JP4077923B2 - Vibration type actuator - Google Patents

Description

ただし、Ｂ／Ａ＝tan θ² ，Ｃ／Ａ＝tan θ₁ ，tan α＝Ｂ／Ａ＋Ｃ，tan β＝Ｂ／（Ａ−Ｃ）となる。
【０１７３】
図３０は上記した図２１，２４の振動体を駆動制御する駆動回路を示すブロック図である。
【０１７４】
１０１はシステム全体をコントロールするＣＰＵで、１０２は発振器、１０３Ａ，１０３Ｂは位相器、１０４は選択切り替えスイッチである。
【０１７５】
１０５Ｚ，１０５Ａ，１０５Ｂは駆動波形を作る出力回路で、出力回路１０５Ｚ，１０５Ａ，１０５Ｂはそれぞれ分極領域３０３ａ〜ｄと接続され、交流電圧（交番信号）を印加する。これらの圧電素子は、Ｚ軸方向の振動、Ｘ軸方向の振動、Ｙ軸方向の振動をそれぞれ励振する。
【０１７６】
発振器１０２の発振周波数を振動体の固有振動数に近づけたり、遠ざけたりして振動体の振幅を変えることができる。
【０１７７】
１０７はパルス幅を制御するパルス幅制御回路で、圧電素子に印加される交流電圧の振幅を制御することができる。パルス幅の制御により印加電圧をそれぞれ個別独立に変えること、振動振幅もそれぞれ個別独立に変えることができる。
【０１７８】
位相器１０３Ａ，１０３Ｂは、発振器１０２の出力信号の位相を変えることができる。
【０１７９】
第２０の実施の形態に示した前述の式に従った、印加電圧、位相差をもった３つの印加電圧をそれぞれの圧電素子に与えることにより、任意の角度の軸まわりの回転を駆動できる。
【０１８０】
圧電素子１０３（３０３）で発生するＺ軸方向の振動、Ｘ軸方向の振動、Ｙ軸方向の振動、それぞれの振動振幅に応じた電圧は検出信号１２ＳＺ，１２ＳＡ，１２ＳＢを通じて検出回路１０６からそれぞれの振幅、位相の情報がＣＰＵ１０１に入力される。
【０１８１】
これらの情報に基づき、パルス幅制御回路１０７、位相器１０３Ａ、位相器１０３Ｂ、発振器１０２をＣＰＵ１０１でコントロールし、各振動が所定の振幅、位相差であるように調整される。
【０１８２】
また、回転検出計１０８の信号をフィードバックしており、より精度の高い回転軸及び回転数の制御が可能となる。
【０１８３】
さらに、検出回路からの情報に基づき、パルス幅制御回路１０７、位相器１０３Ａ、位相器１０３Ｂ等をコントロールすることで、振動の楕円軌跡の形状を任意に制御することができる。
【０１８４】
このような制御を行うことにより、以下のことが可能となる。
【０１８５】
１：振動体の送り方向速度分布が変わるので、移動体の速度を変えることができる。
【０１８６】
２：摩擦力分布が変わるので、最も摺動損の少ない楕円軌跡をつくることができる。例えば楕円軌跡の傾きについては、移動体の球面に対して楕円の軸が直交するように制御すれば良い。具体的には、図２１に示した弾性体１００の内周面１００ａ（軸線に対して斜めに形成されている）の放線方向に楕円軌跡を発生させて、効率向上を図ることができる。
【０１８７】
あるいは、不図示の回転検出計と電力計の信号をフィードバックして、最も効率の良い楕円軌跡の状態で駆動することもできる。
【０１８８】
３：振動体と移動体との当たり方（法線方向の変位と速度）も変わるので、最も衝撃の少ない接触の仕方、あるいは鳴き等の異常なノイズを発生しない楕円軌跡とすることもできる。
【０１８９】
以上説明した第１４の実施の形態〜第２０の実施の形態の振動型アクチュエータを、図１３、図１４、図１５に示す振動型アクチュエータに代えることができることは言うまでもない。
【０１９０】
また、図２１の（ｂ）に示すように、圧電素子のｘ軸，ｙ軸を分極領域の中央に設定しているが、これに限定されるものではない。
【０１９１】
さらに、移動体に対して振動体を移動させるようにしても良い。
【０１９２】
【発明の効果】
本発明によれば、振動体と接触体とを任意の方向に相対移動させることができる。
【図面の簡単な説明】
【図１】本発明の第１の実施の形態を示し、（ａ）は振動体の外観斜視図、（ｂ）は振動体の縦振動の１次モード、（ｃ），（ｄ）は横振動の２次モードを示す。
【図２】本発明の第２の実施の形態を示し、（ａ）は振動体の外観斜視図、（ｂ）は振動体の縦振動の１次モード、（ｃ），（ｄ）は横振動の２次モードを示す。
【図３】本発明の第３の実施の形態を示す振動型アクチュエータの断面図。
【図４】本発明の第４の実施の形態を示す振動型アクチュエータの断面図。
【図５】本発明の第５の実施の形態を示す振動型アクチュエータの断面図。
【図６】本発明の第６の実施の形態を示す振動型アクチュエータの断面図。
【図７】本発明の第７の実施の形態を示す振動型アクチュエータの断面図。
【図８】本発明の第８の実施の形態を示す振動型アクチュエータの断面図。
【図９】本発明の第９の実施の形態を示す振動型アクチュエータの外観斜視図。
【図１０】図９の振動体の分解斜視図。
【図１１】（ａ）、（ｂ）は図９の振動体を支持した状態を示す側面図と上面図。
【図１２】本発明の第１０の実施の形態を示す側面図。
【図１３】本発明の第１１の実施の形態を示す概略図。
【図１４】本発明の第１２の実施の形態を示す側面図。
【図１５】本発明の第１３の実施の形態を示す外観斜視図。
【図１６】リング状振動体の斜視図。
【図１７】従来の球面振動型アクチュエータの斜視図。
【図１８】従来の振動型アクチュエータの断面図。
【図１９】第９の実施の形態の駆動回路図。
【図２０】図１９の出力回路の回路図。
【図２１】第１４の実施の形態を示し、（ａ）は振動体の外観斜視図とそれぞれの方向における振動変位、（ｂ）は圧電素子の平面図。
【図２２】第１５の実施の形態を示し、（ａ）は振動体の外観斜視図、（ｂ）は圧電素子の配置方向と分極方向を示す図、（ｃ）、（ｄ）は振動体の変位を示す図。
【図２３】図２２の振動体と接触体との吸引保持手段を示す図。
【図２４】第１６の実施の形態を示し、（ａ）は振動体の外観斜視図、（ｂ）、（ｃ）、（ｄ）は振動体の変位を示す図。
【図２５】第１７の実施の形態を示す振動型アクチュエータの縦断面図。
【図２６】第１８の実施の形態の振動型アクチュエータを示し、（ａ）は（ｂ）のＡ−Ａ’矢視縦断面図、（ｂ）は（ａ）の上面図。
【図２７】第１９の実施の形態の振動型アクチュエータを示し、（ａ）は（ｂ）のＢ−Ｂ’矢視縦断面図、（ｂ）は（ａ）の上面図、（ｃ）は側面図。
【図２８】第２０の実施の形態の原理を説明するためのベクトル線図。
【図２９】第２０の実施の形態の原理を説明するためのベクトル線図。
【図３０】第２０の実施の形態の駆動回路のブロック図。
【符号の説明】
１、１０１、１０２、２０１、２０２、３０１、３０２、４０１〜４０３ 弾性体
２、１０２、２０６、３０６、４０６ 移動体
３、１０３、２０３、２０４、４０４、４０５ 圧電素子
３ａ，３ｂ 縦振動用圧電素子
３ｃ 縦振動検出用圧電素子 ３ｅ〜３ｈ 横振動用圧電素子
３ｄ，３ｉ 横振動検出用圧電素子
３０３ａ〜３０３ｄ 圧電素子
４ 頭部弾性体 ４ａ 頭部先端凹部
４ｂ 凹溝 ４ｃ くびれ（凹部）
５ａ 中間弾性体 ５ｂ 後部弾性体
５ｃ 第１弾性体 ５ｄ 第２弾性体
５ｅ 第３弾性体
６、４０７ 締結ボルト ６ａ 締結シャフト凹部
７ 永久磁石 ８ コイル
９ 支持板 ９ａ 中央部
１０ 当接体 １１ つば部
１２ 電極板 １３ グランド電極板
１４ シート １５ 支持台
１６ グローブ １７ シャーシ
１８ カメラ １９ 振動体
１９ａ 弾性体 １９ｂ 圧電素子
２０ａ，２０ｂ 移動体 ２１ バネ
３０ 任意支持台 ４０，５０，６０ 振動体
４１ 制御システム ４２，４３ 移動体
４０８ ホース ４１０ ケース
４１１ 支持部材 ４１２ 上カバー
４１３ ボール ４１４ コイルバネ
４１５ 押し付け部材[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a vibration type actuator and a vibration type driving device.
