devices include various semiconductors such as ZnSe and GaN, but nitride semiconductors (In X Al Y Ga 1- XYN capable of emitting short wavelengths capable of efficiently exciting fluorescent materials). , 0 ≦ X, 0 ≦ Y, X + Y ≦ 1). Various emission wavelengths can be selected depending on the material of the semiconductor layer and the degree of mixed crystal.

発光素子の材料として窒化物半導体を使用した場合、半導体を積層させるための半導体用基板にはサファイア、スピネル、SiC、Si、ZnO、GaNなどの材料が好適に用いられる。結晶性の良い窒化物半導体を量産性よく形成させるためにはサファイア基板を用いることが好ましい。このサファイア基板上にMOCVD法などを用いて窒化物半導体を形成させることができる。また、半導体用基板は、半導層を積層した後、取り除くこともできる。   When a nitride semiconductor is used as the material of the light emitting element, a material such as sapphire, spinel, SiC, Si, ZnO, or GaN is preferably used for a semiconductor substrate for stacking semiconductors. In order to form a nitride semiconductor with good crystallinity with high productivity, it is preferable to use a sapphire substrate. A nitride semiconductor can be formed on the sapphire substrate by MOCVD or the like. Further, the semiconductor substrate can be removed after the semiconductor layer is laminated.

白色系の混色光を発光させる発光装置とするときには、蛍光物質からの発光波長との補色関係や封止樹脂の劣化などを考慮して、発光素子の発光波長は400nm以上530nm以下が好ましく、420nm以上490nm以下がより好ましい。発光素子と蛍光物質との励起、発光効率をそれぞれより向上させるためには、450nm以上475nm以下がさらに好ましい。   In the case of a light emitting device that emits white mixed color light, the emission wavelength of the light emitting element is preferably 400 nm or more and 530 nm or less in consideration of the complementary color relationship with the emission wavelength from the fluorescent material and the deterioration of the sealing resin, and 420 nm. More preferably, it is 490 nm or less. In order to further improve the excitation and emission efficiency of the light emitting element and the fluorescent material, 450 nm or more and 475 nm or less are more preferable.

赤色系の光を発する発光素子の材料として、ガリウム・アルミニウム・砒素系の半導体やアルミニウム・インジュウム・ガリウム・燐系の半導体を選択することが好ましい。   It is preferable to select a gallium / aluminum / arsenic semiconductor or an aluminum / indium / gallium / phosphorous semiconductor as a material of a light emitting element that emits red light.

なお、フルカラー表示装置とするためには、赤色系の発光波長が610nmから700nm、緑色系が495nmから565nm、青色系の発光波長が430nmから490nmの発光素子を組み合わせることが好ましい。   In order to obtain a full-color display device, it is preferable to combine light emitting elements having a red light emission wavelength of 610 nm to 700 nm, a green light emission wavelength of 495 nm to 565 nm, and a blue light emission wavelength of 430 nm to 490 nm.

発光素子を支持体に固定した後、発光素子の各電極と支持体の導体配線とをそれぞれ導電性ワイヤにて接続する。ここで、発光素子を固定するための接合部材は、特に限定されず、エポキシ樹脂などの絶縁性接着剤や、AuとSnとを含有する共晶材、低融点金属等のろう材、導電性材料が含有された樹脂からなる導電性ペーストやガラスなどとすることができる。ここで、導電性ペーストに含有される導電性材料は、Au、SnあるいはAgが好ましく、より好ましくはAgの含有量が80%〜90%であるAgペーストを用いると放熱性にも優れた発光装置が得られる。なお、底面側に電極を有する半導体素子は、銀、金、パラジウムなどの金属材料を含む導電性ペーストによって支持体に接着することができる。   After fixing the light emitting element to the support, each electrode of the light emitting element and the conductor wiring of the support are connected by a conductive wire. Here, the joining member for fixing the light emitting element is not particularly limited, and is an insulating adhesive such as an epoxy resin, a eutectic material containing Au and Sn, a brazing material such as a low melting point metal, and conductivity. A conductive paste or glass made of a resin containing the material can be used. Here, the conductive material contained in the conductive paste is preferably Au, Sn, or Ag. More preferably, the Ag paste having an Ag content of 80% to 90% is used. A device is obtained. Note that a semiconductor element having an electrode on the bottom surface side can be bonded to a support with a conductive paste containing a metal material such as silver, gold, or palladium.

透光性のサファイア基板上に窒化物半導体を積層させて形成された発光素子の場合には、接合部材として、例えば、エポキシ樹脂、シリコーン等があげられる。このとき、発光素子の底面(すなわち、上記サファイア基板における窒化物半導体が積層された面とは反対側の面。以下、この段落において同じ。)に銀やアルミニウムの金属材料を配置してもよい。例えば、銀やアルミニウムの金属材料を発光素子の底面に蒸着あるいはスパッタリングすることにより金属層を成膜することができる。これにより、発光素子の底面における光反射率が向上するため、接合部材を樹脂材料としたときに発光素子からの光や熱による樹脂の劣化が抑制され、発光装置の光取出し効率が向上する。さらに、発光素子の底面の側から、銀やアルミニウムを材料とする金属層、次にAuやSnを材料とする共晶層を順に積層させる。これにより、発光素子の底面と共晶層との間で光反射率が向上する。また、共晶材が発光素子からの光の少なくとも一部を吸収する材料を含むとき、発光素子の底面側における光の損失が低減されるので、発光装置の光取出し効率が向上する。   In the case of a light emitting element formed by laminating a nitride semiconductor on a translucent sapphire substrate, examples of the bonding member include an epoxy resin and silicone. At this time, a metal material such as silver or aluminum may be disposed on the bottom surface of the light-emitting element (that is, the surface opposite to the surface on which the nitride semiconductor is stacked in the sapphire substrate, hereinafter the same in this paragraph). . For example, a metal layer can be formed by evaporating or sputtering a metal material such as silver or aluminum on the bottom surface of the light emitting element. Thereby, since the light reflectance at the bottom surface of the light emitting element is improved, deterioration of the resin due to light or heat from the light emitting element is suppressed when the bonding member is made of a resin material, and the light extraction efficiency of the light emitting device is improved. Further, a metal layer made of silver or aluminum and then a eutectic layer made of Au or Sn are sequentially laminated from the bottom surface side of the light emitting element. Thereby, light reflectance improves between the bottom face of a light emitting element, and a eutectic layer. In addition, when the eutectic material includes a material that absorbs at least part of light from the light emitting element, light loss on the bottom surface side of the light emitting element is reduced, so that the light extraction efficiency of the light emitting device is improved.

