JP4148643B2 - プラズマ耐食性に優れた石英ガラス及び石英ガラス治具並びにそれらの製造方法 - Google Patents

プラズマ耐食性に優れた石英ガラス及び石英ガラス治具並びにそれらの製造方法 Download PDF

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Publication number
JP4148643B2
JP4148643B2 JP2000390823A JP2000390823A JP4148643B2 JP 4148643 B2 JP4148643 B2 JP 4148643B2 JP 2000390823 A JP2000390823 A JP 2000390823A JP 2000390823 A JP2000390823 A JP 2000390823A JP 4148643 B2 JP4148643 B2 JP 4148643B2
Authority
JP
Japan
Prior art keywords
quartz glass
corrosion resistance
aluminum
results
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000390823A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002137927A5 (enExample
JP2002137927A (ja
Inventor
龍弘 佐藤
宜正 吉田
朗 藤ノ木
恭一 稲木
智之 白井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Quartz Products Co Ltd
Original Assignee
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Quartz Products Co Ltd filed Critical Shin Etsu Quartz Products Co Ltd
Priority to JP2000390823A priority Critical patent/JP4148643B2/ja
Priority to US09/935,334 priority patent/US6887576B2/en
Priority to DE60131937T priority patent/DE60131937T2/de
Priority to EP01120271A priority patent/EP1188722B1/en
Priority to TW90125703A priority patent/TW534896B/zh
Priority to KR10-2001-0071762A priority patent/KR100458414B1/ko
Priority to SG200107480A priority patent/SG90270A1/en
Publication of JP2002137927A publication Critical patent/JP2002137927A/ja
Publication of JP2002137927A5 publication Critical patent/JP2002137927A5/ja
Priority to US11/633,136 priority patent/USRE41249E1/en
Application granted granted Critical
Publication of JP4148643B2 publication Critical patent/JP4148643B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/01—Other methods of shaping glass by progressive fusion or sintering of powdered glass onto a shaping substrate, i.e. accretion, e.g. plasma oxidation deposition
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/32—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with aluminium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/34—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with rare earth metals, i.e. with Sc, Y or lanthanides, e.g. for laser-amplifiers

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Glass Compositions (AREA)
JP2000390823A 2000-08-23 2000-12-22 プラズマ耐食性に優れた石英ガラス及び石英ガラス治具並びにそれらの製造方法 Expired - Fee Related JP4148643B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2000390823A JP4148643B2 (ja) 2000-08-23 2000-12-22 プラズマ耐食性に優れた石英ガラス及び石英ガラス治具並びにそれらの製造方法
US09/935,334 US6887576B2 (en) 2000-08-23 2001-08-22 Quartz glass body having improved resistance against plasma corrosion, and method for production thereof
EP01120271A EP1188722B1 (en) 2000-08-23 2001-08-23 Article comprising a body made of quartz glass having improved resistance against plasma corrosion, and method for production thereof
DE60131937T DE60131937T2 (de) 2000-08-23 2001-08-23 Artikel bestehend aus einem Glaskörper mit verbesserten Eigenschaften gegen Plasmakorrosion und Verfahren zu dessen Herstellung
TW90125703A TW534896B (en) 2000-12-22 2001-10-17 Quartz glass, quartz glass jig and method for production thereof
KR10-2001-0071762A KR100458414B1 (ko) 2000-12-22 2001-11-19 석영유리와 석영유리 치구 및 그들의 제조방법
SG200107480A SG90270A1 (en) 2000-12-22 2001-11-30 Quartz glass and quartz glass jig having excellent resistance against plasma corrosion, and method for producing the same
US11/633,136 USRE41249E1 (en) 2000-08-23 2006-11-30 Quartz glass body having improved resistance against plasma corrosion, and method for production thereof

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000252993 2000-08-23
JP2000-252993 2000-08-23
JP2000390823A JP4148643B2 (ja) 2000-08-23 2000-12-22 プラズマ耐食性に優れた石英ガラス及び石英ガラス治具並びにそれらの製造方法

Publications (3)

Publication Number Publication Date
JP2002137927A JP2002137927A (ja) 2002-05-14
JP2002137927A5 JP2002137927A5 (enExample) 2005-06-30
JP4148643B2 true JP4148643B2 (ja) 2008-09-10

Family

ID=26598333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000390823A Expired - Fee Related JP4148643B2 (ja) 2000-08-23 2000-12-22 プラズマ耐食性に優れた石英ガラス及び石英ガラス治具並びにそれらの製造方法

Country Status (1)

Country Link
JP (1) JP4148643B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4744003B2 (ja) * 2001-06-01 2011-08-10 東ソー株式会社 ジルコニウムの均一な分散性を有する石英ガラス、その製造方法、これを用いた部材及び装置
US7084084B2 (en) 2002-03-11 2006-08-01 Tosoh Corporation Highly durable silica glass, process for producing same, member comprised thereof, and apparatus provided therewith
US7365037B2 (en) * 2004-09-30 2008-04-29 Shin-Etsu Quartz Products Co., Ltd. Quartz glass having excellent resistance against plasma corrosion and method for producing the same
DE102005017739B4 (de) * 2005-04-15 2009-11-05 Heraeus Quarzglas Gmbh & Co. Kg Halter aus Quarzglas für die Prozessierung von Halbleiterwafern und Verfahren zur Herstellung des Halters
JP5001524B2 (ja) * 2005-04-28 2012-08-15 信越石英株式会社 石英ガラス製治具の再生方法

Also Published As

Publication number Publication date
JP2002137927A (ja) 2002-05-14

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