[0002]
[Prior art]
As a vibration type actuator that generates motions around multiple axes, for example, Journal of Precision Engineering (Vol. 61, No. 3, pp. 1227-1230, 1995) or Nikkei Mechanical (No. 5, pp. 26-27, 1997). 4.28) discloses a spherical vibration actuator.
[0003]
In this spherical vibration type actuator, a spherical body is used as a moving body, and this spherical moving body (rotor) is rotated around two or three of the three orthogonal axes. A plurality of vibrating bodies (stators) that generate rotational force by vibration (for example, traveling waves) about one axis are arranged so as to be in pressure contact with the moving body.
[0004]
As such spherical vibration type actuators, two-degree-of-freedom type using four vibrating bodies and three-degree-of-freedom type using three vibrating bodies have been developed.
[0005]
Further, the vibrating body used in the spherical vibration type actuator is the same as the vibrating body of a ring type vibration type actuator used for driving an autofocus lens of a camera, for example. Show shape. This vibrating body 19 is obtained by bonding a piezoelectric element 19b made of piezoelectric ceramics to the bottom surface of a ring-shaped elastic body 19a. The piezoelectric element 19b has an appropriate phase difference (a phase difference of an odd multiple of a half wavelength). ), Two drive phases are formed, and an alternating signal having an appropriate phase difference (for example, 90 °) is applied to both the drive phases, so that the elastic body 19a is bent (bent) along the circumferential direction. A traveling wave is formed. Then, a contact body (not shown) is brought into contact with the elastic body 19a through a pressurizing means (not shown), so that the contact body and the vibrating body 19 move relative to each other with the traveling direction opposite to the traveling direction of the traveling wave. To do. When the vibrating body 19 is fixed, the contact body rotates as a moving body, for example.
[0006]
As shown in FIG. 17, a spherical vibration type actuator, for example, a two-degree-of-freedom type spherical vibration type actuator, arranges two pairs of opposed vibrating bodies 19 around the spherical moving body 2, thereby vibrating the vibrating body 19. A two-degree-of-freedom movement is realized with the center of the axis as the rotation axis.
[0007]
Further, as other vibration type actuators that generate motions around multiple axes, Third International Conference on Motion and Vibration Control, Chiba, September, 1-6, 1996, pp. 11-29. A piezoelectric manipulator described in K9-K15 has been proposed. The configuration is shown in FIG.
[0008]
The piezoelectric manipulator includes a vibrating body 19 formed of a cylindrical elastic body and a piezoelectric element, and hemispherical moving bodies 20a and 20b disposed at end portions of the vibrating body 19 in the axial direction. A divided electrode (not shown) is formed around 19. The hemispherical moving bodies 20 a and 20 b are attracted to each other by a spring 21 disposed in the vibrating body 19, so that the moving bodies 20 a and 20 b are always in contact with the opening end of the vibrating body 19.
[0009]
Then, by applying an appropriate AC voltage to each of the divided electrodes so as to adjust the vibration excited in the vibrating body 19, two hemispherical moving bodies 20 a and 20 b that are in contact with the opening ends of the vibrating body 19, respectively. Is driven by only one moving body 19.
[0010]
This driving principle is to generate an elliptical motion at the contact point between the hemispherical moving bodies 20a, 20b and the vibrating body 19, and by changing the AC voltage applied to each electrode, the elliptical motion in a plurality of planes. Is generated, and the hemispherical rotor can be driven in an arbitrary direction.
[0011]
[Problems to be solved by the invention]
However, since the conventional spherical vibration type actuator shown in FIG. 17 uses a plurality of vibrating bodies, the following difficulties have been pointed out.
[0012]
{Circle around (1)} In order to use a plurality of vibrators for rotation around one axis, it is necessary to match the characteristics of the vibrators.
[0013]
{Circle around (2)} Since there are a plurality of vibrating bodies around the moving body, it is difficult to reduce the size and the space efficiency is poor.
[0014]
{Circle around (3)} Since another vibrating body around the shaft that is not used for driving is in pressure contact with the moving body, it becomes a resistance to rotation, and there are problems of efficiency and heat generation.
[0015]
Further, the following problems have been pointed out with respect to the vibration actuator of the conventional cylindrical vibrator shown in FIG.
[0016]
{Circle around (1)} Since an alternating signal is input to a plurality of electrodes provided on the peripheral surface of the vibrating body in accordance with the driving direction, the input signal differs for each electrode, and thus complicated control is required.
[0017]
{Circle around (2)} The hemispherical moving bodies 20a and 20b are brought into pressure contact with the cylindrical vibrating body 19 by pulling the springs 21 arranged in the vibrating body 19 to each other. The pressure applied by pressure welding is not constant, and it is not easy to adjust the pressure.
[0020]
[Means for Solving the Problems]
  The vibration type actuator according to the present invention isA vibrating body in which a columnar elastic body is joined on a plate-shaped elastic body, a contact body that contacts the columnar elastic body, and an in-plane perpendicular to the longitudinal direction of the columnar elastic body provided on the columnar elastic body The first electro-mechanical energy conversion element for generating vibrations displaced in two directions orthogonal to each other in the columnar elastic body and the plate-like elastic body, and bending the plate-like elastic body The plate-like elastic body has a second electro-mechanical energy conversion element for generating a vibration displaced in a direction orthogonal to the two directions. Here, out of the three displacements generated in the columnar elastic body and the plate-shaped elastic body, contact with the contact body in the columnar elastic body is performed using a synthetic vibration in which displacements in at least two directions are selectively combined. A circular or elliptical motion in any direction is formed in the part.
[0040]
DETAILED DESCRIPTION OF THE INVENTION
(First embodiment)
FIG. 1 shows a first embodiment of the present invention.
[0041]
FIG. 1 shows the driving principle of the vibration type actuator according to the present embodiment, which is shown in FIGS. 1B, 1C, and 1D between cylindrical elastic bodies 1 as a single vibrating body. A piezoelectric element 3 as an electro-mechanical energy conversion element that applies displacement is sandwiched and fixed. In addition, as a piezoelectric element, for example, a plurality of single piezoelectric element plates are overlapped, and an electrode plate is sandwiched between the piezoelectric element plates as necessary. The alternating signal can be applied.
[0042]
In the present embodiment, the piezoelectric element 3 repeatedly expands and contracts in the axial direction by application of an alternating signal, and, as shown in FIG. 1B, z, among the three axes x, y, and z orthogonal to each other, z A first piezoelectric element that excites longitudinal vibration as longitudinal vibration that is axial displacement, and lateral (bending) as lateral vibration in the zx plane as shown in FIG. ) A second piezoelectric element for exciting vibration and a third piezoelectric element for exciting lateral (bending) vibration as lateral vibration in the yz plane as shown in FIG. is doing. The first piezoelectric element is uniformly polarized in the thickness direction. In addition, the second and third piezoelectric elements are polarized so as to have opposite polarities in the thickness direction at both sides across the diameter.
[0043]
Here, when an alternating signal having a phase difference of, for example, 90 ° is applied to the second piezoelectric element and the third piezoelectric element, z is formed on the surface of the vibrating body by combining two bending vibrations with respect to the vibrating body. An elliptical motion around the axis (in the xy plane) is formed. In this case, since the natural frequency of the vibrating body about the x-axis and the y-axis is substantially the same, an alternating signal having this natural frequency as the driving frequency is applied to the second piezoelectric element and the third piezoelectric element. In this case, the above-described elliptical vibration is generated.