発光素子は、後述する支持体の上面に設けられた発光素子搭載部に接合部材によって固定される。本形態では、発光素子は支持体の上面に設けられた金属部材の上に固定されている。しかし、このような形態に限定されることなく、発光素子は、支持体を構成する絶縁部材の上に実装してもよい。   The light emitting element is fixed to the light emitting element mounting portion provided on the upper surface of the support described later by a bonding member. In this embodiment, the light emitting element is fixed on a metal member provided on the upper surface of the support. However, the present invention is not limited to such a form, and the light emitting element may be mounted on an insulating member constituting the support.

(導電性ワイヤ)
導電性ワイヤは、発光素子の電極とのオーミック性、機械的接続性、電気伝導性及び熱伝導性がよいものが求められる。熱伝導度としては0.01cal/(s)(cm)(℃/cm)以上が好ましく、より好ましくは0.5cal/(s)(cm)(℃/cm)以上である。また、作業性などを考慮して導電性ワイヤの直径は、好ましくは、Φ10μm以上、Φ45μm以下である。透光性部材に蛍光物質を含有させるとき、蛍光物質が含有された部位と、蛍光物質が含有されていない部位との界面で導電性ワイヤが断線しやすい。そのため、導電性ワイヤの直径は、25μm以上がより好ましく、発光素子の発光面積の確保や扱い易さの観点から35μm以下がより好ましい。このような導電性ワイヤとして具体的には、金、銅、白金、アルミニウム等の金属及びそれらの合金を用いた導電性ワイヤが挙げられる。
(Conductive wire)
The conductive wire is required to have good ohmic properties, mechanical connectivity, electrical conductivity, and thermal conductivity with the electrode of the light emitting element. Preferably 0.01cal / (s) (cm 2 ) (℃ / cm) or higher as heat conductivity, and more preferably 0.5cal / (s) (cm 2 ) (℃ / cm) or more. In consideration of workability and the like, the diameter of the conductive wire is preferably Φ10 μm or more and Φ45 μm or less. When the fluorescent material is contained in the translucent member, the conductive wire is easily disconnected at the interface between the portion containing the fluorescent material and the portion not containing the fluorescent material. Therefore, the diameter of the conductive wire is more preferably 25 μm or more, and more preferably 35 μm or less from the viewpoint of securing the light emitting area of the light emitting element and ease of handling. Specific examples of such conductive wires include conductive wires using metals such as gold, copper, platinum, and aluminum, and alloys thereof.

(支持体)
本形態のパッケージは、半導体素子および電極を配置する支持体と、半導体素子を被覆する透光性部材とから構成される。まず、本形態の発光装置における支持体として、絶縁性基板に導体配線が施された板状の支持体を好適に利用することができる。発光素子は、板状の支持体の主面上に設けられた搭載部に配置される。発光素子の側面方向を包囲する側壁のない支持体とするときには、発光素子の側面方向から出射する光を損失させることなく外部に取り出すことができる。本形態の絶縁性基板は、上面が略矩形である直方体であり、上面の略中央部に上面側から底面側へ窪んだ凹部を有する。また、絶縁性基板の上面には、発光素子を搭載するための金属部材と、正負一対の電極が二対設けられている。凹部は、これらの電極および金属材料の間に設けられている。また、凹部の底面には、絶縁性基板の上面に設けられた電極と電気的に繋がった電極が設けられている。なお、絶縁性基板に設けられた電極および金属部材の形状および位置は、金属部材を搭載部として配置される半導体素子の大きさおよび形状や、導電性ワイヤの張りやすさ等を考慮して適宜調整される。
(Support)
The package according to this embodiment includes a support body on which a semiconductor element and an electrode are arranged, and a translucent member that covers the semiconductor element. First, as a support in the light emitting device of this embodiment, a plate-like support in which a conductive wiring is applied to an insulating substrate can be suitably used. A light emitting element is arrange | positioned at the mounting part provided on the main surface of a plate-shaped support body. When a support body without a side wall surrounding the side surface direction of the light emitting element is used, light emitted from the side surface direction of the light emitting element can be extracted outside without loss. The insulating substrate of this embodiment is a rectangular parallelepiped having a substantially rectangular upper surface, and has a concave portion that is recessed from the upper surface side to the bottom surface side at a substantially central portion of the upper surface. Further, two pairs of a metal member for mounting the light emitting element and a pair of positive and negative electrodes are provided on the upper surface of the insulating substrate. The recess is provided between these electrodes and the metal material. In addition, an electrode electrically connected to the electrode provided on the upper surface of the insulating substrate is provided on the bottom surface of the recess. The shape and position of the electrode and metal member provided on the insulating substrate are appropriately determined in consideration of the size and shape of the semiconductor element arranged with the metal member as a mounting portion, the ease of stretching of the conductive wire, and the like. Adjusted.

