JP4079972B2 - 直線駆動装置 - Google Patents
直線駆動装置 Download PDFInfo
- Publication number
- JP4079972B2 JP4079972B2 JP2006036802A JP2006036802A JP4079972B2 JP 4079972 B2 JP4079972 B2 JP 4079972B2 JP 2006036802 A JP2006036802 A JP 2006036802A JP 2006036802 A JP2006036802 A JP 2006036802A JP 4079972 B2 JP4079972 B2 JP 4079972B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- slider
- guide
- scale
- linear drive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
- H02K11/215—Magnetic effect devices, e.g. Hall-effect or magneto-resistive elements
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Mechanical Engineering (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
また、付加的効果として、ガイドとスライダとにより、駆動機構としてのリニアモータ機構が構成されているから、スライダを高速で直線移動させることができ、高能率加工を行うことができ、加工生産性を高めることが可能となる。
2 ガイド
5 鉄心
8 スライダ
9a コイル
11 リニアモータ機構
12 磁気的計測手段
13 磁気スケール
14 磁気ヘッド(検出器)
Claims (2)
- 永久磁石又は周囲の磁力によって磁化された心棒である磁性体を内部に有する固定側の真直のガイドと、該ガイドに沿って直線移動する可動側のスライダと、該スライダと前記ガイドとの磁気的相互作用により駆動力を生じて前記スライダを直線駆動するリニアモータ機構と、前記ガイドに対する前記スライダの相対的位置を計測するために、相対向しつつ互いの相対的な位置を変化させる一組の磁気スケール及び検出器を有する磁気的計測手段と、を備えた直線駆動装置において、
前記磁気スケールと前記検出器との対向方向が、前記ガイドの円周方向に一致し、かつ、前記磁性体から生じる放射状の磁力線に対して交差する方向であり、前記検出器が、前記磁性体から生じる放射状の磁力線による干渉を受けることが抑制された状態で、前記磁気スケールから前記スライダの位置に応じた信号を検出し、それを信号処理することで前記スライダの位置を計測することを特徴とする直線駆動装置。 - 前記スライダが、空気軸受で浮上支持されている請求項1に記載の直線駆動装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006036802A JP4079972B2 (ja) | 2006-02-14 | 2006-02-14 | 直線駆動装置 |
US11/672,513 US7528561B2 (en) | 2006-02-14 | 2007-02-07 | Linear drive apparatus |
DE602007001903T DE602007001903D1 (de) | 2006-02-14 | 2007-02-07 | Linearantriebsvorrichtung |
EP07002637A EP1818135B1 (en) | 2006-02-14 | 2007-02-07 | Linear drive apparatus |
CNA2007100055930A CN101021422A (zh) | 2006-02-14 | 2007-02-13 | 直线驱动装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006036802A JP4079972B2 (ja) | 2006-02-14 | 2006-02-14 | 直線駆動装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007218630A JP2007218630A (ja) | 2007-08-30 |
JP4079972B2 true JP4079972B2 (ja) | 2008-04-23 |
Family
ID=38050048
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006036802A Expired - Fee Related JP4079972B2 (ja) | 2006-02-14 | 2006-02-14 | 直線駆動装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7528561B2 (ja) |
EP (1) | EP1818135B1 (ja) |
JP (1) | JP4079972B2 (ja) |
CN (1) | CN101021422A (ja) |
DE (1) | DE602007001903D1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9325232B1 (en) | 2010-07-22 | 2016-04-26 | Linear Labs, Inc. | Method and apparatus for power generation |
US8888595B2 (en) | 2010-08-24 | 2014-11-18 | Qualcomm Incorporated | Inducing force into a non-anchored gaming device |
US8901783B2 (en) * | 2010-08-24 | 2014-12-02 | Qualcomm Incorporated | Handheld device force induction |
CN103250330B (zh) * | 2010-10-22 | 2016-09-14 | 弗雷德·E·汉斯德堡 | 一种改进的磁电机 |
WO2014036567A1 (en) | 2012-09-03 | 2014-03-06 | Linear Labs, Inc. | An improved transducer and method of operation |
US9219962B2 (en) | 2012-09-03 | 2015-12-22 | Linear Labs, Inc. | Transducer and method of operation |
EP3236215B1 (de) * | 2016-04-22 | 2018-06-27 | Siemens Aktiengesellschaft | Verfahren, linearantrieb und anlage |
KR101892129B1 (ko) | 2018-05-25 | 2018-10-04 | 주식회사 디엠티 | 진공 챔버 이송 장치 |
TWI689704B (zh) * | 2018-12-21 | 2020-04-01 | 財團法人工業技術研究院 | 磁性位置感知裝置與方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0297863U (ja) | 1989-01-19 | 1990-08-03 | ||
JPH0393454A (ja) | 1989-09-06 | 1991-04-18 | Shinko Electric Co Ltd | 位置検出用磁石の着磁方法 |
JP3125230B2 (ja) | 1992-01-07 | 2001-01-15 | 株式会社シコー技研 | リニア直流モ−タ内へのリニア磁気エンコ−ダの組込み形成方法 |
JPH0670534A (ja) | 1992-08-07 | 1994-03-11 | Yaskawa Electric Corp | リニアモータ |
US5565718A (en) * | 1993-04-23 | 1996-10-15 | Nippon Thompson Co., Ltd. | Direct current linear motor and a guide unit on which it is equipped |
JPH1061665A (ja) * | 1996-08-15 | 1998-03-06 | Nippon Thompson Co Ltd | スプライン軸受 |
US6008552A (en) * | 1996-12-30 | 1999-12-28 | Minolta Co., Ltd. | Linear drive device |
JPH11215795A (ja) | 1998-01-26 | 1999-08-06 | Tdk Corp | 磁気感応素子付き制御アクチュエータ及びレンズ鏡筒 |
JP2000139069A (ja) | 1998-10-30 | 2000-05-16 | Minolta Co Ltd | リニアモータ駆動装置 |
JP2001180512A (ja) * | 1999-10-13 | 2001-07-03 | Honda Motor Co Ltd | 後輪操舵装置の制御装置 |
JP2004166398A (ja) | 2002-11-13 | 2004-06-10 | Fuji Electric Fa Components & Systems Co Ltd | リニアモータ |
-
2006
- 2006-02-14 JP JP2006036802A patent/JP4079972B2/ja not_active Expired - Fee Related
-
2007
- 2007-02-07 US US11/672,513 patent/US7528561B2/en not_active Expired - Fee Related
- 2007-02-07 EP EP07002637A patent/EP1818135B1/en not_active Expired - Fee Related
- 2007-02-07 DE DE602007001903T patent/DE602007001903D1/de not_active Expired - Fee Related
- 2007-02-13 CN CNA2007100055930A patent/CN101021422A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
CN101021422A (zh) | 2007-08-22 |
US20070188118A1 (en) | 2007-08-16 |
JP2007218630A (ja) | 2007-08-30 |
EP1818135A1 (en) | 2007-08-15 |
EP1818135B1 (en) | 2009-08-12 |
DE602007001903D1 (de) | 2009-09-24 |
US7528561B2 (en) | 2009-05-05 |
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