[0044]
Next, when an alternating signal having a frequency substantially equal to the natural frequency in the z-axis direction of the vibrating body is applied to the first piezoelectric element, the vibrating body repeats longitudinal vibration in the primary mode at a constant period. become.
[0045]
At that time, when an alternating signal is applied to the second piezoelectric element so as to be excited by one cycle of vibration that is coincident (substantially coincident) with one cycle of the longitudinal vibration that vibrates, the surface of the vibrator An elliptical motion in the xz plane is generated at the upper point, and a driving force in the x-axis direction (around the y-axis) is obtained. In this case, since the natural frequency in the z-axis direction of the vibrating body is different from the natural frequency of the primary mode of the bending vibration in the xz plane, as shown in FIG. The second piezoelectric element is driven in the secondary mode of the natural frequency with respect to the bending vibration in the x-axis direction so that the period of the longitudinal vibration and the period of the bending vibration coincide with each other.
[0046]
Similarly, when an alternating signal is applied to the third piezoelectric element so as to be excited by a vibration of one cycle that coincides (substantially coincides) with one cycle of the longitudinal vibration that the vibrating member vibrates, An elliptical motion in the yz plane is generated at a point on the surface, and a driving force in the y-axis direction (around the x-axis) is obtained. In this case, the natural frequency in the z-axis direction of the vibrating body is different from the natural frequency of the bending vibration in the yz plane. Therefore, as shown in FIG. By driving the third piezoelectric element in a secondary mode having a natural frequency with respect to bending vibration, the period of longitudinal vibration and the period of bending vibration are made to coincide with each other.
[0047]
That is, by applying an alternating signal having a frequency close to the natural frequency of the vibrating body 1, for example, an alternating voltage, to the first piezoelectric element, the second piezoelectric element, and the third piezoelectric element, the vibrating body shown in FIG. The longitudinal vibration or the transverse (bending) vibration of natural vibration such as b), (c), and (d) is excited.
[0048]
Then, by selectively applying an alternating signal to any two of the first piezoelectric element, the second piezoelectric element, and the third piezoelectric element, the longitudinal vibration of the vibrating body 1 is orthogonal to each other. Two lateral (bending) vibrations in the direction combine to generate an elliptical motion at a point on the surface of the vibrator 1. For example, an elliptic motion in the xz plane is generated by a combination of (b) and (c). Alternatively, the combination of (b) and (d) generates an elliptical motion in the yz plane, and the combination of (c) and (d) generates an elliptical motion in the xy plane.
[0049]
Therefore, when the moving body is pressed against a part of the vibrating body, the moving body can be driven in a plurality of directions.
[0050]
The driving principle of a conventional piezoelectric actuator is that an elliptical motion about one axis is formed at a point on the surface of the elastic body by applying an alternating signal with a phase shift to the two driving phases of the piezoelectric element constituting the vibrating body. However, in the present embodiment, by combining three-phase piezoelectric elements (first piezoelectric element, second piezoelectric element, and third piezoelectric element), three axes (three orthogonal planes) are combined. In addition to the realization of the vibration type actuator that enables driving in three orthogonal planes with a single vibrating body, it is possible to further reduce the size.
[0051]
(Second Embodiment)
FIG. 2 shows a second embodiment of the present invention.
[0052]
In the first embodiment shown in FIG. 1 described above, the vibrating body in the vibration type actuator has a columnar shape. However, in this embodiment, the vibrating body has a prismatic shape, and the elastic body 1 having a prismatic shape is used. The piezoelectric element 3 is bonded to the side surface with an adhesive.
[0053]
In the present embodiment, for example, the second piezoelectric element is formed by arranging a second piezoelectric element and a third piezoelectric element that form lateral vibration (bending vibration) on two adjacent side surfaces of the prismatic elastic body 1. And the third piezoelectric element can be arranged so as to have a phase difference of just 90 degrees, and the first piezoelectric element that forms the longitudinal vibration is adhered to the remaining other side surface with an adhesive. .
[0054]
Also in the case of the present embodiment, an alternating signal similar to that of the first embodiment is applied to the first piezoelectric element, the second piezoelectric element, and the third piezoelectric element, and the first piezoelectric element is supplied to the first piezoelectric element. When the alternating signal is applied, the vibrating body vibrates longitudinally as shown in FIG. 2B, and when the alternating signal is applied to the second piezoelectric element, the vibrating body becomes xz as shown in FIG. The vibrating body bends and vibrates in the yz plane as shown in FIG. 2D by applying an alternating signal to the third piezoelectric element.
[0055]
Therefore, as in the first embodiment, a driving force in three planes orthogonal to each other can be obtained by combining two of these three types of vibration.
[0056]
In this embodiment, since a vibrating body can be obtained by sticking a piezoelectric element to a prismatic side surface, it is easy to manufacture the vibrating body, and only two piezoelectric elements for bending vibration are attached to adjacent side surfaces. Thus, the position (phase difference) of both piezoelectric elements can be defined.
[0057]
In the first embodiment and the second embodiment described above, if the vibrating body is fixed, a contact member (indicated by a broken line in the figure) that makes pressure contact with the driving surface of the vibrating body is used as a moving body. A driving force can be applied in the orthogonal three-axis directions, and conversely, if the contact body is fixed, a driving force can be applied to the vibrating body in the three-axis directions orthogonal to the contact body.
[0058]
(Third embodiment)
FIG. 3 shows a third embodiment of the present invention.
[0059]
The basic configuration of the vibrating body in the vibration type actuator of the present embodiment is the same as that of the first embodiment shown in FIG. 1, and the head elastic body 4 having an internal thread portion formed on the inner diameter portion and A piezoelectric element is disposed between the intermediate elastic body 5a having a hole at the center and the rear elastic body 5b, and a fastening bolt 6 constituting a central shaft member inserted from the rear elastic body 5b is attached to the head elastic body 4. The piezoelectric element 3 is sandwiched between the head elastic body 4 and the intermediate elastic body 5a and between the intermediate elastic body 5a and the rear elastic body 5b, respectively, by being screwed to the female thread portion. Has been formed.
[0060]
In the present embodiment, the piezoelectric element 3 disposed between the head elastic body 4 and the intermediate elastic body 5a is a first piezoelectric element that excites longitudinal vibration in the vibrating body, and the intermediate elastic body 5a The piezoelectric element 3 disposed between the rear elastic body 5b and the second piezoelectric element that forms a bending vibration in the xz plane and a third piezoelectric element that forms a bending vibration in the yz plane. A piezoelectric element, wherein the second piezoelectric element and the third piezoelectric element are arranged with a phase difference of 90 ° in position.
[0061]
In addition, the distal end portion of the head elastic body 4 has an inner circumferential surface that is inclined with respect to an axis that contacts the spherical moving body 2 as a tapered surface.
[0062]
Therefore, also in the present embodiment, as in the first embodiment described above, the movement of the spherical shape is achieved by combining two vibrations of the longitudinal vibration and the bending vibration in two directions formed on the vibrating body. The body 2 can be rotated around the x, y, and z axes, respectively.
[0063]
For example, the combination of (c) and (d) in FIG. 1 moves around the z axis, the combination of (b) and (c) around the y axis, and the combination of (b) and (d) around the x axis. The body 2 can be rotated, and the moving body 2 can rotate around three axes orthogonal to each other.
[0064]
(Fourth embodiment)
FIG. 4 shows a fourth embodiment of the present invention.
[0065]
The basic configuration of the vibrating body in the vibration type actuator of the present embodiment is the same as that of the third embodiment shown in FIG. 3, and a moving body driven by an elliptical motion in three orthogonal planes formed on the head 4a. The point which makes 2 flat is different from 3rd Embodiment.
[0066]
In the present embodiment, the moving body 2 moves around the x-axis direction, the y-axis direction, and the z-axis by pressing the moving body 2 against the head 4 a of the head elastic body 4. For example, the longitudinal vibration in the z direction formed by driving the first piezoelectric element and the lateral vibration in the xz plane formed by driving the second piezoelectric element have a phase difference of about 90 °. When excited, elliptical motion in the xz plane is generated in the head 4a of the vibrating body, and the moving body 2 in contact with the head 4a moves straight in the x-axis direction.
