JP4058147B2 - 黒鉛材の純化処理炉 - Google Patents

黒鉛材の純化処理炉 Download PDF

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Publication number
JP4058147B2
JP4058147B2 JP30875697A JP30875697A JP4058147B2 JP 4058147 B2 JP4058147 B2 JP 4058147B2 JP 30875697 A JP30875697 A JP 30875697A JP 30875697 A JP30875697 A JP 30875697A JP 4058147 B2 JP4058147 B2 JP 4058147B2
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Prior art keywords
heating chamber
graphite
chamber
gas
cooling chamber
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Expired - Lifetime
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JP30875697A
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English (en)
Japanese (ja)
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JPH11147706A (ja
JPH11147706A5 (enrdf_load_stackoverflow
Inventor
博美 松本
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Chugai Ro Co Ltd
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Chugai Ro Co Ltd
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Priority to JP30875697A priority Critical patent/JP4058147B2/ja
Publication of JPH11147706A publication Critical patent/JPH11147706A/ja
Publication of JPH11147706A5 publication Critical patent/JPH11147706A5/ja
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  • Tunnel Furnaces (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
JP30875697A 1997-11-11 1997-11-11 黒鉛材の純化処理炉 Expired - Lifetime JP4058147B2 (ja)

Priority Applications (1)

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JP30875697A JP4058147B2 (ja) 1997-11-11 1997-11-11 黒鉛材の純化処理炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30875697A JP4058147B2 (ja) 1997-11-11 1997-11-11 黒鉛材の純化処理炉

Publications (3)

Publication Number Publication Date
JPH11147706A JPH11147706A (ja) 1999-06-02
JPH11147706A5 JPH11147706A5 (enrdf_load_stackoverflow) 2005-05-19
JP4058147B2 true JP4058147B2 (ja) 2008-03-05

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JP30875697A Expired - Lifetime JP4058147B2 (ja) 1997-11-11 1997-11-11 黒鉛材の純化処理炉

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102538449A (zh) * 2012-01-09 2012-07-04 宁波市鄞州圣安电气设备有限公司 加热炉

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106379880B (zh) * 2016-08-30 2018-06-26 山东伟基炭科技有限公司 一种超高温真空气体纯化炉系统
CN109000476B (zh) * 2018-07-17 2024-04-12 宁夏太谷能源管理科技服务有限公司 一种高效节能矿热炉
CN109231198A (zh) * 2018-11-27 2019-01-18 湖南顶立科技有限公司 一种物料提纯设备
JP7249974B2 (ja) * 2020-09-03 2023-03-31 株式会社ノリタケカンパニーリミテド 熱処理炉および熱処理炉を用いた無機材料の製造方法
CN112225213B (zh) * 2020-10-14 2021-06-08 韶山恒升机械工业有限公司 高温石墨提纯炉
CN115709997A (zh) * 2022-10-25 2023-02-24 青海黄河上游水电开发有限责任公司新能源分公司 一种用于生产电子级多晶硅的石墨部件的净化方法
CN116062748B (zh) * 2023-01-12 2025-03-25 黑龙江省宝泉岭农垦帝源矿业有限公司 高纯石墨制备装置、制备方法及其载料机构和负压机构

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102538449A (zh) * 2012-01-09 2012-07-04 宁波市鄞州圣安电气设备有限公司 加热炉

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Publication number Publication date
JPH11147706A (ja) 1999-06-02

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