JP4174193B2 - 電子線またはｘ線用ポジ型レジスト組成物 - Google Patents

電子線またはｘ線用ポジ型レジスト組成物 Download PDF

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Publication number
JP4174193B2
JP4174193B2 JP2001138738A JP2001138738A JP4174193B2 JP 4174193 B2 JP4174193 B2 JP 4174193B2 JP 2001138738 A JP2001138738 A JP 2001138738A JP 2001138738 A JP2001138738 A JP 2001138738A JP 4174193 B2 JP4174193 B2 JP 4174193B2
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JP
Japan
Prior art keywords
group
formula
electron beam
acid
integer
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Expired - Fee Related
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JP2001138738A
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Japanese (ja)
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JP2002333713A (ja
JP2002333713A5 (enExample
Inventor
知也 佐々木
一良 水谷
浩司 白川
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Fujifilm Corp
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Fujifilm Corp
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Priority to JP2001138738A priority Critical patent/JP4174193B2/ja
Priority to TW091109156A priority patent/TW562999B/zh
Priority to KR1020020025232A priority patent/KR100886635B1/ko
Publication of JP2002333713A publication Critical patent/JP2002333713A/ja
Publication of JP2002333713A5 publication Critical patent/JP2002333713A5/ja
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Publication of JP4174193B2 publication Critical patent/JP4174193B2/ja
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Expired - Fee Related legal-status Critical Current

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP2001138738A 2001-05-09 2001-05-09 電子線またはｘ線用ポジ型レジスト組成物 Expired - Fee Related JP4174193B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2001138738A JP4174193B2 (ja) 2001-05-09 2001-05-09 電子線またはｘ線用ポジ型レジスト組成物
TW091109156A TW562999B (en) 2001-05-09 2002-05-02 Positive resist composition for electronic or X-rays
KR1020020025232A KR100886635B1 (ko) 2001-05-09 2002-05-08 전자선 또는 엑스선용 포지티브 레지스트 조성물

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001138738A JP4174193B2 (ja) 2001-05-09 2001-05-09 電子線またはｘ線用ポジ型レジスト組成物

Publications (3)

Publication Number Publication Date
JP2002333713A JP2002333713A (ja) 2002-11-22
JP2002333713A5 JP2002333713A5 (enExample) 2006-01-19
JP4174193B2 true JP4174193B2 (ja) 2008-10-29

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JP2001138738A Expired - Fee Related JP4174193B2 (ja) 2001-05-09 2001-05-09 電子線またはｘ線用ポジ型レジスト組成物

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JP (1) JP4174193B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4149306B2 (ja) * 2003-04-30 2008-09-10 東京応化工業株式会社 ポジ型レジスト組成物およびレジストパターン形成方法
JP5039410B2 (ja) * 2007-03-29 2012-10-03 富士フイルム株式会社 ポジ型レジスト組成物およびこれを用いたパターン形成方法
JP5141106B2 (ja) * 2007-06-22 2013-02-13 住友化学株式会社 化学増幅型ポジ型レジスト組成物及びヒドロキシスチレン誘導体
JP5514583B2 (ja) * 2009-03-13 2014-06-04 富士フイルム株式会社 感活性光線性または感放射線性樹脂組成物及び該組成物を用いたパターン形成方法
JP5264654B2 (ja) * 2009-08-31 2013-08-14 富士フイルム株式会社 感活性光線性又は感放射線性樹脂組成物、及びそれを用いたパターン形成方法
JP5850863B2 (ja) 2010-02-24 2016-02-03 ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ 潜在性酸及びそれらの使用
JP5141838B2 (ja) * 2012-01-17 2013-02-13 住友化学株式会社 化学増幅型ポジ型レジスト組成物
JP2012117073A (ja) * 2012-01-17 2012-06-21 Sumitomo Chemical Co Ltd ヒドロキシスチレン誘導体

Also Published As

Publication number Publication date
JP2002333713A (ja) 2002-11-22

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