[0067]
Further, when the longitudinal vibration in the z direction and the lateral vibration in the yz plane are excited with a phase difference of about 90 °, elliptical motion in the yz plane occurs at the end point of the head 4a. The mobile body 2 in contact with 4a moves straight in the y-axis direction.
[0068]
Further, when the transverse vibration in the xz plane and the transverse vibration in the yz plane are excited with a phase difference of about 90 °, elliptical motion in the xy plane occurs in the head 4a, and the head 4a. The moving body 2 that has touched the surface rotates around the z-axis.
[0069]
(Fifth embodiment)
FIG. 5 shows a fifth embodiment of the present invention.
[0070]
In this embodiment, the spherical moving body 2 is attracted and pressed by the magnetic force of the permanent magnet 7 with respect to the vibrating body in the vibration type actuator of the third embodiment shown in FIG. A permanent magnet 7 is provided in the tip recess 4 b of the body 4.
[0071]
(Sixth embodiment)
FIG. 6 shows a sixth embodiment.
[0072]
In this embodiment, the spherical moving body 2 is attracted and pressurized by the magnetic force of the electromagnet with respect to the vibrating body in the vibration type actuator of the third embodiment shown in FIG. The coil 8 is disposed in the concave groove 4c provided in the outer peripheral portion of the magnet, and an electromagnet is configured by energizing the coil 8, and the moving body 2 is attracted and pressurized to the head elastic body 4 by this magnetic force. The coil 8 is attached to a support member 30 disposed around the vibration body, and the outer end portion of the support plate 9 extending from the vibration body is attached to the support member 30.
[0073]
Note that the coil 8 may be disposed at any location around the vibrating body as long as it can constitute a magnetic circuit.
[0074]
(Seventh embodiment)
FIG. 7 shows a seventh embodiment of the present invention.
[0075]
This embodiment is intended to improve the contact of the spherical moving body 2 with the vibrating body of the vibration type actuator in the third embodiment shown in FIG. In addition, a contact body 10 made of an elastic material disposed in the vicinity of the contact portion of the moving body 2 is arranged to increase the contact area between the moving body 2 and the head elastic body 4.
[0076]
For this reason, the contact of the movable body 2 with respect to the vibrating body is stabilized, the output torque is increased, and the allowable range of processing errors during processing of the parts can be expanded.
[0077]
In the present embodiment, as in the fifth embodiment shown in FIG. 5, the permanent magnet 7 is provided in the tip recess 4 b of the head elastic body 4, and the spherical moving body 2 is attached to the permanent magnet 7. Suction and pressure are applied by magnetic force.
[0078]
(Eighth embodiment)
FIG. 8 shows an eighth embodiment of the present invention.
[0079]
As in the seventh embodiment, the present embodiment is intended to improve the contact property of the spherical moving body 2 with respect to the vibrating body of the vibration type actuator in the third embodiment shown in FIG. A tip recess 4b of the head elastic body 4 in the vibrating body is formed by a cylindrical collar portion 11 having a spring property.
[0080]
In the present embodiment, the movable body 2 is brought into contact with a certain amount of elastic force by the spring portion 11 by a pressing means (not shown), so that the contact area of the flange portion 11 with respect to the spherical surface of the movable body 2 increases. The contact property of the moving body 2 is stabilized, the output torque is increased, and the allowable range of processing errors when processing parts can be expanded.
[0081]
In the present embodiment, as in the fifth embodiment shown in FIG. 5, the permanent magnet 7 is provided in the tip recess 4 b of the head elastic body 4, and the spherical moving body 2 is attached to the permanent magnet 7. Suction and pressure are applied by magnetic force.
[0082]
(Ninth embodiment)
9, 10 and 11 show a ninth embodiment of the present invention.
[0083]
The present embodiment shows a specific configuration of a columnar vibrating body, in which a first elastic body 5c is disposed directly after the head elastic body 4, and between the first elastic body 5c and the second elastic body 5d. Piezoelectric element plates 3a and 3b for exciting longitudinal vibration, a piezoelectric element plate 3c for detecting vibration, a support plate 9 having a central portion 9a serving as an electrode plate for contacting the piezoelectric element plate 3a, and electrodes Plates 12z, 12sz, and 13 are arranged. Further, between the second elastic body 5d and the third elastic body 5e, piezoelectric element plates 3e, 3f and 3g, 3h for exciting lateral vibration (bending vibration), piezoelectric element plates 3d and 3i for detecting vibration, electrodes Plates 12SA, 12A, 12SB, 12B, 13 and a sheet 14 are arranged. The head threaded body 4, the first elastic body 5 c, the second elastic body 5 d, and the third elasticity are obtained by screwing the tip threaded portion of the fastening bolt 6 into the female threaded portion of the inner diameter portion of the head elastic body 4. The body 5e, the piezoelectric element plates 3a to 3i, the electrode plates 12, 13 and the sheet 14 are integrally sandwiched in the illustrated arrangement to form a vibrating body. The electrode plate 13 is a ground electrode.
[0084]
Here, the support plate 9 supports the vibrating body by fixing the arm portion extending in the radial direction from the central electrode plate portion 9a to the fixing portion 30 shown in FIG. If the natural vibration of the vibrating body itself is not affected, the support plate 9 may have a shape other than the plate. Of course, the electrode plate may not be used also.
[0085]
Further, the piezoelectric element plates 3d, 3e, 3f and the piezoelectric element plates 3g, 3h, 3i are polarized so that the left and right sides have opposite polarities, and are arranged with a phase difference of 90 ° in the bending direction. Yes. The sheet 14 has an insulating property so that the second elastic body 5d and the electrode plate 12 disposed on both sides of the sheet 14 or the third elastic body 5e and the electrode plate 12 are electrically independent. .
[0086]
For the vibrator configured as described above, from the drive circuit shown in FIG. 19 described later, for example, the electrode plate 12 (12Z) sandwiched between the piezoelectric element plates 3a and 3b has an AC voltage with a frequency close to the natural frequency of the vibrator. Is repeatedly extended and contracted in the thickness direction from these piezoelectric element plates 3a and 3b, and longitudinal vibration is excited in the vibrating body. The piezoelectric element plate 3c is distorted by the longitudinal vibration excited by the piezoelectric element plates 3a and 3b and generates an electromotive force. At this time, the AC voltage extracted from the electrode plate 12 (12SZ) in contact with the piezoelectric element plate 3c is used for vibration detection.
[0087]
When an alternating voltage having a frequency close to the natural frequency of the vibrating body is input to the electrode plate 12 (12A) sandwiched between the piezoelectric element plates 3e and 3f, the portions on both sides of the piezoelectric element plates 3e and 3f sandwiching the diameter portion are thick. Stretching and shrinking alternately in the vertical direction are repeated alternately to excite lateral vibration in the vibrating body.
[0088]
Further, the piezoelectric element plate 3d is distorted by the lateral vibration of the vibrating body excited by the piezoelectric element plates 3e and 3f, and generates an electromotive force. At this time, the AC voltage extracted from the electrode plate 12 (12SA) in contact with the piezoelectric element plate 3d is used for vibration detection. An AC voltage having a frequency close to the natural frequency of the vibrating body on the electrode plate 12 (12B) sandwiching the piezoelectric element plates 3g and 3h, which are disposed with a phase difference of 90 ° relative to the piezoelectric element plates 3d and 3e. Is input, the piezoelectric element plates 3g and 3h repeatedly expand and contract in the thickness direction on both sides of the diameter portion, and excite lateral vibration (bending vibration) in the vibrating body. Further, the piezoelectric element plate 3i is distorted by the lateral vibration (bending vibration) of the vibrating body excited by the piezoelectric element plates 3g and 3h, and generates an electromotive force. At this time, the AC voltage extracted from the electrode plate 12 (12SB) in contact with the piezoelectric element plate 3i is used for vibration detection.
[0089]
The positions of the piezoelectric element plates 3a to 3c that excite longitudinal vibration are positions that become nodes of the longitudinal vibration primary mode. Furthermore, the positions of the piezoelectric element plates 3d to 3i that excite the transverse vibration are positions that become antinodes of the transverse vibration secondary mode.
