JP4070399B2 - ヘリウムガスの精製方法 - Google Patents

ヘリウムガスの精製方法 Download PDF

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Publication number
JP4070399B2
JP4070399B2 JP2000330396A JP2000330396A JP4070399B2 JP 4070399 B2 JP4070399 B2 JP 4070399B2 JP 2000330396 A JP2000330396 A JP 2000330396A JP 2000330396 A JP2000330396 A JP 2000330396A JP 4070399 B2 JP4070399 B2 JP 4070399B2
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Japan
Prior art keywords
helium
gas
adsorption
moisture
exhaust gas
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Expired - Fee Related
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JP2000330396A
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English (en)
Japanese (ja)
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JP2002137909A (ja
JP2002137909A5 (enExample
Inventor
秀明 高野
靖夫 平井
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Air Water Inc
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Air Water Inc
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Priority to JP2000330396A priority Critical patent/JP4070399B2/ja
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Publication of JP2002137909A5 publication Critical patent/JP2002137909A5/ja
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Publication of JP4070399B2 publication Critical patent/JP4070399B2/ja
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  • Separation Of Gases By Adsorption (AREA)
  • Separation By Low-Temperature Treatments (AREA)
JP2000330396A 2000-10-30 2000-10-30 ヘリウムガスの精製方法 Expired - Fee Related JP4070399B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000330396A JP4070399B2 (ja) 2000-10-30 2000-10-30 ヘリウムガスの精製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000330396A JP4070399B2 (ja) 2000-10-30 2000-10-30 ヘリウムガスの精製方法

Publications (3)

Publication Number Publication Date
JP2002137909A JP2002137909A (ja) 2002-05-14
JP2002137909A5 JP2002137909A5 (enExample) 2005-08-11
JP4070399B2 true JP4070399B2 (ja) 2008-04-02

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JP2000330396A Expired - Fee Related JP4070399B2 (ja) 2000-10-30 2000-10-30 ヘリウムガスの精製方法

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JP (1) JP4070399B2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5372607B2 (ja) * 2009-05-29 2013-12-18 住友精化株式会社 ヘリウム精製方法およびヘリウム精製装置
JP5134588B2 (ja) * 2009-06-12 2013-01-30 住友精化株式会社 アルゴン精製方法、アルゴン精製装置、目的ガス精製方法、および目的ガス精製装置
CN108786371B (zh) * 2018-08-01 2023-10-13 成都益志科技有限责任公司 一种高温富氧烟气回收氧气系统及其回收方法
JP7502962B2 (ja) * 2020-10-27 2024-06-19 大陽日酸株式会社 ガス精製装置及びガス精製方法
JP7289909B1 (ja) 2021-12-28 2023-06-12 大陽日酸株式会社 圧力変動吸着式ガス分離装置
JP7289908B1 (ja) 2021-12-28 2023-06-12 大陽日酸株式会社 圧力変動吸着式ガス分離装置
EP4458452A1 (en) * 2021-12-28 2024-11-06 Taiyo Nippon Sanso Corporation Pressure-fluctuation-adsorption-type gas separation device
JP7381554B2 (ja) * 2021-12-28 2023-11-15 大陽日酸株式会社 圧力変動吸着式ガス分離装置
JP7148748B1 (ja) * 2022-03-11 2022-10-05 大陽日酸株式会社 ガス精製装置
CN118242841A (zh) * 2022-12-23 2024-06-25 长庆工程设计有限公司 天然气提氦联产多产品的系统及方法
CN119793131A (zh) * 2024-12-18 2025-04-11 中国石油化工股份有限公司 基于纳米多孔材料的氦气分离结构及分离方法

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JP2002137909A (ja) 2002-05-14

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