JP4164421B2 - 揺動装置、揺動装置を用いた光偏向器、及び光偏向器を用いた画像表示装置、画像形成装置、並びにその製法 - Google Patents

揺動装置、揺動装置を用いた光偏向器、及び光偏向器を用いた画像表示装置、画像形成装置、並びにその製法 Download PDF

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Publication number
JP4164421B2
JP4164421B2 JP2003301125A JP2003301125A JP4164421B2 JP 4164421 B2 JP4164421 B2 JP 4164421B2 JP 2003301125 A JP2003301125 A JP 2003301125A JP 2003301125 A JP2003301125 A JP 2003301125A JP 4164421 B2 JP4164421 B2 JP 4164421B2
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Japan
Prior art keywords
movable plate
coil
optical deflector
magnetic field
elastic support
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2003301125A
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English (en)
Japanese (ja)
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JP2004110005A (ja
JP2004110005A5 (https=
Inventor
太 廣瀬
貴久 加藤
康弘 島田
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Canon Inc
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Canon Inc
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Priority to JP2003301125A priority Critical patent/JP4164421B2/ja
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Publication of JP2004110005A5 publication Critical patent/JP2004110005A5/ja
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  • Laser Beam Printer (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
JP2003301125A 2002-08-26 2003-08-26 揺動装置、揺動装置を用いた光偏向器、及び光偏向器を用いた画像表示装置、画像形成装置、並びにその製法 Expired - Fee Related JP4164421B2 (ja)

Priority Applications (1)

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JP2003301125A JP4164421B2 (ja) 2002-08-26 2003-08-26 揺動装置、揺動装置を用いた光偏向器、及び光偏向器を用いた画像表示装置、画像形成装置、並びにその製法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002246008 2002-08-26
JP2003301125A JP4164421B2 (ja) 2002-08-26 2003-08-26 揺動装置、揺動装置を用いた光偏向器、及び光偏向器を用いた画像表示装置、画像形成装置、並びにその製法

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JP2004110005A JP2004110005A (ja) 2004-04-08
JP2004110005A5 JP2004110005A5 (https=) 2006-10-05
JP4164421B2 true JP4164421B2 (ja) 2008-10-15

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JP2003301125A Expired - Fee Related JP4164421B2 (ja) 2002-08-26 2003-08-26 揺動装置、揺動装置を用いた光偏向器、及び光偏向器を用いた画像表示装置、画像形成装置、並びにその製法

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Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100644896B1 (ko) * 2005-01-19 2006-11-14 엘지전자 주식회사 전자력 구동 스캐닝 마이크로미러 및 이를 사용한광스캐닝 장치
JP4525652B2 (ja) * 2006-09-19 2010-08-18 セイコーエプソン株式会社 アクチュエータ、光スキャナ、および画像形成装置
JP4232835B2 (ja) 2007-03-07 2009-03-04 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
KR101511145B1 (ko) * 2013-05-27 2015-04-10 주식회사 센플러스 전자력 구동 액추에이터
JPWO2015092907A1 (ja) * 2013-12-19 2017-03-16 パイオニア株式会社 駆動装置
DE102015217935B4 (de) 2015-09-18 2025-12-24 Robert Bosch Gmbh Mikromechanische Aktorvorrichtung und Verfahren zum Verkippen einer mikromechanischen Aktorvorrichtung
JP6233396B2 (ja) * 2015-12-09 2017-11-22 ミツミ電機株式会社 光走査装置
JP6455547B2 (ja) * 2017-05-24 2019-01-23 ミツミ電機株式会社 光走査装置
JP2018128700A (ja) * 2018-05-09 2018-08-16 パイオニア株式会社 駆動装置
JP2022033852A (ja) * 2020-01-17 2022-03-02 パイオニア株式会社 駆動装置
JP2020092594A (ja) * 2020-01-17 2020-06-11 パイオニア株式会社 駆動装置
CN115210626B (zh) * 2020-03-12 2024-04-16 三菱电机株式会社 光扫描装置、测距装置以及光扫描装置的制造方法
WO2023058226A1 (ja) 2021-10-08 2023-04-13 Ｙｉｔｏａマイクロテクノロジー株式会社 反射体スキャナ
JP2023095943A (ja) * 2021-11-30 2023-07-06 パイオニア株式会社 駆動装置

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