[0090]
On the other hand, the constricted portion (recessed portion) 4c formed on the outer peripheral portion of the head elastic body 4 increases the amplitude of the natural vibration, and the natural frequency can be kept low. In addition, the constricted portion (recessed portion) 6a provided on the center shaft 6 of the vibrating body can mainly suppress the natural frequency of the longitudinal vibration to be low.
[0091]
FIG. 19 is a block diagram showing a drive circuit that drives and controls the vibrating body. A CPU 101 controls the entire system, 102 is an oscillator, 103 is a phase shifter, and 104 is a selection changeover switch. Reference numeral 105 denotes an output circuit for generating a drive waveform, which is constituted by the circuit shown in FIG. The output circuits 105Z, 105A, and 105B are connected to the electrode plates 12Z, 12A, and 12B, respectively, and apply an AC voltage (alternating signal) to the piezoelectric elements 3a and 3b, 3e and 3f, 3g and 3h. These piezoelectric elements excite longitudinal vibration in the Z-axis direction, lateral (bending) vibration in the ZX plane, and lateral (bending) vibration in the ZY plane.
[0092]
The selection switch 104 selects two of the three outputs Z, A, and B on the basis of a command from the CPU 101 and outputs two signals from the oscillator 102 and the phase shifter 103. As a result, one of the three rotations can be selected.
[0093]
A pulse width control circuit 107 controls the pulse width, and can control the amplitude of the alternating voltage applied to the piezoelectric element. The aspect ratio of the elliptical locus (ratio of major axis to minor axis) can be changed by individually changing the applied voltage depending on the pulse width. By changing the oscillation frequency of the oscillator 102 close to or away from the natural frequency of the vibrator, the amplitude of the vibrator can be changed and the size of the elliptical locus can be changed.
[0094]
Voltages corresponding to longitudinal vibrations in the Z-axis direction generated in the piezoelectric element plates 3c, 3d, 3i, lateral (bending vibration) in the ZX plane, lateral (bending) vibration in the ZY plane, and respective vibration amplitudes Each of the amplitude and phase information is input to the CPU from the detection circuit 106 through the electrode plates 12SZ, 12SA, and 12SB.
[0095]
Based on this information, the elliptical locus can be controlled to an arbitrary shape by controlling the pulse width control circuit 107, the phase shifter 103, and the oscillator 102 with the CP 101.
[0096]
By performing such control, the following becomes possible.
[0097]
1: Since the speed distribution in the feeding direction of the vibrating body changes, the speed of the moving body can be changed.
[0098]
2: Since the frictional force distribution changes, an elliptical locus with the least sliding loss can be created. For example, the inclination of the elliptic trajectory may be controlled so that the axis of the ellipse is orthogonal to the spherical surface of the moving object. Specifically, it is possible to improve efficiency by generating an elliptical locus in the radial direction of the inner peripheral surface (formed obliquely to the axis) of the elastic body 4 shown in FIG.
[0099]
Alternatively, it is also possible to feed back signals from a rotation detector and a wattmeter (not shown) and drive in the state of the most efficient elliptical locus.
[0100]
3: Since the way of contact between the vibrating body and the moving body (displacement and speed in the normal direction) also changes, it is possible to make an elliptical locus that does not generate abnormal noise such as squealing or the like with the least impact.
[0101]
(Tenth embodiment)
FIG. 12 shows a tenth embodiment of the present invention.
[0102]
In this embodiment, for example, a vibrating body having the support plate 9 shown in FIG. 9 is supported via a support base 15 that can move in an arbitrary direction, for example. The support base 15 has a cylindrical shape, and can be used as a joint capable of moving a multi-degree-of-freedom vibration type actuator by attaching it to a robot arm or the like.
[0103]
(Eleventh embodiment)
FIG. 13 shows an eleventh embodiment of the present invention.
[0104]
In the present embodiment, a control system is provided on the left and right as operating arms, in which two vibration-type actuators 40 of each embodiment including the above-described embodiments and FIGS. 21 to 27 described later are connected in series. A remote operation system that drives an actuator by a combination of an operation glove 16 and a control system 41 that can be remotely operated by an operation glove 16 via a control unit 41. Since it is publicly known, description of these configurations is omitted here. The operating arm of the present embodiment uses a spherical body as the moving body 42 of the vibration actuator 40 on the hand side, and is attached to the rear end portion of the vibration actuator 40 on the tip side. As the moving body 43 of the actuator 40, a rod-like member having an operation finger portion (the contact portion with the head elastic body portion of the vibrating body is spherical) is used, and the moving bodies 42 and 43 are positions corresponding to human joints. It is possible to realize a remote control machine (robot) corresponding to human movement. The remote control machine is a machine that operates in response to human movement.
[0105]
Such a remote control machine can also be used for laparoscopic surgery and microsurgery. Laparoscopic surgery is a surgery performed with an endoscope and forceps inserted into the body without incising the patient's body.
[0106]
  By using this embodiment for this, it is possible to realize a complicated movement of the human hand inside the abdomen of the patient into which the human hand cannot be put, so it is more precise than conventional laparoscopic surgery Surgery can be performed. Microsurgery is an operation involving fine operations performed on a fine living tissue, and is currently performed directly by a human hand under a microscope. Adjusting the scale on the operator side and the scale on the machine side using a remote control machine makes it possible to perform detailed operations that are difficult with human hands.Is possible.
  (Twelfth embodiment)
  FIG. 14 shows a twelfth embodiment.
[0107]
In the present embodiment, a plurality of vibration type actuators (multi-degree-of-freedom vibration type actuators) 50 of the respective embodiments including the above-described embodiments and FIGS. By using a sphere as an object, it can be arbitrarily moved in the XY plane so that it can be translated and rotated. In FIG. 14, the moving body 2 of the multi-degree-of-freedom vibration type actuator 50 is in contact with a floor (not shown). It can also be a mechanism.
[0108]
(Thirteenth embodiment)
FIG. 15 shows a thirteenth embodiment of the present invention.
[0109]
In this embodiment, a camera is installed in the spherical moving body 2 of the vibration type actuator (multi-degree-of-freedom vibration type actuator) 60 of each embodiment including the above-described embodiments and FIGS. 18 is used as a photographing device for input to a surveillance camera or a computer.
[0110]
[Fourteenth embodiment]
FIG. 21 shows the structure and driving principle of the vibration type actuator of this embodiment. Between the cylindrical elastic bodies 101 and 102 as the single vibrating body 100, the piezoelectric element 103 (the same phase) as an electro-mechanical energy conversion element polarized in four divisions as shown in FIG. And a plurality of piezoelectric element plates polarized in four are stacked and blocked). An alternating signal (voltage) for driving can be applied to the piezoelectric element 103 independently for each polarization region. Note that an inner peripheral surface 100a that is a contact portion (driving portion) of the vibrating body 100 with the moving body 102 is formed obliquely with respect to the axis so that the spherical moving body 102 slightly enters the inside.
[0111]
The polarization regions A to D of the piezoelectric element 103 are polarized with the same polarity, and in order to displace the vibrating body 100 in the Z-axis direction,
V_A= V_B= V_C= V_D= Sin ωt
V_A= V_C= Sin ωt or V_B= V_D= Sin ωt
The alternating signal is supplied.
[0112]
On the other hand, in order to displace the vibrating body 100 in the X-axis direction (bending vibration in the ZX plane),
V_A= Sin ωt, V_C= -Sin ωt
Or
V_A= Cos ωt, V_C= -Cos ωt
The alternating signal is supplied.
[0113]
Furthermore, in order to displace the vibrating body 100 in the Y-axis direction (bending vibration in the ZY plane),
V_B= Sin ωt, V_D= -Sin ωt
Or
V_B= Cos ωt, V_D= -Cos ωt
The alternating signal is supplied.
[0114]
As a result, as shown in FIG. 21A, the displacement is in the Z-axis direction, the X-axis direction, and the Y-axis direction. The vibration in each axial direction is resonated by setting the vibration in the Z-axis direction as the primary mode and the vibration in the X-axis direction and the Y-axis direction as the secondary mode.