本形態の支持体を構成する絶縁性基板は、半導体素子が搭載される、その上面において、発光素子が搭載される領域の外側の領域に、上面側から底面側へ向かって窪んだ凹部を有している。この凹部に、発光素子とは別の半導体素子として、例えば保護素子が収納されている。本形態における凹部は、その開口部を平面視した外形が略正方形であるが、これに限定されることなく、凹部内に収納される半導体素子の大きさや数や形状に合わせた形状および大きさとすることができる。また、同様に、凹部の深さも、収納する半導体素子の高さおよび凹部内の電極との接続方式によって適宜調節することができる。図1に示されるように、第一の発光素子101aの搭載部104bと第二の発光素子101bの搭載部104bとの間であって、支持体108の略中央に凹部103を設けることが好ましい。これにより、支持体の隅に凹部を設けた発光装置(例えば、支持体を上面から見て、支持体の長手方向に、第一の発光素子の搭載部、第二の発光素子の搭載部、凹部の順に配置された支持体を有する発光装置など)と比較して、本形態における発光装置は、支持体に凹部を設けたことによる配光性への影響を少なくすることができる。   The insulating substrate that constitutes the support of this embodiment has a concave portion that is recessed from the top surface side to the bottom surface side in a region outside the region where the light emitting device is mounted on the top surface of the semiconductor substrate on which the semiconductor device is mounted. is doing. For example, a protective element is housed in the recess as a semiconductor element different from the light emitting element. The recess in this embodiment has a substantially square outer shape in plan view of the opening, but is not limited to this, and the shape and size according to the size, number and shape of the semiconductor elements housed in the recess can do. Similarly, the depth of the recess can be appropriately adjusted depending on the height of the semiconductor element to be accommodated and the connection method with the electrode in the recess. As shown in FIG. 1, it is preferable to provide a recess 103 between the mounting portion 104 b of the first light emitting element 101 a and the mounting portion 104 b of the second light emitting element 101 b and in the approximate center of the support body 108. . Thereby, a light emitting device provided with a recess in the corner of the support (for example, when the support is viewed from above, in the longitudinal direction of the support, the first light emitting element mounting portion, the second light emitting element mounting portion, Compared with a light emitting device having a support body arranged in the order of concave portions), the light emitting device in this embodiment can reduce the influence on the light distribution due to the provision of the concave portions in the support body.

また、例えば、透光性部材の形成と同時に空洞を形成させるとき、凹部の大きさおよび深さは、凹部の開口部を平面視した外形と、凹部に収納された半導体素子を平面視した外形との相似比が、1.0から2.5であり、かつ、凹部の深さと、凹部に収納された半導体素子の高さとの比が、1.0から2.14とすることが好ましい。半導体素子の大きさに対して凹部の大きさが大きくなり過ぎれば、空洞を形成している気泡も大きくなる。そして、このような気泡が発光素子の発熱を受けて熱膨張することにより、発光装置の信頼性や光学特性が低下してしまう懸念があるからである。   Further, for example, when forming the cavity simultaneously with the formation of the translucent member, the size and depth of the recesses are as follows: the outer shape in plan view of the opening of the recess and the outer shape in plan view of the semiconductor element accommodated in the recess. And the ratio of the depth of the recess to the height of the semiconductor element housed in the recess is preferably 1.0 to 2.14. If the size of the recess becomes too large with respect to the size of the semiconductor element, the bubbles forming the cavity also become larger. This is because there is a concern that the reliability and optical characteristics of the light-emitting device may be deteriorated when such bubbles receive heat generated by the light-emitting element and thermally expand.

絶縁性基板の材料として、エポキシ樹脂にガラス成分が含有されてなるガラスエポキシ基板、セラミックスを材料とする基板を好適に利用することができる。   As a material for the insulating substrate, a glass epoxy substrate in which a glass component is contained in an epoxy resin or a substrate made of ceramics can be suitably used.

発光装置に高いコントラストが要求される場合、絶縁性基板の母材にCr、MnO、Feなどの顔料を含有させることにより、絶縁性基板を暗色系にすることが好ましい。あるいは、絶縁性基板に高い光反射率を付与するためには、二酸化チタンなどの白色系の顔料を含有させることが好ましい。 When a high contrast is required for the light emitting device, it is preferable to make the insulating substrate dark color by including a pigment such as Cr 2 O 3 , MnO 2 , Fe 2 O 3 in the base material of the insulating substrate. . Alternatively, in order to give a high light reflectance to the insulating substrate, it is preferable to contain a white pigment such as titanium dioxide.

特に、高耐熱性、高耐光性が望まれる場合、セラミックスを絶縁性基板の母材とすることが好ましい。セラミックスの主材料は、アルミナ、窒化アルミニウム、ムライトなどが好ましい。これらの主材料に焼結助剤などが加え、焼結することでセラミックスの基板が得られる。例えば、原料粉末の90〜96重量%がアルミナであり、焼結助剤として粘土、タルク、マグネシア、カルシア及びシリカ等が4〜10重量%添加され1500〜1700℃の温度範囲で焼結させたセラミックスや原料粉末の40〜60重量%がアルミナで焼結助剤として60〜40重量%の硼珪酸ガラス、コージュライト、フォルステライト、ムライトなどが添加され800〜1200℃の温度範囲で焼結させたセラミックス等が挙げられる。このようなセラミックス基板は、焼成前のグリーンシート段階で種々の形状をとることができる。そのため、本形態の凹部を有する絶縁性基板を容易に形成することができる。また、焼成前のグリーンシート段階で種々のパターン形状の導体配線を施すことができる。例えば、タングステンを含有するペースト状の材料をスクリーン印刷することにより、導体配線や、半導体素子の搭載部とするための金属材料の下地層を形成することができる。それらの下地層には、セラミックスの材料を焼成した後、銀、金、あるいはアルミニウムを材料とする鍍金やスパッタリングにより最表面の金属材料が配置される。最表面は、発光素子からの光に対して高い反射率を有する金属材料にて被覆されていることが好ましい。

