JP4138057B2 - 半導体製造装置 - Google Patents

半導体製造装置 Download PDF

Info

Publication number
JP4138057B2
JP4138057B2 JP00025498A JP25498A JP4138057B2 JP 4138057 B2 JP4138057 B2 JP 4138057B2 JP 00025498 A JP00025498 A JP 00025498A JP 25498 A JP25498 A JP 25498A JP 4138057 B2 JP4138057 B2 JP 4138057B2
Authority
JP
Japan
Prior art keywords
area
buzzer
abnormality
sounding
display
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP00025498A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11194819A (ja
JPH11194819A5 (enExample
Inventor
行雄 尾崎
直樹 田頭
礼三 布澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Kokusai Denki Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc, Kokusai Denki Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP00025498A priority Critical patent/JP4138057B2/ja
Publication of JPH11194819A publication Critical patent/JPH11194819A/ja
Publication of JPH11194819A5 publication Critical patent/JPH11194819A5/ja
Application granted granted Critical
Publication of JP4138057B2 publication Critical patent/JP4138057B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Testing And Monitoring For Control Systems (AREA)
  • Emergency Alarm Devices (AREA)
  • Alarm Systems (AREA)
JP00025498A 1998-01-05 1998-01-05 半導体製造装置 Expired - Lifetime JP4138057B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP00025498A JP4138057B2 (ja) 1998-01-05 1998-01-05 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP00025498A JP4138057B2 (ja) 1998-01-05 1998-01-05 半導体製造装置

Publications (3)

Publication Number Publication Date
JPH11194819A JPH11194819A (ja) 1999-07-21
JPH11194819A5 JPH11194819A5 (enExample) 2005-06-23
JP4138057B2 true JP4138057B2 (ja) 2008-08-20

Family

ID=11468801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP00025498A Expired - Lifetime JP4138057B2 (ja) 1998-01-05 1998-01-05 半導体製造装置

Country Status (1)

Country Link
JP (1) JP4138057B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4949686B2 (ja) * 2006-01-20 2012-06-13 株式会社日立国際電気 基板処理装置および半導体集積回路装置の製造方法
JP2011221963A (ja) * 2010-04-14 2011-11-04 Terumo Corp 問い合わせ先情報管理システム及び問い合わせ先情報管理方法
JP7185486B2 (ja) * 2018-10-26 2022-12-07 株式会社ディスコ 加工装置

Also Published As

Publication number Publication date
JPH11194819A (ja) 1999-07-21

Similar Documents

Publication Publication Date Title
JP6484826B2 (ja) 製造装置監視システムならびに製造装置
JPH0737310B2 (ja) エレベータの監視装置
JP4138057B2 (ja) 半導体製造装置
JP2004227175A (ja) メンテナンスシステム
JP4851144B2 (ja) 防災監視システム
JPH0448249B2 (enExample)
JPH06175806A (ja) プラント監視装置
JP3031888B2 (ja) 表示装置
JP2003122428A (ja) 制御装置
JPH0535328A (ja) 監視方法
JPH05344647A (ja) 電力系統監視システムのマンマシンインターフェイス装置
KR102323844B1 (ko) 휴먼 머신 인터페이스 시스템에서 저장장치의 교체 방법
JPH08241110A (ja) 工作機械の制御装置
JPS6326798A (ja) プロセス警報表示装置
JP2878939B2 (ja) 監視制御システム
JP2000222251A (ja) 障害検出時の画面制御方法
JP2006285321A (ja) 安全計装システム
JPH04220099A (ja) 遠隔監視装置
JP5163867B2 (ja) ウィンドウ表示装置
JPH09152854A (ja) 画面制御方法及び装置及び部品実装機
JPS63153601A (ja) 操作スイツチの誤操作防止装置
JPH01286098A (ja) プロセス事象駆動形ウィンドウ表示装置
JPS62276693A (ja) 火災報知設備の表示装置
JPS6373753A (ja) ボタン電話装置
JPS63318614A (ja) コンピュ−タ無人化運転装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040929

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20040929

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050617

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20061206

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20061212

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070209

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070821

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20071019

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20080520

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20080605

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110613

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120613

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130613

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140613

Year of fee payment: 6

EXPY Cancellation because of completion of term