JP4147950B2 - 接合方法及び装置 - Google Patents

接合方法及び装置 Download PDF

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Publication number
JP4147950B2
JP4147950B2 JP2003017377A JP2003017377A JP4147950B2 JP 4147950 B2 JP4147950 B2 JP 4147950B2 JP 2003017377 A JP2003017377 A JP 2003017377A JP 2003017377 A JP2003017377 A JP 2003017377A JP 4147950 B2 JP4147950 B2 JP 4147950B2
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Japan
Prior art keywords
holder
substrate
holding
electronic component
plasma
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Expired - Fee Related
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JP2003017377A
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English (en)
Japanese (ja)
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JP2004223600A (ja
JP2004223600A5 (enrdf_load_stackoverflow
Inventor
智洋 奥村
光央 斎藤
和司 東
直樹 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Priority to JP2003017377A priority Critical patent/JP4147950B2/ja
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Publication of JP2004223600A5 publication Critical patent/JP2004223600A5/ja
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Publication of JP4147950B2 publication Critical patent/JP4147950B2/ja
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  • Pressure Welding/Diffusion-Bonding (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
  • Connections Effected By Soldering, Adhesion, Or Permanent Deformation (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Plasma Technology (AREA)
JP2003017377A 2003-01-27 2003-01-27 接合方法及び装置 Expired - Fee Related JP4147950B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003017377A JP4147950B2 (ja) 2003-01-27 2003-01-27 接合方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003017377A JP4147950B2 (ja) 2003-01-27 2003-01-27 接合方法及び装置

Publications (3)

Publication Number Publication Date
JP2004223600A JP2004223600A (ja) 2004-08-12
JP2004223600A5 JP2004223600A5 (enrdf_load_stackoverflow) 2006-01-19
JP4147950B2 true JP4147950B2 (ja) 2008-09-10

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ID=32904543

Family Applications (1)

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JP2003017377A Expired - Fee Related JP4147950B2 (ja) 2003-01-27 2003-01-27 接合方法及び装置

Country Status (1)

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JP (1) JP4147950B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4697066B2 (ja) 2006-06-22 2011-06-08 パナソニック株式会社 電極接合方法及び部品実装装置
JP5339232B2 (ja) * 2009-05-27 2013-11-13 株式会社エスイー 電気部品の接続方法とその接続装置

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Publication number Publication date
JP2004223600A (ja) 2004-08-12

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