In particular, when high heat resistance and high light resistance are desired, it is preferable to use ceramics as a base material of an insulating substrate. The main material of the ceramic is preferably alumina, aluminum nitride, mullite or the like. A ceramic substrate is obtained by adding a sintering aid to these main materials and sintering. For example, 90 to 96% by weight of the raw material powder is alumina, and 4 to 10% by weight of clay , talc, magnesia, calcia, silica and the like are added as sintering aids and sintered in a temperature range of 1500 to 1700 ° C. 40-60% by weight of ceramics and raw material powder is alumina, and 60-40% by weight of borosilicate glass, cordierite, forsterite, mullite, etc. are added as sintering aids and sintered in the temperature range of 800-1200 ° C. And ceramics. Such a ceramic substrate can take various shapes at the green sheet stage before firing. Therefore, an insulating substrate having a recess according to this embodiment can be easily formed. Moreover, conductor wiring of various pattern shapes can be applied at the green sheet stage before firing. For example, by conducting screen printing of a paste-like material containing tungsten, it is possible to form a conductor wiring or a base layer of a metal material for forming a semiconductor element mounting portion. In these underlayers, after firing a ceramic material, a metal material on the outermost surface is disposed by plating or sputtering using silver, gold, or aluminum as a material. The outermost surface is preferably coated with a metal material having a high reflectance with respect to light from the light emitting element.

(透光性部材)
透光性部材の材料は、特に限定されず、例えば、シリコーン樹脂、エポキシ樹脂、ユリア樹脂、フッ素樹脂、および、それらの樹脂が少なくとも一種以上含有されたハイブリッド樹脂等、耐候性に優れた透光性樹脂を用いることができる。また、透光性部材は有機物に限られず、ガラス、シリカゲルなどの耐光性に優れた無機物を用いることもできる。また、本形態の透光性部材は、粘度増量剤、光拡散剤、顔料、蛍光物質など、用途に応じてあらゆる部材を添加することができる。例えば、発光装置の発光色に応じた着色剤を添加させることができる。また、光拡散剤として例えば、チタン酸バリウム、酸化チタン、酸化アルミニウム、二酸化珪素、炭酸カルシウム、および、それらを少なくとも一種以上含む混合物などを挙げることができる。更にまた、透光性部材の光出射面側を所望の形状にすることによってレンズ効果を持たせることができる。具体的には、平板状、凸レンズ形状、凹レンズ形状さらには、発光観測面から見て楕円形状やそれらを複数組み合わせた形状にすることができる。
(Translucent member)
The material of the translucent member is not particularly limited. For example, a translucent material having excellent weather resistance, such as a silicone resin, an epoxy resin, a urea resin, a fluororesin, and a hybrid resin containing at least one of those resins. Can be used. Further, the translucent member is not limited to an organic material, and an inorganic material having excellent light resistance such as glass or silica gel can also be used. Moreover, the translucent member of this embodiment can be added with any member such as a viscosity extender, a light diffusing agent, a pigment, and a fluorescent material depending on the application. For example, a colorant corresponding to the emission color of the light emitting device can be added. Examples of the light diffusing agent include barium titanate, titanium oxide, aluminum oxide, silicon dioxide, calcium carbonate, and a mixture containing at least one of them. Furthermore, a lens effect can be given by making the light-emitting surface side of a translucent member into a desired shape. Specifically, a flat plate shape, a convex lens shape, a concave lens shape, an elliptical shape as viewed from the light emission observation surface, or a shape obtained by combining a plurality of them can be used.

(蛍光物質)
本形態の発光装置は、透光性部材に蛍光物質を含有させることができる。このような蛍光物質の一例として、以下に述べる希土類元素を含有する蛍光物質がある。
(Fluorescent substance)
In the light-emitting device of this embodiment, the light-transmitting member can contain a fluorescent material. As an example of such a fluorescent material, there is a fluorescent material containing a rare earth element described below.

具体的には、Y、Lu,Sc、La,Gd、TbおよびSmの群から選択される少なくとも1つの元素と、Al、Ga、およびInの群から選択される少なくとも1つの元素とを有するガーネット(石榴石)型蛍光物質が挙げられる。特に、アルミニウム・ガーネット系蛍光体は、AlとY、Lu、Sc、La、Gd、Tb、Eu、Ga、In及びSmから選択された少なくとも一つの元素とを含み、かつ希土類元素から選択された少なくとも一つの元素で付活された蛍光体であり、発光素子から出射された可視光や紫外線で励起されて発光する蛍光体である。例えば、イットリウム・アルミニウム酸化物系蛍光体(YAG系蛍光体)の他、Tb2.95Ce0.05Al12、Y2.90Ce0.05Tb0.05Al12、Y2.94Ce0.05Pr0.01Al12、Y2.90Ce0.05Pr0.05Al12等が挙げられる。これらのうち、特に本実施の形態において、Yを含み、かつCeあるいはPrで付活され組成の異なる2種類以上のイットリウム・アルミニウム酸化物系蛍光体が利用される。 Specifically, a garnet having at least one element selected from the group of Y, Lu, Sc, La, Gd, Tb, and Sm, and at least one element selected from the group of Al, Ga, and In (Steorite) type fluorescent material. In particular, the aluminum garnet phosphor includes Al and at least one element selected from Y, Lu, Sc, La, Gd, Tb, Eu, Ga, In, and Sm, and is selected from rare earth elements. It is a phosphor activated by at least one element, and is a phosphor that emits light when excited by visible light or ultraviolet light emitted from a light emitting element. For example, in addition to yttrium-aluminum oxide phosphor (YAG phosphor), Tb 2.95 Ce 0.05 Al 5 O 12 , Y 2.90 Ce 0.05 Tb 0.05 Al 5 O 12 , Y 2.94 Ce 0.05 Pr 0.01 Al 5 O 12 , Y 2.90 Ce 0.05 Pr 0.05 Al 5 O 12 and the like. Among these, particularly in the present embodiment, two or more kinds of yttrium / aluminum oxide phosphors containing Y and activated by Ce or Pr and having different compositions are used.

