JP4167577B2 - 固体撮像装置 - Google Patents
固体撮像装置 Download PDFInfo
- Publication number
- JP4167577B2 JP4167577B2 JP2003333903A JP2003333903A JP4167577B2 JP 4167577 B2 JP4167577 B2 JP 4167577B2 JP 2003333903 A JP2003333903 A JP 2003333903A JP 2003333903 A JP2003333903 A JP 2003333903A JP 4167577 B2 JP4167577 B2 JP 4167577B2
- Authority
- JP
- Japan
- Prior art keywords
- solid
- state imaging
- imaging device
- insulating substrate
- convex portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000003384 imaging method Methods 0.000 title claims description 100
- 239000000758 substrate Substances 0.000 claims description 68
- 239000004020 conductor Substances 0.000 claims description 36
- 229910001080 W alloy Inorganic materials 0.000 claims description 12
- SBYXRAKIOMOBFF-UHFFFAOYSA-N copper tungsten Chemical compound [Cu].[W] SBYXRAKIOMOBFF-UHFFFAOYSA-N 0.000 claims description 12
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 239000000919 ceramic Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 11
- 230000007257 malfunction Effects 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 230000006378 damage Effects 0.000 description 8
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 8
- 229910000679 solder Inorganic materials 0.000 description 8
- 239000010931 gold Substances 0.000 description 7
- 238000007789 sealing Methods 0.000 description 7
- 239000010949 copper Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 238000001465 metallisation Methods 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000004080 punching Methods 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- 239000010944 silver (metal) Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000002241 glass-ceramic Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910052863 mullite Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Description
1a:凹部
2:配線導体
3:固体撮像素子
3a:電極
4:絶縁基板
5:凸部
6:貫通孔
7:接続パッド
8:貫通導体
9:ボンディングワイヤ
10:蓋体
11:台座
Claims (5)
- 上面の中央部に凹部を有する絶縁基体と、前記凹部の内側から外側にかけて形成された配線導体と、前記凹部内に収容され搭載されるとともに前記配線導体に電気的に接続される固体撮像素子とを具備している固体撮像装置において、前記凹部の底面に設けられた凸部の上面に設置された、複数の貫通孔が形成されるとともに上下面の外周部に貫通導体を介して互いに電気的に導通する接続パッドがそれぞれ形成された絶縁基板と、該絶縁基板の上面の中央部に搭載されるとともに裏面の電極が前記絶縁基板の下面側の前記接続パッドに前記貫通孔を通したボンディングワイヤを介して電気的に接続された前記固体撮像素子と、前記絶縁基板の上面側の前記接続パッドと前記配線導体とを電気的に接続する他のボンディングワイヤとを具備していることを特徴とする固体撮像装置。
- 前記凹部は、その底面の前記凸部の周囲に前記絶縁基板を支持する台座が形成されていることを特徴とする請求項1記載の固体撮像装置。
- 前記凸部は、前記凹部の底面に載置されたペルチェ素子から成ることを特徴とする請求項1または請求項2記載の固体撮像装置。
- 前記凸部は、前記凹部の底面に載置された銅−タングステン合金から成る基台であることを特徴とする請求項1または請求項2記載の固体撮像装置。
- 前記凸部は、前記凹部の底面を貫通する銅−タングステン合金から成る支持部材の上端部であることを特徴とする請求項1または請求項2記載の固体撮像装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003333903A JP4167577B2 (ja) | 2003-08-27 | 2003-09-25 | 固体撮像装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003302420 | 2003-08-27 | ||
JP2003333903A JP4167577B2 (ja) | 2003-08-27 | 2003-09-25 | 固体撮像装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005101341A JP2005101341A (ja) | 2005-04-14 |
JP4167577B2 true JP4167577B2 (ja) | 2008-10-15 |
Family
ID=34467198
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003333903A Expired - Fee Related JP4167577B2 (ja) | 2003-08-27 | 2003-09-25 | 固体撮像装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4167577B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006332841A (ja) * | 2005-05-24 | 2006-12-07 | Shimadzu Corp | 撮像素子組立体 |
JP2011014615A (ja) * | 2009-06-30 | 2011-01-20 | Denso Corp | センサ装置およびその製造方法 |
JP6083554B2 (ja) * | 2012-08-07 | 2017-02-22 | 国立大学法人静岡大学 | 撮像モジュール |
JP2015096882A (ja) * | 2013-11-15 | 2015-05-21 | セイコーエプソン株式会社 | 電気光学装置および投射型表示装置 |
JP6501606B2 (ja) * | 2015-05-19 | 2019-04-17 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP7227019B2 (ja) * | 2019-01-30 | 2023-02-21 | 京セラ株式会社 | 電子素子実装用基板、電子装置、および電子モジュール |
-
2003
- 2003-09-25 JP JP2003333903A patent/JP4167577B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2005101341A (ja) | 2005-04-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2006201427A (ja) | 撮像素子収納用パッケージ、撮像装置および撮像モジュール | |
JPWO2020045480A1 (ja) | 配線基板、電子装置および電子モジュール | |
JP6423141B2 (ja) | 発光素子搭載用部品および発光装置 | |
JP4167577B2 (ja) | 固体撮像装置 | |
CN111466028A (zh) | 摄像元件安装用基板、摄像装置以及摄像模块 | |
JP2004281996A (ja) | 発光素子収納用パッケージおよび発光装置 | |
JP4336153B2 (ja) | 発光素子収納用パッケージおよび発光装置 | |
JP2005311144A (ja) | 電子部品収納用パッケージおよび電子装置 | |
JP2004254037A (ja) | 撮像装置 | |
JP7033974B2 (ja) | セラミック回路基板、パッケージおよび電子装置 | |
JP2001102502A (ja) | イメージセンサ素子収納用パッケージ | |
JP6184106B2 (ja) | 固体撮像素子用中空パッケージ、固体撮像素子及び固体撮像装置 | |
JP4203501B2 (ja) | 半導体装置 | |
JP2003068900A (ja) | 電子部品収納用パッケージ | |
JP2763417B2 (ja) | 半導体素子収納用パッケージの製造方法 | |
JP2005340444A (ja) | 電子部品収納用パッケージ | |
JP2007035906A (ja) | 電子部品収納用パッケージおよび該パッケージを備える電子装置 | |
JP2005278092A (ja) | 撮像装置 | |
JP2007059746A (ja) | 電子部品収納用パッケージおよび電子装置 | |
JP4557405B2 (ja) | 圧力検出装置用パッケージ | |
JP4789357B2 (ja) | 圧力検出装置用パッケージ | |
JP3420476B2 (ja) | 半導体素子収納用パッケージ | |
JP3439844B2 (ja) | 半導体素子収納用パッケージ | |
JP2005243969A (ja) | 撮像装置 | |
JP6030419B2 (ja) | 配線基板および電子装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060912 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20080701 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20080708 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20080801 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4167577 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110808 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110808 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120808 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130808 Year of fee payment: 5 |
|
LAPS | Cancellation because of no payment of annual fees |