JP4235580B2 - 誘電体 - Google Patents

誘電体 Download PDF

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Publication number
JP4235580B2
JP4235580B2 JP2004135626A JP2004135626A JP4235580B2 JP 4235580 B2 JP4235580 B2 JP 4235580B2 JP 2004135626 A JP2004135626 A JP 2004135626A JP 2004135626 A JP2004135626 A JP 2004135626A JP 4235580 B2 JP4235580 B2 JP 4235580B2
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Japan
Prior art keywords
dielectric
gas
plasma
side electrode
flow path
Prior art date
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Expired - Fee Related
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JP2004135626A
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English (en)
Japanese (ja)
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JP2005313108A5 (enExample
JP2005313108A (ja
Inventor
芳昭 金子
敏司 西口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2004135626A priority Critical patent/JP4235580B2/ja
Priority to US11/086,299 priority patent/US20050214181A1/en
Publication of JP2005313108A publication Critical patent/JP2005313108A/ja
Publication of JP2005313108A5 publication Critical patent/JP2005313108A5/ja
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Publication of JP4235580B2 publication Critical patent/JP4235580B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Treating Waste Gases (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP2004135626A 2004-03-26 2004-04-30 誘電体 Expired - Fee Related JP4235580B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004135626A JP4235580B2 (ja) 2004-04-30 2004-04-30 誘電体
US11/086,299 US20050214181A1 (en) 2004-03-26 2005-03-23 Dielectric, gas treatment apparatus using the same, and plasma generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004135626A JP4235580B2 (ja) 2004-04-30 2004-04-30 誘電体

Publications (3)

Publication Number Publication Date
JP2005313108A JP2005313108A (ja) 2005-11-10
JP2005313108A5 JP2005313108A5 (enExample) 2007-06-14
JP4235580B2 true JP4235580B2 (ja) 2009-03-11

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ID=35441100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004135626A Expired - Fee Related JP4235580B2 (ja) 2004-03-26 2004-04-30 誘電体

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JP (1) JP4235580B2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007190498A (ja) * 2006-01-19 2007-08-02 Gunma Univ ガス処理方法及びその装置
JP4718344B2 (ja) * 2006-02-22 2011-07-06 三菱電機株式会社 空気浄化装置およびそれを用いた空気浄化方法
JP2007307514A (ja) * 2006-05-22 2007-11-29 Sharp Corp 気体浄化装置
JP5369448B2 (ja) * 2007-04-03 2013-12-18 三菱電機株式会社 放電電極およびそれを用いた空気浄化装置
JP2009202137A (ja) * 2008-02-29 2009-09-10 Mitsubishi Electric Corp 空気処理装置
JP5999747B2 (ja) * 2010-09-14 2016-09-28 株式会社Ｎｂｃメッシュテック 低温プラズマと触媒フィルターを用いるガス浄化方法及びその浄化装置
JP5720440B2 (ja) * 2011-06-30 2015-05-20 住友電気工業株式会社 ガス収着回収素子、ガス収着回収素子の製造方法及びガス収着回収装置
JP6111198B2 (ja) * 2011-09-21 2017-04-05 株式会社Ｎｂｃメッシュテック 低温プラズマと触媒体を用いるガス処理装置および方法
JP5831843B2 (ja) * 2011-11-04 2015-12-09 住友電気工業株式会社 ガス収着回収素子、ガス収着回収素子の製造方法及びガス収着回収装置
JP7090279B2 (ja) * 2018-03-29 2022-06-24 国立大学法人東海国立大学機構 水素精製装置及び水素精製方法
JP7072168B2 (ja) 2018-06-05 2022-05-20 国立大学法人東海国立大学機構 水素リサイクルシステム及び水素リサイクル方法
JP2022072508A (ja) * 2020-10-30 2022-05-17 泰男 石川 炭酸ガス減少装置

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Publication number Publication date
JP2005313108A (ja) 2005-11-10

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