また、窒化物系蛍光体は、Nを含み、かつBe、Mg、Ca、Sr、Ba、及びZnから選択された少なくとも一つの元素と、C、Si、Ge、Sn、Ti、Zr、及びHfから選択された少なくとも一つの元素とを含み、希土類元素から選択された少なくとも一つの元素で付活された蛍光体である。窒化物系蛍光体として、例えば、(Sr0.97Eu0.03Si、(Ca0.985Eu0.015Si、(Sr0.679Ca0.291Eu0.03Si、等が挙げられる。 In addition, the nitride-based phosphor contains N and at least one element selected from Be, Mg, Ca, Sr, Ba, and Zn, and C, Si, Ge, Sn, Ti, Zr, and Hf And a phosphor activated by at least one element selected from rare earth elements. Examples of the nitride phosphor include (Sr 0.97 Eu 0.03 ) 2 Si 5 N 8 , (Ca 0.985 Eu 0.015 ) 2 Si 5 N 8 , (Sr 0.679 Ca 0.291). Eu 0.03 ) 2 Si 5 N 8 , and the like.

以下、本発明に係る実施例について詳述する。なお、本発明は以下に示す実施例のみに限定されないことは言うまでもない。   Examples according to the present invention will be described in detail below. Needless to say, the present invention is not limited to the following examples.

図1は、本実施例における発光装置100を模式的に示す上面図である。図2は、図1の発光装置100をX―X方向に切断したときの断面を模式的に示す断面図であり、図3は、図1に示される発光装置100をY−Y方向に切断したときの断面を模式的に示す断面図である。また、図4は、本実施例の発光装置100を模式的に示す底面図である。図5は、本実施例の発光装置100を模式的に示す斜視図である。   FIG. 1 is a top view schematically showing a light emitting device 100 in the present embodiment. 2 is a cross-sectional view schematically showing a cross section when the light emitting device 100 of FIG. 1 is cut in the XX direction. FIG. 3 is a cross section of the light emitting device 100 shown in FIG. 1 in the YY direction. It is sectional drawing which shows a cross section when it did. FIG. 4 is a bottom view schematically showing the light emitting device 100 of this example. FIG. 5 is a perspective view schematically showing the light emitting device 100 of the present embodiment.

図1に示されるように、本実施例における発光装置100は、発光素子に電力を供給する第一の電極104aおよび第二の電極104cを有する平板状の支持体108と、その支持体108の上面に設けられた金属部材104bを搭載部として配置された複数の発光素子101a、101bと、第一の発光素子101aおよび第二の発光素子101bの電極と第一の電極104aおよび第二の電極104cを接続する第二の導電性ワイヤ106と、発光素子101a、101bおよび第二の導電性ワイヤ106を被覆する透光性部材107と、を備える。   As shown in FIG. 1, the light emitting device 100 in this embodiment includes a flat plate-like support body 108 having a first electrode 104 a and a second electrode 104 c for supplying power to a light emitting element, and the support body 108. A plurality of light emitting elements 101a and 101b arranged with the metal member 104b provided on the upper surface as a mounting portion, the electrodes of the first light emitting element 101a and the second light emitting element 101b, the first electrode 104a and the second electrode A second conductive wire 106 that connects 104c; and a translucent member 107 that covers the light emitting elements 101a and 101b and the second conductive wire 106.

本実施例の発光素子は、窒化ガリウム系化合物半導体を材料とする青色系の光を発する2つのLEDチップ101a、101bである。これらのLEDチップは、上面を平面視したときの外形が500μm×290μm(縦×横)の長方形であり、底面側にAuおよびSnを材料として含む共晶材が配置されている。これらのLEDチップは、それぞれ支持体の上面に設けられた銀を最表面とする搭載部の上に共晶材により接合されている。   The light emitting element of this embodiment is two LED chips 101a and 101b that emit blue light using a gallium nitride compound semiconductor as a material. These LED chips have a rectangular shape of 500 μm × 290 μm (length × width) when the top surface is viewed in plan, and a eutectic material containing Au and Sn as materials is disposed on the bottom surface side. Each of these LED chips is bonded with a eutectic material on a mounting portion having silver as the outermost surface provided on the upper surface of the support.

支持体は、セラミックスを材料とする絶縁性基板に、タングステンを下地層として、ニッケル、金および銀が順に鍍金されたものである。これらの金属材料の配置により、各電極および金属部材104bを形成させる。さらに、支持体108は、絶縁性基板の上面に、LEDチップ101aとLEDチップ101bの2つの搭載部に挟まれた領域に開口部を有する凹部103が設けられている。この凹部103には、LEDチップ101a、101bを過電圧による破壊から守る保護素子102が収納されている。さらに、本実施例の発光装置は、凹部103の開口部を覆う透光性部材107の下面と、凹部103に収納された保護素子102の上面との間に空洞111を有する。   The support is obtained by plating nickel, gold and silver in this order on an insulating substrate made of ceramics with tungsten as an underlayer. Each electrode and the metal member 104b are formed by arrangement | positioning of these metal materials. Further, the support 108 is provided with a recess 103 having an opening in a region sandwiched between two mounting portions of the LED chip 101a and the LED chip 101b on the upper surface of the insulating substrate. The recess 103 houses a protection element 102 that protects the LED chips 101a and 101b from destruction due to overvoltage. Furthermore, the light emitting device of this embodiment has a cavity 111 between the lower surface of the translucent member 107 covering the opening of the recess 103 and the upper surface of the protection element 102 accommodated in the recess 103.

