JP4070399B2 - ヘリウムガスの精製方法 - Google Patents
ヘリウムガスの精製方法 Download PDFInfo
- Publication number
- JP4070399B2 JP4070399B2 JP2000330396A JP2000330396A JP4070399B2 JP 4070399 B2 JP4070399 B2 JP 4070399B2 JP 2000330396 A JP2000330396 A JP 2000330396A JP 2000330396 A JP2000330396 A JP 2000330396A JP 4070399 B2 JP4070399 B2 JP 4070399B2
- Authority
- JP
- Japan
- Prior art keywords
- helium
- gas
- adsorption
- moisture
- exhaust gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007789 gas Substances 0.000 title claims description 138
- 239000001307 helium Substances 0.000 title claims description 125
- 229910052734 helium Inorganic materials 0.000 title claims description 125
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 title claims description 125
- 238000000034 method Methods 0.000 title claims description 51
- 238000000746 purification Methods 0.000 title claims description 8
- 238000001179 sorption measurement Methods 0.000 claims description 94
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 46
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 40
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 36
- 229910052786 argon Inorganic materials 0.000 claims description 23
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 23
- 239000001301 oxygen Substances 0.000 claims description 23
- 229910052760 oxygen Inorganic materials 0.000 claims description 23
- 229910052757 nitrogen Inorganic materials 0.000 claims description 19
- 229910021536 Zeolite Inorganic materials 0.000 claims description 17
- 239000003463 adsorbent Substances 0.000 claims description 17
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims description 17
- 239000010457 zeolite Substances 0.000 claims description 17
- 239000012535 impurity Substances 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 238000000926 separation method Methods 0.000 claims description 5
- 210000002784 stomach Anatomy 0.000 claims 1
- 238000003795 desorption Methods 0.000 description 18
- 238000011084 recovery Methods 0.000 description 14
- 230000008929 regeneration Effects 0.000 description 8
- 238000011069 regeneration method Methods 0.000 description 8
- 238000007600 charging Methods 0.000 description 7
- 229920006395 saturated elastomer Polymers 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 239000000498 cooling water Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 239000003507 refrigerant Substances 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005816 glass manufacturing process Methods 0.000 description 2
- -1 laser Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 239000005304 optical glass Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000000274 adsorptive effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 230000009189 diving Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000005429 filling process Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Landscapes
- Separation Of Gases By Adsorption (AREA)
- Separation By Low-Temperature Treatments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000330396A JP4070399B2 (ja) | 2000-10-30 | 2000-10-30 | ヘリウムガスの精製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000330396A JP4070399B2 (ja) | 2000-10-30 | 2000-10-30 | ヘリウムガスの精製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002137909A JP2002137909A (ja) | 2002-05-14 |
| JP2002137909A5 JP2002137909A5 (enExample) | 2005-08-11 |
| JP4070399B2 true JP4070399B2 (ja) | 2008-04-02 |
Family
ID=18806926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000330396A Expired - Fee Related JP4070399B2 (ja) | 2000-10-30 | 2000-10-30 | ヘリウムガスの精製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4070399B2 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5372607B2 (ja) * | 2009-05-29 | 2013-12-18 | 住友精化株式会社 | ヘリウム精製方法およびヘリウム精製装置 |
| JP5134588B2 (ja) * | 2009-06-12 | 2013-01-30 | 住友精化株式会社 | アルゴン精製方法、アルゴン精製装置、目的ガス精製方法、および目的ガス精製装置 |
| CN108786371B (zh) * | 2018-08-01 | 2023-10-13 | 成都益志科技有限责任公司 | 一种高温富氧烟气回收氧气系统及其回收方法 |
| JP7502962B2 (ja) * | 2020-10-27 | 2024-06-19 | 大陽日酸株式会社 | ガス精製装置及びガス精製方法 |
| JP7289909B1 (ja) | 2021-12-28 | 2023-06-12 | 大陽日酸株式会社 | 圧力変動吸着式ガス分離装置 |
| JP7289908B1 (ja) | 2021-12-28 | 2023-06-12 | 大陽日酸株式会社 | 圧力変動吸着式ガス分離装置 |
| EP4458452A1 (en) * | 2021-12-28 | 2024-11-06 | Taiyo Nippon Sanso Corporation | Pressure-fluctuation-adsorption-type gas separation device |
| JP7381554B2 (ja) * | 2021-12-28 | 2023-11-15 | 大陽日酸株式会社 | 圧力変動吸着式ガス分離装置 |
| JP7148748B1 (ja) * | 2022-03-11 | 2022-10-05 | 大陽日酸株式会社 | ガス精製装置 |
| CN118242841A (zh) * | 2022-12-23 | 2024-06-25 | 长庆工程设计有限公司 | 天然气提氦联产多产品的系统及方法 |
| CN119793131A (zh) * | 2024-12-18 | 2025-04-11 | 中国石油化工股份有限公司 | 基于纳米多孔材料的氦气分离结构及分离方法 |
-
2000
- 2000-10-30 JP JP2000330396A patent/JP4070399B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002137909A (ja) | 2002-05-14 |
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