JP4172100B2 - 圧電振動角速度センサー及びその振動子の製造方法 - Google Patents

圧電振動角速度センサー及びその振動子の製造方法 Download PDF

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Publication number
JP4172100B2
JP4172100B2 JP19292999A JP19292999A JP4172100B2 JP 4172100 B2 JP4172100 B2 JP 4172100B2 JP 19292999 A JP19292999 A JP 19292999A JP 19292999 A JP19292999 A JP 19292999A JP 4172100 B2 JP4172100 B2 JP 4172100B2
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electrode
vibrator
piezoelectric body
angular velocity
electrodes
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Japanese (ja)
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JP2001021359A5 (enExample
JP2001021359A (ja
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美根生 頼住
俊行 川村
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Sony Corp
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Sony Corp
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JP19292999A 1999-07-07 1999-07-07 圧電振動角速度センサー及びその振動子の製造方法 Expired - Fee Related JP4172100B2 (ja)

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JP19292999A JP4172100B2 (ja) 1999-07-07 1999-07-07 圧電振動角速度センサー及びその振動子の製造方法

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JP19292999A JP4172100B2 (ja) 1999-07-07 1999-07-07 圧電振動角速度センサー及びその振動子の製造方法

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JP2001021359A JP2001021359A (ja) 2001-01-26
JP2001021359A5 JP2001021359A5 (enExample) 2005-07-21
JP4172100B2 true JP4172100B2 (ja) 2008-10-29

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JP19292999A Expired - Fee Related JP4172100B2 (ja) 1999-07-07 1999-07-07 圧電振動角速度センサー及びその振動子の製造方法

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4636086B2 (ja) * 2005-11-21 2011-02-23 株式会社村田製作所 振動子およびその製造方法
JP6253261B2 (ja) * 2013-05-30 2017-12-27 キヤノン株式会社 振動型アクチュエータおよび光学機器

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JP2001021359A (ja) 2001-01-26

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