本実施例の保護素子102は、上面と底面に極性が異なる電極を有するツェナーダイオードである。保護素子102は、銀ペーストを導電性接着剤として凹部103の底面に接着されており、その底面側の電極が導電性接着剤を介して凹部103底面にて露出された導体配線と接続されている。また、保護素子102の上面の電極は、第一の導電性ワイヤ105を介して支持体の上面に設けられた第一の電極104aに接続されている。   The protection element 102 of this embodiment is a Zener diode having electrodes with different polarities on the top surface and the bottom surface. The protective element 102 is bonded to the bottom surface of the recess 103 using silver paste as a conductive adhesive, and the electrode on the bottom surface side is connected to the conductor wiring exposed on the bottom surface of the recess 103 via the conductive adhesive. Yes. The electrode on the upper surface of the protective element 102 is connected to the first electrode 104 a provided on the upper surface of the support via the first conductive wire 105.

図1に示されるように、本実施例の支持体108は、発光素子が配置される上面に、第二の導電性ワイヤ106を介して発光素子と接続する正負一対の電極(第一の電極104aおよび第二の電極104c)と、それらの電極から絶縁されて同じ支持体の上面に設けられた金属部材104bとを有する。2つのLEDチップ101a、101bは、電極とは別に設けられた金属部材104bに搭載されている。これにより、電極に接続する導体配線の配置パターンとは別に放熱経路を支持体に設けることができるため、放熱性が高い発光装置とすることができる。   As shown in FIG. 1, the support body 108 of this embodiment has a pair of positive and negative electrodes (first electrode) connected to the light emitting element via the second conductive wire 106 on the upper surface on which the light emitting element is arranged. 104a and a second electrode 104c) and a metal member 104b provided on the upper surface of the same support body, insulated from these electrodes. The two LED chips 101a and 101b are mounted on a metal member 104b provided separately from the electrodes. Thereby, since a heat dissipation path can be provided in the support body separately from the arrangement pattern of the conductor wiring connected to the electrode, a light emitting device with high heat dissipation can be obtained.

図4に示されるように、本実施例の発光装置100は、その背面方向から見て支持体108の長手方向に向かい合った一対の側面が切り欠かれており、その切り欠かれた部位の内面から支持体108の中央部にかけて第一の外部接続電極110aおよび第二の外部接続電極110cが延設されている。これらの第一の外部接続電極110aおよび第二の外部接続電極110cは、各半導体素子に接続するため支持体108の上面に配置された第一の電極104a、第二の電極104cおよび凹部103底面に配置された電極と導通している。すなわち、第一の外部接続電極110aおよび第二の外部接続電極110cは、支持体内に埋設された導体配線によって、それぞれ第一の電極104aおよび第二の電極104cに電気的に接続されている。第一の外部接続電極110aおよび第二の外部接続電極110cは、発光装置100を外部の配線基板に半田付けしたとき、その半田を介して配線基板と接続される。   As shown in FIG. 4, in the light emitting device 100 of the present embodiment, a pair of side surfaces facing the longitudinal direction of the support body 108 as viewed from the back direction are cut out, and the inner surface of the cut out portion. The first external connection electrode 110a and the second external connection electrode 110c are extended from the center portion of the support body 108 to the center portion of the support body 108. These first external connection electrode 110a and second external connection electrode 110c are the first electrode 104a, the second electrode 104c, and the bottom surface of the recess 103 disposed on the upper surface of the support body 108 for connection to each semiconductor element. Is electrically connected to the electrode disposed on the surface. That is, the first external connection electrode 110a and the second external connection electrode 110c are electrically connected to the first electrode 104a and the second electrode 104c, respectively, by the conductor wiring embedded in the support body. The first external connection electrode 110a and the second external connection electrode 110c are connected to the wiring board via the solder when the light emitting device 100 is soldered to the external wiring board.

図2および図3に示されるように、本実施例の空洞111は、本実施例の発光装置100の透光性部材107を形成する工程において、凹部103内に気泡が残存することにより形成されたものである。すなわち、支持体108に各半導体素子を配置して導電性ワイヤにて各電極を接続した後、YAG系蛍光体を含むシリコーン樹脂を発光素子および導電性ワイヤ並びに凹部の開口部を覆うように印刷することにより形成する。本実施例の発光装置の製造方法は、概ね以下の通りである。   As shown in FIG. 2 and FIG. 3, the cavity 111 of the present embodiment is formed by bubbles remaining in the recess 103 in the step of forming the translucent member 107 of the light emitting device 100 of the present embodiment. It is a thing. That is, after each semiconductor element is arranged on the support 108 and each electrode is connected by a conductive wire, a silicone resin containing a YAG phosphor is printed so as to cover the light emitting element, the conductive wire, and the opening of the recess. To form. The manufacturing method of the light-emitting device of this example is as follows.

