JP4167738B2 - 固体デバイス製造装置の状態出力装置 - Google Patents

固体デバイス製造装置の状態出力装置 Download PDF

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Publication number
JP4167738B2
JP4167738B2 JP28694197A JP28694197A JP4167738B2 JP 4167738 B2 JP4167738 B2 JP 4167738B2 JP 28694197 A JP28694197 A JP 28694197A JP 28694197 A JP28694197 A JP 28694197A JP 4167738 B2 JP4167738 B2 JP 4167738B2
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state
data
device manufacturing
display data
display
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Expired - Fee Related
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JP28694197A
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Japanese (ja)
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JPH11121319A5 (enExample
JPH11121319A (ja
Inventor
康資 田中
俊光 浦辺
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Kokusai Denki Electric Inc
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Hitachi Kokusai Electric Inc
Kokusai Denki Electric Inc
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Priority to JP28694197A priority Critical patent/JP4167738B2/ja
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Publication of JPH11121319A5 publication Critical patent/JPH11121319A5/ja
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JP28694197A 1997-10-20 1997-10-20 固体デバイス製造装置の状態出力装置 Expired - Fee Related JP4167738B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28694197A JP4167738B2 (ja) 1997-10-20 1997-10-20 固体デバイス製造装置の状態出力装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28694197A JP4167738B2 (ja) 1997-10-20 1997-10-20 固体デバイス製造装置の状態出力装置

Related Child Applications (1)

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JP2008111320A Division JP4975680B2 (ja) 2008-04-22 2008-04-22 固体デバイス製造システム及び状態表示方法

Publications (3)

Publication Number Publication Date
JPH11121319A JPH11121319A (ja) 1999-04-30
JPH11121319A5 JPH11121319A5 (enExample) 2005-06-23
JP4167738B2 true JP4167738B2 (ja) 2008-10-22

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JP28694197A Expired - Fee Related JP4167738B2 (ja) 1997-10-20 1997-10-20 固体デバイス製造装置の状態出力装置

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002008956A (ja) * 2000-06-16 2002-01-11 Tokyo Electron Ltd 半導体製造装置における状態情報表示方法及び半導体製造装置
JP2013058780A (ja) * 2012-11-08 2013-03-28 Hitachi Kokusai Electric Inc 基板処理システム、外部接続装置及び基板処理装置のデータ処理方法

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JPH11121319A (ja) 1999-04-30

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