JP4047325B2 - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
- Publication number
- JP4047325B2 JP4047325B2 JP2004310694A JP2004310694A JP4047325B2 JP 4047325 B2 JP4047325 B2 JP 4047325B2 JP 2004310694 A JP2004310694 A JP 2004310694A JP 2004310694 A JP2004310694 A JP 2004310694A JP 4047325 B2 JP4047325 B2 JP 4047325B2
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- substrate
- pure water
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Description
1 … 回転軸
3 … モータ
5 … スピンベース
7 … 支持ピン
9 … 上部洗浄ノズル
17 … 制御部
23 … 側部洗浄ノズル
29 … 下部洗浄ノズル
Claims (2)
- 基板に所定の処理を行う基板処理装置であって、
基板の下面と対向する対向面と複数本の支持ピンとを有し、前記支持ピンによって前記対向面と基板の下面とを離間させた状態で基板を支持する基板支持手段と、
基板を支持した前記基板支持手段を回転させる駆動手段と、
回転する基板にその下方から純水を供給する純水供給手段と、
前記基板支持手段の側方から純水を供給する側部洗浄ノズルと、
前記純水供給手段から純水を基板に供給させて洗浄した後に、前記駆動手段により基板を回転させながら前記純水供給手段から純水を基板に供給させるとともに前記側部洗浄ノズルから純水を供給させる制御部と
を備えたことを特徴とする基板処理装置。 - 前記純水供給手段は、前記基板支持手段に支持された基板の下面に向けて純水を供給する下部洗浄ノズルを備え、
前記制御部は、処理の進行に応じて前記下部洗浄ノズルからの前記純水の流量および前記駆動手段による前記基板支持手段の回転数を変化させる請求項1に記載の基板処理装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004310694A JP4047325B2 (ja) | 2004-10-26 | 2004-10-26 | 基板処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004310694A JP4047325B2 (ja) | 2004-10-26 | 2004-10-26 | 基板処理装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP36523098A Division JP3739225B2 (ja) | 1998-12-22 | 1998-12-22 | 基板処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005101629A JP2005101629A (ja) | 2005-04-14 |
JP4047325B2 true JP4047325B2 (ja) | 2008-02-13 |
Family
ID=34464224
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004310694A Expired - Fee Related JP4047325B2 (ja) | 2004-10-26 | 2004-10-26 | 基板処理装置 |
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JP (1) | JP4047325B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103341459A (zh) * | 2013-06-20 | 2013-10-09 | 无锡华润微电子有限公司 | 光掩模清洗机及其清洗方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101354548B1 (ko) * | 2006-12-29 | 2014-01-23 | 엘지디스플레이 주식회사 | 포토공정 파티클 제거장치 |
JP5001877B2 (ja) * | 2008-02-26 | 2012-08-15 | 株式会社ディスコ | 板状物搬送装置および板状物搬送方法 |
JP6725384B2 (ja) | 2016-09-26 | 2020-07-15 | 株式会社Screenホールディングス | 基板処理方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3474055B2 (ja) * | 1996-06-13 | 2003-12-08 | 大日本スクリーン製造株式会社 | 基板処理方法および基板処理装置 |
JPH10135171A (ja) * | 1996-10-29 | 1998-05-22 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JPH10199852A (ja) * | 1997-01-13 | 1998-07-31 | Dainippon Screen Mfg Co Ltd | 回転式基板処理装置 |
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2004
- 2004-10-26 JP JP2004310694A patent/JP4047325B2/ja not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103341459A (zh) * | 2013-06-20 | 2013-10-09 | 无锡华润微电子有限公司 | 光掩模清洗机及其清洗方法 |
Also Published As
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JP2005101629A (ja) | 2005-04-14 |
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