まず、セラミックスを絶縁性基板の材料とする支持体108の集合基板に、複数のLEDチップを配列させ、さらに保護素子103を凹部に収納して導電性ワイヤなどにより電気的に接続する。なお、保護素子103は、銀ペーストを接着剤として、凹部の底面に配置された導体配線に接着されており、保護素子103の底面の電極が銀ペーストを介して導体配線と電気的に接続される。   First, a plurality of LED chips are arranged on a collective substrate of a support 108 made of ceramic as an insulating substrate material, and the protective element 103 is housed in a recess and electrically connected by a conductive wire or the like. The protective element 103 is adhered to the conductor wiring disposed on the bottom surface of the recess using silver paste as an adhesive, and the electrode on the bottom surface of the protective element 103 is electrically connected to the conductor wiring via the silver paste. The

次に、複数のLEDチップを、導電性ワイヤおよび凹部の開口部を纏めて覆うように、YAG系蛍光体を含むシリコーン樹脂をLEDチップの配列に沿って直線状に配置する。このとき、YAG系蛍光体を含むシリコーン樹脂の粘度を300Pa・sとする。また、本実施例の保護素子は、上面を平面視した外形寸法が240μm×240μmの正方形であり、凹部の底面に配置したときの高さが0.14mmである。このような大きさの保護素子を凹部に収納するとき、凹部の開口部の外形寸法は、一辺が0.24mm以上0.60mm以下の正方形とすることが好ましく、開口部上面から凹部底面までの深さは、0.15mm以上0.30mm以下とすることが好ましい。本実施例では、凹部の開口部の外形寸法が0.50mm×0.50mmの正方形であり、深さが0.15mmである。さらに、シリコーン樹脂を硬化させた後、ダイシングにより透光性部材および絶縁性基板を切断して、所定の大きさに個片化することにより本実施例の発光装置100を得る。   Next, a silicone resin containing a YAG phosphor is linearly arranged along the arrangement of the LED chips so that the plurality of LED chips are collectively covered with the conductive wires and the openings of the recesses. At this time, the viscosity of the silicone resin containing the YAG phosphor is set to 300 Pa · s. In addition, the protective element of this example is a square having an outer dimension of 240 μm × 240 μm when the upper surface is viewed in plan, and the height when arranged on the bottom surface of the recess is 0.14 mm. When the protective element having such a size is housed in the recess, the outer dimension of the opening of the recess is preferably a square having a side of 0.24 mm or more and 0.60 mm or less, from the upper surface of the opening to the bottom of the recess. The depth is preferably 0.15 mm or more and 0.30 mm or less. In the present embodiment, the outer dimension of the opening of the recess is a square of 0.50 mm × 0.50 mm, and the depth is 0.15 mm. Further, after the silicone resin is cured, the light-transmitting member and the insulating substrate are cut by dicing and separated into a predetermined size to obtain the light emitting device 100 of this embodiment.

なお、支持体108上面の外形を形成する矩形の四隅または辺にそれぞれ形成させたマーク(直線またはL字型形状からなる印)109は、発光装置100に設けられた正負一対の外部接続電極110a、110cの極性を識別する標識とすることができる他、集合基板をダイシングして個片化するときのダイシングラインを示す目印として利用することもできる。   Note that marks (marks made of a straight line or an L-shape) 109 formed at four corners or sides of the rectangle forming the outer shape of the upper surface of the support 108 are a pair of positive and negative external connection electrodes 110 a provided in the light emitting device 100. 110c can be used as a mark for indicating a dicing line when the collective substrate is diced into individual pieces.

本発明は、照明用光源、各種インジケーター用光源、車載用光源、ディスプレイ用光源、液晶のバックライト用光源などに使用することができる。   The present invention can be used for illumination light sources, various indicator light sources, in-vehicle light sources, display light sources, liquid crystal backlight light sources, and the like.

図1は、本発明の一実施例にかかる発光装置を模式的に示す上面図である。FIG. 1 is a top view schematically showing a light emitting device according to an embodiment of the present invention. 図2は、図1に示されるX―X方向における発光装置の断面を模式的に示す断面図である。FIG. 2 is a cross-sectional view schematically showing a cross section of the light emitting device in the XX direction shown in FIG. 図3は、図1に示されるY−Y方向における発光装置の断面を模式的に示す断面図である。FIG. 3 is a cross-sectional view schematically showing a cross section of the light emitting device in the YY direction shown in FIG. 図4は、本発明の一実施例における発光装置を模式的に示す底面図である。FIG. 4 is a bottom view schematically showing a light emitting device in one embodiment of the present invention. 図5は、本発明の一実施例にかかる発光装置を模式的に示す斜視図である。FIG. 5 is a perspective view schematically showing a light emitting device according to an embodiment of the present invention. 図6は、本発明の別の一実施例にかかる発光装置の断面を模式的に示す断面図である。FIG. 6 is a cross-sectional view schematically showing a cross section of a light emitting device according to another embodiment of the present invention.

符号の説明Explanation of symbols

100、200・・・発光装置
101a、101b・・・発光素子
102・・・半導体素子
103・・・凹部
104a・・・第一の電極
104b・・・金属部材
104c・・・第二の電極
105・・・第一の導電性ワイヤ
106・・・第二の導電性ワイヤ
107・・・透光性部材
108・・・支持体
109・・・マーク
110a・・・第一の外部接続電極
110c・・・第二の外部接続電極
111・・・空洞
112・・・突出部
DESCRIPTION OF SYMBOLS 100, 200 ... Light-emitting device 101a, 101b ... Light-emitting element 102 ... Semiconductor element 103 ... Recess 104a ... First electrode 104b ... Metal member 104c ... Second electrode 105 ... first conductive wire 106 ... second conductive wire 107 ... translucent member 108 ... support 109 ... mark 110a ... first external connection electrode 110c ..Second external connection electrode 111 ... cavity 112 ... projection

Claims (11)

