JP4114770B2 - 酸素イオン発生用真空処理装置 - Google Patents

酸素イオン発生用真空処理装置 Download PDF

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Publication number
JP4114770B2
JP4114770B2 JP2002018022A JP2002018022A JP4114770B2 JP 4114770 B2 JP4114770 B2 JP 4114770B2 JP 2002018022 A JP2002018022 A JP 2002018022A JP 2002018022 A JP2002018022 A JP 2002018022A JP 4114770 B2 JP4114770 B2 JP 4114770B2
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Prior art keywords
oxygen
ceramic substrate
porous ceramic
ions
vacuum processing
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JP2002018022A
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Japanese (ja)
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JP2003218096A5 (https=
JP2003218096A (ja
Inventor
義昭 阿川
俊 堀内
沈　　国華
山口　　広一
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Ulvac Inc
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Ulvac Inc
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  • Oxygen, Ozone, And Oxides In General (AREA)
JP2002018022A 2002-01-28 2002-01-28 酸素イオン発生用真空処理装置 Expired - Fee Related JP4114770B2 (ja)

Priority Applications (1)

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JP2002018022A JP4114770B2 (ja) 2002-01-28 2002-01-28 酸素イオン発生用真空処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002018022A JP4114770B2 (ja) 2002-01-28 2002-01-28 酸素イオン発生用真空処理装置

Publications (3)

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JP2003218096A JP2003218096A (ja) 2003-07-31
JP2003218096A5 JP2003218096A5 (https=) 2005-06-16
JP4114770B2 true JP4114770B2 (ja) 2008-07-09

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JP2002018022A Expired - Fee Related JP4114770B2 (ja) 2002-01-28 2002-01-28 酸素イオン発生用真空処理装置

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010052980A (ja) * 2008-08-28 2010-03-11 Tokyo Institute Of Technology 酸素原子発生装置
US9797054B2 (en) 2014-07-09 2017-10-24 Carleton Life Support Systems Inc. Pressure driven ceramic oxygen generation system with integrated manifold and tubes

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JP2003218096A (ja) 2003-07-31

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