JP4197149B2 - スパッタリング装置 - Google Patents
スパッタリング装置 Download PDFInfo
- Publication number
- JP4197149B2 JP4197149B2 JP2003387309A JP2003387309A JP4197149B2 JP 4197149 B2 JP4197149 B2 JP 4197149B2 JP 2003387309 A JP2003387309 A JP 2003387309A JP 2003387309 A JP2003387309 A JP 2003387309A JP 4197149 B2 JP4197149 B2 JP 4197149B2
- Authority
- JP
- Japan
- Prior art keywords
- target
- outer peripheral
- plasma
- sputtering
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003387309A JP4197149B2 (ja) | 2003-11-18 | 2003-11-18 | スパッタリング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003387309A JP4197149B2 (ja) | 2003-11-18 | 2003-11-18 | スパッタリング装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005146369A JP2005146369A (ja) | 2005-06-09 |
| JP2005146369A5 JP2005146369A5 (https=) | 2006-11-24 |
| JP4197149B2 true JP4197149B2 (ja) | 2008-12-17 |
Family
ID=34694690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003387309A Expired - Fee Related JP4197149B2 (ja) | 2003-11-18 | 2003-11-18 | スパッタリング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4197149B2 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007011026A (ja) * | 2005-06-30 | 2007-01-18 | Ricoh Co Ltd | 導電性部材、プロセスカートリッジ及び画像形成装置 |
| JP4882332B2 (ja) * | 2005-10-11 | 2012-02-22 | 大日本印刷株式会社 | スパッタ装置 |
| JP5300066B2 (ja) * | 2009-04-15 | 2013-09-25 | 株式会社昭和真空 | マグネトロンカソード |
| TWI558832B (zh) * | 2011-12-30 | 2016-11-21 | Hoya Corp | An optical element, an optical thin film forming apparatus, and an optical thin film forming method |
| CN116213992A (zh) * | 2022-09-07 | 2023-06-06 | 有研稀土新材料股份有限公司 | 一种稀土靶材、背板及稀土靶材焊接方法 |
-
2003
- 2003-11-18 JP JP2003387309A patent/JP4197149B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2005146369A (ja) | 2005-06-09 |
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