[0115]
The first portion 101a, whose rigidity is reduced by forming the circumferential groove, serves as a bending (bending) displacement expansion as a position of a node in vibration in the X-axis direction and the Y-axis direction.
[0116]
Further, the second portion 101b having a reduced rigidity by forming a circumferential groove serves as a vertical displacement expansion as the position of the node in the vibration in the Z-axis direction.
[0117]
Unlike the first to thirteenth embodiments described above, the embodiment of FIG. 21 does not require an electro-mechanical energy conversion element dedicated to longitudinal vibration, and is basically selectively used for a plurality of polarization regions. By supplying the alternating signal, the vibration body 100 can be displaced in the three-axis directions.
[0118]
Next, supply of an alternating signal for rotating the spherical moving body 102 around each axis will be described.
[0119]
When the moving body 102 is rotated around the X axis, a displacement in the Z axis direction and a displacement in the Y axis direction are given, for example, with a phase difference of 90 °.
[0120]
Ie
V_A= V_B= V_C= V_D= Sin ωt (Z-axis direction displacement)
When,
V_B= Cos ωt, V_D= -Cos ωt (Y-axis direction displacement)
Are supplied to the corresponding polarization regions A to D.
[0121]
That is, the following equation is obtained.
[0122]
V_A= Sin ωt
V_B= Sin ωt + cos ωt = √2sin (ωt + π / 4)
V_C= Sin ωt
V_D= Sin ωt-cos ωt = √2sin (ωt-π / 4)
When the moving body 102 is rotated about the Y axis, the displacement in the Z axis direction and the displacement in the X axis direction are given with a phase difference of 90 °, for example.
[0123]
V_A= V_B= V_C= V_D= Sin ωt (Z-axis direction displacement)
V_A= Sin ωt, V_C= -Sin ωt (X-axis direction displacement)
That is, the following equation is obtained.
[0124]
V_A= √2sin (ωt + π / 4)
V_B= Sin ωt
V_C= √2sin (ωt−π / 4)
V_D= Sin ωt
Thus, an alternating signal of (Z-axis direction displacement + X-axis direction displacement) is supplied to the corresponding polarization regions A to D.
[0125]
Further, when the moving body 102 is rotated around the Z axis, a displacement in the X axis direction and a displacement in the Y axis direction are given, for example, with a phase difference of 90 °.
[0126]
That is,
V_A= Sin ωt
V_B= Cos ωt
V_C= -Sin ωt
V_D= -Cos ωt
Thus, an alternating signal of (X-axis direction displacement + Y-axis direction displacement) is supplied to the corresponding polarization regions A to D.
[0127]
Note that when only the polarization regions A and C of the piezoelectric element 103 are used in realizing the displacement in the Z-axis direction, the supply of alternating signals to the respective polarization regions changes as follows.
[0128]
That is,
When rotating around the X axis
V_A= V_C= Sin ωt
V_B= Cos ωt
V_D= -Cos ωt
And
When rotating around the Y axis
V_A= Cos ωt
V_B= Sin ωt
V_C= -Cos ωt
V_D= Sin ωt
And
When rotating around the Z axis
V_A= Sin ωt
V_B= Cos ωt
V_C= -Sin ωt
V_D= -Cos ωt
It becomes.
[0129]
In addition, by changing the phase difference without setting it to 90 °, the shape of the elliptical motion is changed, and it is possible to drive with a high torque in accordance with the contact angle between the moving body 102 and the driving portion of the vibrating body 100.
[0130]
[Fifteenth embodiment]
FIG. 22 shows the structure and displacement form of the vibration type actuator of the present embodiment.
[0131]
  In this embodiment, a columnar elastic body 201 and a disk-shaped elastic body 202 are joined as a single vibrating body 200. The elastic body 201 is actually divided into two parts,FirstPiezoelectric elements 203 and 204 as electro-mechanical energy conversion elements are sandwiched. Further, the disk-like elastic body 202 has four on the surface.SecondPiezoelectric elements 205a to 205d are provided as electro-mechanical energy conversion elements.
[0132]
The piezoelectric element 203 is for displacing the elastic body 201 serving as a driving unit in the X-axis direction as shown in FIG. 22C, and plays the same role as the piezoelectric elements 3e and 3f in FIG. The piezoelectric element 204 is for displacing the elastic body 201 in the Y-axis direction, and plays the same role as the piezoelectric elements 3g and 3h in FIG. Note that the polarization phases of the piezoelectric elements 203 and 204 are shifted by 90 °.
[0133]
On the other hand, the piezoelectric elements 205a to 205d are all polarized with the same characteristics, and by bending the disk-like elastic body 202 as shown in FIG. Is to be displaced.
[0134]
As in the fourteenth embodiment, a spherical moving body 206 is in contact with the elastic body 201 serving as a driving unit, and alternating signals are supplied to the piezoelectric element 204 and the piezoelectric elements 205a to 205d with a phase difference of 90 °, for example. By doing so, the moving body 206 can be rotated around the X axis. Further, by supplying alternating signals to the piezoelectric element 203 and the piezoelectric elements 205a to 205d with a phase difference of, for example, 90 °, the moving body 206 can be rotated around the Y axis.
[0135]
On the other hand, when the moving body 206 is rotated around the Z axis, alternating signals are supplied to the piezoelectric elements 203 and 204 with a phase difference of 90 °, for example.
[0136]
In order to always bring the moving body 206 into pressure contact with the elastic body 201 regardless of the direction of gravity, a permanent magnet 210 is provided inside the elastic body 201 as shown in FIG. There is a method of forming by material. With this structure, the moving body 206 can always be in pressure contact with the vibrating body 200 regardless of the direction of gravity by the magnet's attractive force.
[0137]
It is also effective to set an arbitrary phase difference without changing the phase difference to 90 ° and change the shape of the elliptical motion.
[0138]
[Sixteenth embodiment]
FIG. 24 shows the structure and displacement form of the vibration type actuator of the present embodiment.
[0139]
In this embodiment, a columnar elastic body 301 and a disk-shaped elastic body 302 are joined as a single vibrating body 300. A permanent magnet (not shown) is incorporated inside the elastic body 301, and the moving body 306 formed of a magnetic body is always attracted by a magnetic force to obtain a pressing force.
[0140]
The elastic body 302 is provided with four piezoelectric elements (polarization regions) 303a to 303d as electro-mechanical energy conversion elements on the surface. When the alternating signals are selectively supplied to the piezoelectric elements 303a to 303d, as shown in FIGS. 24B to 24D, the elastic body 301 as the drive unit is displaced in the X-axis direction, and the Y-axis It can be displaced in the direction or in the Z-axis direction.
[0141]
When the moving body 306 is rotated about the X axis, a displacement in the Y axis direction (FIG. 24C) and a displacement in the Z axis direction (FIG. 24D) are set, for example, by 90 ° phase difference. For example, the displacement in the X-axis direction (FIG. 24B) and the displacement in the Z-axis direction (FIG. 24D) are provided with a phase difference of 90 °, for example, around the Y-axis. When it is desired to rotate around the Z axis, displacement in the X axis direction (FIG. 24B) and displacement in the Y axis direction (FIG. 24C) are provided with a phase difference of, for example, 90 °. Note that it is also effective to change the shape of the elliptical motion by arbitrarily setting the phase difference without setting it to 90 °.
[0142]
The supply of alternating signals to the piezoelectric elements 303a to 303d is the same as that in the above-described fourteenth embodiment, and a detailed description thereof is omitted.
[0143]
[Seventeenth embodiment]
FIG. 25 shows the structure of the vibration type actuator of the present embodiment. A plurality of cylindrical elastic bodies 401, 402, 403 are formed as a single vibrating body 400, and a piezoelectric element is formed between the elastic bodies 401, 402. The element 404 is sandwiched, and the piezoelectric element 405 is sandwiched between the elastic bodies 402 and 403. The three elastic members 401 to 403 are fastened by bolts 407 as fastening members. Reference numeral 406 denotes a spherical moving body.
[0144]
The present embodiment is characterized in that the contact between the vibrating body 400 and the moving body 406 is performed by suction with air. That is, the hose 408 is inserted into the recess 401a in the vicinity of the drive unit of the vibrating body 400, and air is sucked by the hose 408 to generate an adsorption force in the vicinity of the drive unit. The vibrating body 400 can be pressed.