発光素子と、その発光素子を配置するパッケージと、そのパッケージに設けられた電極と前記発光素子の電極とを接続する導電性ワイヤと、を備えており、前記パッケージが、前記発光素子を配置する搭載部および前記発光素子とは別の半導体素子を収納する凹部を有する支持体と、その支持体に配置された透光性部材と、を備えている発光装置であって、
前記透光性部材は、少なくとも前記発光素子と前記凹部の開口部とを被覆しており、前記凹部に収納された半導体素子の側面と前記凹部の内壁面との間に、空洞が設けられていることを特徴とする発光装置。
A light emitting element; a package in which the light emitting element is disposed; and an electrically conductive wire that connects an electrode provided in the package and an electrode of the light emitting element. The package disposes the light emitting element. A light-emitting device comprising: a support having a recess for housing a semiconductor element different from the mounting part and the light-emitting element; and a translucent member disposed on the support,
The translucent member covers at least the light emitting element and the opening of the recess, and a cavity is provided between the side surface of the semiconductor element housed in the recess and the inner wall surface of the recess. emitting device characterized by there.
前記空洞は、さらに、前記凹部の開口部を覆う透光性部材の底面と、前記凹部に収納された半導体素子の上面との間に設けられている請求項1に記載の発光装置。 2. The light emitting device according to claim 1, wherein the cavity is further provided between a bottom surface of a translucent member covering the opening of the recess and an upper surface of the semiconductor element housed in the recess. 前記透光性部材は、前記凹部の開口部から前記凹部の底面に向かって凸状の突出部を有している請求項1または2に記載の発光装置。   The light-emitting device according to claim 1, wherein the translucent member has a protruding portion that is convex from the opening of the recess toward the bottom surface of the recess. 前記凹部は、前記発光素子の複数の搭載部に挟まれた領域に設けられており、前記支持体は、前記搭載部の略直下にそれぞれ外部接続電極を備えている請求項1から3のいずれか一項に記載の発光装置。   The said recessed part is provided in the area | region pinched | interposed into the some mounting part of the said light emitting element, The said support body is provided with the external connection electrode substantially directly under the said mounting part, respectively. A light-emitting device according to claim 1. 前記凹部の開口部を平面視した外形と、前記凹部に収納された半導体素子を平面視した外形との相似比は、1.0から2.5である請求項1から4のいずれか一項に記載の発光装置。   5. The similarity ratio between the outer shape of the opening of the recess in plan view and the outer shape of the semiconductor element housed in the recess in plan view is 1.0 to 2.5. The light emitting device according to 1. 発光素子と、その発光素子を配置するパッケージと、そのパッケージに設けられた電極と前記発光素子の電極とを接続する導電性ワイヤと、を備えており、前記パッケージが、前記発光素子を少なくとも被覆する透光性部材と、前記発光素子が配置される搭載部および前記発光素子とは別の半導体素子を収納する凹部を有する支持体と、を備えている発光装置の製造方法であって、
前記発光素子が搭載される上面に開口する凹部を有する支持体を形成する第一の工程と、
前記半導体素子の上面を前記発光素子の搭載部の上面よりも下に配置して、前記凹部に前記半導体素子を収納する第二の工程と、
前記発光素子および前記導電性ワイヤを配置する第三の工程と、
前記凹部内に空洞を形成しながら、少なくとも前記発光素子および前記凹部の開口部を覆う透光性部材を前記支持体に配置する第四の工程と、を有することを特徴とする発光装置の製造方法。
A light emitting element, a package in which the light emitting element is disposed, and an electrode provided on the package and a conductive wire that connects the electrode of the light emitting element, and the package covers at least the light emitting element. A light-emitting device comprising: a light-transmitting member; a mounting portion on which the light-emitting element is disposed; and a support body that has a recess that houses a semiconductor element different from the light-emitting element.
A first step of forming a support having a recess opening on an upper surface on which the light emitting element is mounted;
A second step of disposing the upper surface of the semiconductor element below the upper surface of the mounting portion of the light emitting element and storing the semiconductor element in the recess;
A third step of disposing the light emitting element and the conductive wire;
And a fourth step of disposing a translucent member covering at least the light emitting element and the opening of the recess on the support while forming a cavity in the recess. Method.
前記第四の工程は、前記発光素子が搭載された上面に対して略平行な方向に、前記透光性部材の材料を連続的に供給する工程を含む請求項6に記載の発光装置の製造方法。   The light emitting device manufacturing method according to claim 6, wherein the fourth step includes a step of continuously supplying a material of the light transmissive member in a direction substantially parallel to an upper surface on which the light emitting element is mounted. Method. 前記透光性部材の材料の粘度は、前記半導体素子に対する前記凹部の大きさに基づいて、前記第四の工程にて前記凹部に気泡が残存するように調整されている請求項7に記載の発光装置の製造方法。   The viscosity of the material of the translucent member is adjusted based on the size of the recess with respect to the semiconductor element so that bubbles remain in the recess in the fourth step. Manufacturing method of light-emitting device. 前記透光性部材の材料は、シリコーン樹脂またはエポキシ樹脂から選択された少なくとも一種以上の樹脂を含み、その樹脂に粒子状蛍光体が含有されたものである請求項7または8に記載の発光装置の製造方法。   The light-emitting device according to claim 7 or 8, wherein the material of the translucent member includes at least one resin selected from a silicone resin or an epoxy resin, and the resin contains a particulate phosphor. Manufacturing method. 前記透光性部材の材料の粘度は、200Pa・s以上500Pa・s以下である請求項8または9に記載の発光装置の製造方法。   The method for manufacturing a light emitting device according to claim 8 or 9, wherein the material of the light transmissive member has a viscosity of 200 Pa · s to 500 Pa · s. 前記凹部の開口部を平面視した外形と、前記凹部に収納された半導体素子を平面視した外形との相似比は、1.0から2.5であり、前記凹部の深さと、前記凹部に収納された半導体素子の高さとの比は、1.0から2.14である請求項6から10のいずれか一項に記載の発光装置の製造方法。   The similarity ratio between the outer shape of the opening of the recess in plan view and the outer shape of the semiconductor element accommodated in the recess in plan view is 1.0 to 2.5, and the depth of the recess and the recess The method for manufacturing a light emitting device according to any one of claims 6 to 10, wherein a ratio to a height of the housed semiconductor element is 1.0 to 2.14.
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