JP4058147B2 - 黒鉛材の純化処理炉 - Google Patents
黒鉛材の純化処理炉 Download PDFInfo
- Publication number
- JP4058147B2 JP4058147B2 JP30875697A JP30875697A JP4058147B2 JP 4058147 B2 JP4058147 B2 JP 4058147B2 JP 30875697 A JP30875697 A JP 30875697A JP 30875697 A JP30875697 A JP 30875697A JP 4058147 B2 JP4058147 B2 JP 4058147B2
- Authority
- JP
- Japan
- Prior art keywords
- heating chamber
- graphite
- chamber
- gas
- cooling chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000746 purification Methods 0.000 title claims description 26
- 239000007770 graphite material Substances 0.000 title claims description 24
- 238000010438 heat treatment Methods 0.000 claims description 58
- 238000001816 cooling Methods 0.000 claims description 46
- 239000011810 insulating material Substances 0.000 claims description 15
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
- 229910002804 graphite Inorganic materials 0.000 claims description 14
- 239000010439 graphite Substances 0.000 claims description 14
- 239000000835 fiber Substances 0.000 claims description 6
- 230000001681 protective effect Effects 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 35
- 239000000463 material Substances 0.000 description 30
- 229910052736 halogen Inorganic materials 0.000 description 7
- 150000002367 halogens Chemical class 0.000 description 7
- 239000000112 cooling gas Substances 0.000 description 6
- 238000005192 partition Methods 0.000 description 6
- 238000000605 extraction Methods 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 3
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 150000001805 chlorine compounds Chemical class 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 235000011194 food seasoning agent Nutrition 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
Images
Landscapes
- Carbon And Carbon Compounds (AREA)
- Tunnel Furnaces (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30875697A JP4058147B2 (ja) | 1997-11-11 | 1997-11-11 | 黒鉛材の純化処理炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30875697A JP4058147B2 (ja) | 1997-11-11 | 1997-11-11 | 黒鉛材の純化処理炉 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH11147706A JPH11147706A (ja) | 1999-06-02 |
| JPH11147706A5 JPH11147706A5 (enrdf_load_stackoverflow) | 2005-05-19 |
| JP4058147B2 true JP4058147B2 (ja) | 2008-03-05 |
Family
ID=17984921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30875697A Expired - Lifetime JP4058147B2 (ja) | 1997-11-11 | 1997-11-11 | 黒鉛材の純化処理炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4058147B2 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102538449A (zh) * | 2012-01-09 | 2012-07-04 | 宁波市鄞州圣安电气设备有限公司 | 加热炉 |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106379880B (zh) * | 2016-08-30 | 2018-06-26 | 山东伟基炭科技有限公司 | 一种超高温真空气体纯化炉系统 |
| CN109000476B (zh) * | 2018-07-17 | 2024-04-12 | 宁夏太谷能源管理科技服务有限公司 | 一种高效节能矿热炉 |
| CN109231198A (zh) * | 2018-11-27 | 2019-01-18 | 湖南顶立科技有限公司 | 一种物料提纯设备 |
| JP7249974B2 (ja) * | 2020-09-03 | 2023-03-31 | 株式会社ノリタケカンパニーリミテド | 熱処理炉および熱処理炉を用いた無機材料の製造方法 |
| CN112225213B (zh) * | 2020-10-14 | 2021-06-08 | 韶山恒升机械工业有限公司 | 高温石墨提纯炉 |
| CN115709997A (zh) * | 2022-10-25 | 2023-02-24 | 青海黄河上游水电开发有限责任公司新能源分公司 | 一种用于生产电子级多晶硅的石墨部件的净化方法 |
| CN116062748B (zh) * | 2023-01-12 | 2025-03-25 | 黑龙江省宝泉岭农垦帝源矿业有限公司 | 高纯石墨制备装置、制备方法及其载料机构和负压机构 |
-
1997
- 1997-11-11 JP JP30875697A patent/JP4058147B2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102538449A (zh) * | 2012-01-09 | 2012-07-04 | 宁波市鄞州圣安电气设备有限公司 | 加热炉 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11147706A (ja) | 1999-06-02 |
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