[0145]
Reference numeral 410 denotes a case, which supports the vibrating body 400 by fixing the outer end portion of the support member 411 sandwiched between the elastic bodies 401 and 402.
[0146]
[Eighteenth embodiment]
This embodiment shown in FIG. 26A shows a modification of the seventeenth embodiment, and shows another structure in which the moving body 406 is brought into pressure contact with the drive unit of the vibrating body 400.
[0147]
Specifically, a dome-shaped upper cover 412 is provided on the upper portion of the case 410 so as to be rotatable with respect to the case 410 by a ball 413 as a bearing. The upper cover 412 is movably provided with pressing members 415 that urge the moving body 406 toward the vibrating body 400 by coil springs 414 at four locations. Due to the urging force of the pressing member 415, the moving body 406 can come into pressure contact with the vibrating body 400 regardless of the direction of gravity. The vibrating body 400 itself is supported by the case 410 by a support member 411.
[0148]
Note that a protrusion 406a as an actual driving unit is formed on the moving body 406 so as to protrude from the upper cover 412, and the upper cover 406 has a protrusion 406a as shown in FIG. A cross-shaped notch 412a is formed as shown in FIG.
[0149]
Since the protrusion 406a of the moving body 406 is inserted into the notch 412a and the upper case 412 itself is rotatable with respect to the case 410, the protrusion 406a rotates (swings) in any direction. However, the upper cover 412 is rotated to enter any of the cutouts 412a so as not to be restricted.
[0150]
[Nineteenth embodiment]
This embodiment shown in FIG. 27A shows a modification of the eighteenth embodiment, and the upper cover 420 is rotatably supported by the ball 410 with respect to the case 410. Is added to the bearing portion of the ball 413. The disc spring 422 is actually provided with the ball presser member 423 interposed therebetween, and the upper case 420 itself is attached to the case 410 in the press-contact direction between the movable body 406 and the vibrating body 400, which is downward in the drawing. It plays the role of the force.
[0151]
Inside the upper case 420, fixed pressing members 424 are formed at three locations, and the movable body 406 is pressed against the vibrating body by the pressing members 424.
[0152]
The upper case 420 is formed with a substantially Y-shaped notch 420a as shown in FIG. The role of the notch 420a is the same as the notch 412a in FIG. FIG. 27 (c) shows an external view.
[0153]
In the embodiment provided with the upper covers 412 and 420 shown in FIGS. 26 and 27, the moving body 406 is substantially covered, and the change of the friction coefficient due to oil, dust or the like due to being touched can be prevented.
[0154]
[20th embodiment]
In the present embodiment, the movable body can be rotated at any arbitrary angle. The broken line in FIG.₁29 indicates a tilted axis, and the solid line in FIG.₂The rotation about the tilted axis is shown.
[0155]
And θ in different axial directions with respect to each X axis, Y axis, and Z axis serving as a reference₁, Θ₂If rotation around an inclined axis can be realized, rotation around an axis in any direction can be realized.
[0156]
As a specific example, θ in different directions with reference to the X axis₁, Θ₂A method for realizing the rotation around the tilted axis will be described.
[0157]
As shown in FIG. 28, θ from the X axis in the XZ plane.₁The rotation around the tilted axis is
ωθ₁= Aωx + Bωz
However, B / A = tan θ₁(| Ωx | = | ωz |).
[0158]
As shown in FIG. 29, θ from the X axis in the XY plane.₂The rotation around the tilted axis is
ωθ₂= Cωx + Dωy
However, D / C = tan θ₂(| Ωx | = | ωy |).
[0159]
Furthermore, θ₁And θ₂The rotation around the tilted axis is
ω (θ₁ + Θ₂ ) = Ωθ₁+ Ωθ₂= Aωx + Bωy + Cωz
However, B / A = tan θ₂, C / A = tan θ₁Can be defined as
[0160]
First, the case where the phase difference is 90 ° will be described.
[0161]
As the vibration type actuator, the type shown in FIGS. 1 to 10 is used. By supplying any alternating signal to each of the electrode plates 12A, 12B and 12Z shown in FIG. Explain what to do.
[0162]
The rotation ωx around the X axis is
V_12Z= Sin ωt (Z direction)
V_12B= Cos ωt (Y direction)
You can do it.
[0163]
The rotation ωy around the Y axis is
V_12Z= Sin ωt (Z direction)
V_12A= Cos ωt (X direction)
You can do it.
[0164]
And rotation around the Z axis ω_ZIs
V_12A= Sin ωt (X direction)
V_12B= Cos ωt (Y direction)
You can do it.
[0165]
Next, θ from the X axis in the XZ plane₁The rotation around the tilted axis is
V_12A= Bsin ωt
V_12B= Acos ωt + Bcos ωt = (A + B) cos ωt
V_12Z= Asin ωt
However, B / A = tan θ₁It becomes.
[0166]
Θ from the X axis in the XY plane₂The rotation around the tilted axis is
V_12A= Dcos ωt
V_12B= Ccos ωt
V_12Z= Csin ωt + Dsin ωt = (C + D) sin ωt
However, D / C = tan θ₂It becomes.
[0167]
And θ₁And θ₂The rotation around the axis
V_12A= Bcos ωt + Csin ωt = √ (B²+ C²) Sin (ωt + α)
V_12B= Acos ωt + Ccos ωt = (A + C) cos ωt
V_12Z= Asin ωt + Bsin ωt = (A + B) sin ωt
However, B / A = tan θ₂, B / C = tan α, C / A = tan θ₁And
[0168]
Next, the case where the vibration type actuator shown in FIGS. 21 and 24 is used will be described. However, the following description will describe what alternating signals are supplied to the areas A to D of each piezoelectric element.
[0169]
V_A~ V_DCorresponds to the polarization regions A to D in FIG. 21B and corresponds to the piezoelectric elements 303a to 303d in FIG.
[0170]
Θ from the X axis in the XZ plane₁The rotation around the tilted axis is
V_A= Asin ωt + Bsin ωt = (A + B) sin ωt
V_B= Acos ωt + Bcos ωt = (A + B) cos ωt
V_C= Asin ωt−Bsin ωt = (A−B) sin ωt
V_D= −Acos ωt−Bcos ωt = − (A + B) cos ωt
However, B / A = tan θ₁It becomes.
[0171]
Θ from the X axis in the XY plane₂The rotation around the tilted axis is
V_A= Csin ωt + Dcos ωt = √ (C²+ D²) Sin (ωt + θ₂)
V_B= Ccos ωt-Dsin ωt = √ (C²+ D²) Cos (ωt + θ₂)
V_C= Csin ωt-Dcos ωt = -√ (C²+ D²) Sin (−ωt + θ₂)
V_D= −Ccos ωt + Dsin ωt = −√ (C²+ D²) Cos (ωt + θ₂)
However, D / C = tan θ₂It becomes.
[0172]
And θ₁And θ₂ The rotation around the axis

However, B / A = tan θ², C / A = tan θ₁, Tan α = B / A + C, tan β = B / (A−C).
[0173]
FIG. 30 is a block diagram showing a drive circuit that drives and controls the vibrating body shown in FIGS.
[0174]
A CPU 101 controls the entire system, 102 is an oscillator, 103A and 103B are phase shifters, and 104 is a selection changeover switch.
[0175]
105Z, 105A, and 105B are output circuits for generating drive waveforms, and the output circuits 105Z, 105A, and 105B are connected to the polarization regions 303a to 303d, respectively, and apply an alternating voltage (alternating signal). These piezoelectric elements excite vibration in the Z-axis direction, vibration in the X-axis direction, and vibration in the Y-axis direction.
[0176]
The oscillation frequency of the oscillator 102 can be changed by bringing the oscillation frequency close to or away from the natural frequency of the oscillator.
[0177]
A pulse width control circuit 107 controls the pulse width, and can control the amplitude of the alternating voltage applied to the piezoelectric element. By controlling the pulse width, the applied voltage can be changed independently and the vibration amplitude can be changed individually.
[0178]
The phase shifters 103A and 103B can change the phase of the output signal of the oscillator 102.
