JP4077923B2 - 振動型アクチュエータ - Google Patents

振動型アクチュエータ Download PDF

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Publication number
JP4077923B2
JP4077923B2 JP07470098A JP7470098A JP4077923B2 JP 4077923 B2 JP4077923 B2 JP 4077923B2 JP 07470098 A JP07470098 A JP 07470098A JP 7470098 A JP7470098 A JP 7470098A JP 4077923 B2 JP4077923 B2 JP 4077923B2
Authority
JP
Japan
Prior art keywords
vibration
piezoelectric element
elastic body
axis
vibrating body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP07470098A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11220892A (ja
JPH11220892A5 (enExample
Inventor
隆司 前野
研治郎 竹村
一郎 奥村
信行 小島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP07470098A priority Critical patent/JP4077923B2/ja
Priority to US09/197,425 priority patent/US6404104B1/en
Priority to EP98309728A priority patent/EP0923144A3/en
Priority to KR1019980051198A priority patent/KR100347124B1/ko
Publication of JPH11220892A publication Critical patent/JPH11220892A/ja
Publication of JPH11220892A5 publication Critical patent/JPH11220892A5/ja
Application granted granted Critical
Publication of JP4077923B2 publication Critical patent/JP4077923B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP07470098A 1997-11-27 1998-03-23 振動型アクチュエータ Expired - Fee Related JP4077923B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP07470098A JP4077923B2 (ja) 1997-11-27 1998-03-23 振動型アクチュエータ
US09/197,425 US6404104B1 (en) 1997-11-27 1998-11-23 Vibration type actuator and vibration type driving apparatus
EP98309728A EP0923144A3 (en) 1997-11-27 1998-11-26 Vibration type actuator and vibration type driving apparatus
KR1019980051198A KR100347124B1 (ko) 1997-11-27 1998-11-27 진동형액츄에이터및진동형구동장치

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP32638197 1997-11-27
JP9-326381 1997-11-27
JP07470098A JP4077923B2 (ja) 1997-11-27 1998-03-23 振動型アクチュエータ

Publications (3)

Publication Number Publication Date
JPH11220892A JPH11220892A (ja) 1999-08-10
JPH11220892A5 JPH11220892A5 (enExample) 2005-09-08
JP4077923B2 true JP4077923B2 (ja) 2008-04-23

Family

ID=26415884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP07470098A Expired - Fee Related JP4077923B2 (ja) 1997-11-27 1998-03-23 振動型アクチュエータ

Country Status (1)

Country Link
JP (1) JP4077923B2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4724904B2 (ja) * 2000-08-11 2011-07-13 株式会社ニコン 振動アクチュエータ
JP2004129458A (ja) 2002-10-07 2004-04-22 Canon Inc 振動型アクチュエータの制御装置、振動型アクチュエータシステム、振動型アクチュエータの制御方法
JP4490232B2 (ja) * 2004-10-14 2010-06-23 日本電信電話株式会社 多自由度駆動機構
JP4731977B2 (ja) 2005-04-22 2011-07-27 キヤノン株式会社 光学機器
JP4788451B2 (ja) 2006-04-10 2011-10-05 株式会社豊田自動織機 振動アクチュエータ
JP4780770B2 (ja) 2006-04-10 2011-09-28 株式会社豊田自動織機 振動アクチュエータ
JP5211463B2 (ja) 2006-10-13 2013-06-12 株式会社豊田自動織機 振動アクチュエータ
JP5183108B2 (ja) * 2007-06-25 2013-04-17 キヤノン株式会社 振動波駆動装置の制御装置
JP5316045B2 (ja) * 2009-02-09 2013-10-16 株式会社豊田自動織機 振動アクチュエータの支持機構
GB2479557B (en) * 2010-04-14 2012-04-11 Alan Wilkinson Magnetic tip with trace for paintless dent removal rod
JP5618085B2 (ja) * 2011-02-15 2014-11-05 上野　敏幸 ３軸球面モータ
JP5484522B2 (ja) * 2012-06-14 2014-05-07 キヤノン株式会社 振動波駆動装置
CN106527292B (zh) * 2016-12-26 2023-07-28 中国工程物理研究院总体工程研究所 多压电陶瓷激振器并联组合系统的控制方法及控制装置
CN111251285B (zh) * 2020-03-25 2023-10-27 南京航空航天大学 一种压电驱动二自由度深海机械臂及其驱动方法

Also Published As

Publication number Publication date
JPH11220892A (ja) 1999-08-10

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