[0179]
By applying three applied voltages having an applied voltage and a phase difference to the respective piezoelectric elements according to the above-described equation shown in the twentieth embodiment, rotation about an axis of an arbitrary angle can be driven.
[0180]
The Z-axis direction vibration, the X-axis direction vibration, the Y-axis direction vibration generated in the piezoelectric element 103 (303), and the voltages corresponding to the respective vibration amplitudes are detected from the detection circuit 106 through the detection signals 12SZ, 12SA, and 12SB. Amplitude and phase information is input to the CPU 101.
[0181]
Based on these pieces of information, the pulse width control circuit 107, the phase shifter 103A, the phase shifter 103B, and the oscillator 102 are controlled by the CPU 101 and adjusted so that each vibration has a predetermined amplitude and phase difference.
[0182]
Further, the signal of the rotation detector 108 is fed back, and the rotation axis and the number of rotations can be controlled with higher accuracy.
[0183]
Furthermore, by controlling the pulse width control circuit 107, the phase shifter 103A, the phase shifter 103B, and the like based on information from the detection circuit, the shape of the elliptical locus of vibration can be arbitrarily controlled.
[0184]
By performing such control, the following becomes possible.
[0185]
1: Since the speed distribution in the feeding direction of the vibrating body changes, the speed of the moving body can be changed.
[0186]
2: Since the frictional force distribution changes, an elliptical locus with the least sliding loss can be created. For example, the inclination of the elliptic trajectory may be controlled so that the axis of the ellipse is orthogonal to the spherical surface of the moving object. Specifically, it is possible to improve the efficiency by generating an elliptical locus in the radial direction of the inner peripheral surface 100a (formed obliquely to the axis) of the elastic body 100 shown in FIG.
[0187]
Alternatively, it is also possible to feed back signals from a rotation detector and a wattmeter (not shown) and drive in the most efficient elliptical locus state.
[0188]
3: Since the way of contact between the vibrating body and the moving body (displacement and speed in the normal direction) also changes, it is possible to make an elliptical locus that does not generate abnormal noise such as squealing or the like with the least impact.
[0189]
It goes without saying that the vibration type actuators of the fourteenth to twentieth embodiments described above can be replaced with the vibration type actuators shown in FIGS. 13, 14, and 15.
[0190]
Further, as shown in FIG. 21B, the x-axis and y-axis of the piezoelectric element are set at the center of the polarization region, but the present invention is not limited to this.
[0191]
Furthermore, the vibrating body may be moved with respect to the moving body.
[0192]
【The invention's effect】
  According to the present invention, the vibrating body and the contact body can be relatively moved in any direction.
[Brief description of the drawings]
1A and 1B show a first embodiment of the present invention, in which FIG. 1A is an external perspective view of a vibrating body, FIG. 1B is a primary mode of longitudinal vibration of a vibrating body, and FIGS. The secondary mode of vibration is shown.
2A and 2B show a second embodiment of the present invention, in which FIG. 2A is an external perspective view of a vibrating body, FIG. 2B is a primary mode of longitudinal vibration of the vibrating body, and FIGS. The secondary mode of vibration is shown.
FIG. 3 is a sectional view of a vibration type actuator showing a third embodiment of the present invention.
FIG. 4 is a sectional view of a vibration type actuator showing a fourth embodiment of the present invention.
FIG. 5 is a cross-sectional view of a vibration type actuator showing a fifth embodiment of the invention.
FIG. 6 is a sectional view of a vibration type actuator showing a sixth embodiment of the present invention.
FIG. 7 is a sectional view of a vibration type actuator showing a seventh embodiment of the present invention.
FIG. 8 is a sectional view of a vibration type actuator showing an eighth embodiment of the present invention.
FIG. 9 is an external perspective view of a vibration type actuator showing a ninth embodiment of the present invention.
10 is an exploded perspective view of the vibrating body in FIG. 9;
11A and 11B are a side view and a top view showing a state in which the vibrating body of FIG. 9 is supported.
FIG. 12 is a side view showing a tenth embodiment of the present invention.
FIG. 13 is a schematic diagram showing an eleventh embodiment of the present invention.
FIG. 14 is a side view showing a twelfth embodiment of the present invention.
FIG. 15 is an external perspective view showing a thirteenth embodiment of the present invention.
FIG. 16 is a perspective view of a ring-shaped vibrating body.
FIG. 17 is a perspective view of a conventional spherical vibration type actuator.
FIG. 18 is a cross-sectional view of a conventional vibration actuator.
FIG. 19 is a drive circuit diagram according to a ninth embodiment.
20 is a circuit diagram of the output circuit of FIG.
21A and 14B show a fourteenth embodiment, in which FIG. 21A is an external perspective view of a vibrating body and vibration displacement in each direction, and FIG. 21B is a plan view of a piezoelectric element;
22 shows a fifteenth embodiment, (a) is an external perspective view of a vibrating body, (b) is a diagram showing the arrangement direction and polarization direction of piezoelectric elements, and (c) and (d) are vibrating bodies. FIG.
23 is a view showing suction holding means for the vibrating body and contact body of FIG. 22;
24A and 24B show a sixteenth embodiment, in which FIG. 24A is an external perspective view of a vibrating body, and FIGS. 24B, C, and D are views showing displacement of the vibrating body.
FIG. 25 is a longitudinal sectional view of a vibration type actuator showing a seventeenth embodiment.
FIGS. 26A and 26B show a vibration type actuator according to an eighteenth embodiment, in which FIG. 26A is a longitudinal sectional view taken along the line A-A ′ in FIG.
FIGS. 27A and 27B show a vibration type actuator according to a nineteenth embodiment, wherein FIG. 27A is a longitudinal sectional view taken along line BB ′ of FIG. 9B, FIG. 27B is a top view of FIG. Side view.
FIG. 28 is a vector diagram for explaining the principle of the twentieth embodiment;
FIG. 29 is a vector diagram for explaining the principle of the twentieth embodiment;
30 is a block diagram of a drive circuit according to a twentieth embodiment. FIG.
[Explanation of symbols]
1, 101, 102, 201, 202, 301, 302, 401-403 Elastic body
2, 102, 206, 306, 406 Mobile
3, 103, 203, 204, 404, 405 Piezoelectric element
3a, 3b Piezoelectric element for longitudinal vibration
3c Piezoelectric element for longitudinal vibration detection 3e-3h Piezoelectric element for lateral vibration
3d, 3i Lateral vibration detection piezoelectric element
303a to 303d Piezoelectric element
4 Head elastic body 4a Head tip recess
4b Concave groove 4c Constriction (concave part)
5a Intermediate elastic body 5b Rear elastic body
5c 1st elastic body 5d 2nd elastic body
5e Third elastic body
6,407 Fastening bolt 6a Fastening shaft recess
7 Permanent magnet 8 Coil
9 Support plate 9a Center part
10 Contact body 11 Collar
12 Electrode plate 13 Ground electrode plate
14 seat 15 support base
16 Globe 17 Chassis
18 Camera 19 Vibrating body
19a Elastic body 19b Piezoelectric element
20a, 20b Moving body 21 Spring
30 Optional support 40, 50, 60 Vibrating body
41 Control system 42, 43 Mobile
408 hose 410 case
411 Support member 412 Upper cover
413 Ball 414 Coil spring
415 Pressing member

Claims (1)

A vibrating body in which a columnar elastic body is joined on a plate-shaped elastic body;
A contact body that contacts the columnar elastic body;
A first electro-machine for generating vibrations in the columnar elastic body that are provided in the columnar elastic body and are displaced in two directions orthogonal to each other in a plane orthogonal to the longitudinal direction of the columnar elastic body. An energy conversion element;
A second electro-mechanical device provided on the plate-like elastic body for bending the plate-like elastic body to generate a vibration that displaces the plate-like elastic body in a direction perpendicular to the two directions. An energy conversion element,
Of the three displacements generated in the columnar elastic body and the plate-shaped elastic body, a combined vibration that selectively combines displacements in at least two directions is used to contact the contact body in the columnar elastic body. A vibration actuator characterized by forming a circular or elliptical motion in an arbitrary direction at a contact portion .

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